SI unit for EtherNet/IP TM

Output data Offset MSB LSB MSB LSB (Word) 15 8 7 0 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 -38No.EX-OMP0013-E Dimensions If a fieldwireable connector is used for the power supply connection, and the SI unit is installed directly to a valve manifold, the cable connectors outer diameter should be 16 mm or less.

VCB

/8, VCB3: 15/13, VCB4: 19/16 Note1) Vibration resistance Conditions when tested with one sweep of 10 to 250 Hz in the axial direction and at a right angle to the armature, in both energized and deenergized states.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

+0.4 +0.2 CW CX CZ L RR CT CZ -0.1 -0.3 CW B + Stroke L 10 15 6.5 12 8 6 RR CL + Stroke 16 18 8 16 10 9 A + Stroke 20 20 10 20 10 10 25 20 18 36 12 10 30 22 18 36 12 10 40 28 22 44 12 14 8 Series MQQ Accessory Dimensions Female-male thread conversion joint Rod end nut d NN Rod MM D C C B H E F A B H Applicable bore size (mm) Applicable bore size (mm) Part no.

ZPT/ZPX

H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82

Fan Type Ionizer

Product Body Installation . 10 3-2. Wiring . 11 3-2-1. Connection Circuit . 11 3-2-2. Wiring of the power supply cable . 13 3-2-3. Wiring of the AC adapter . 13 3-3. Timing chart . 14 4. Function . 14 4-1. Name of Parts . 14 4-2. Adjustment of offset voltage (ion balance) . 15 4-3. Adjustment of air flow . 15 4-4. Maintenance Warning Function and Cleaning . 15 4-5.

IDX-OM-W053

H 10-1 . 10-1 10-2 . 10-1 11 K 11-1 . 11-1 11-2 . 11-1 12 L 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 13 R 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 14-5 . 14-3 15 V 15-1 . 15-1 15-2 . 15-2 15-3 . 15-2 16 16-1 . 16-1 2 i i i 1 () OFF 3 ON OFF i 1 1 3 i 1 i i 2 5 i 2 1 i-2 i i 2 2 i 2 3 50 i 2 4 i

CEx-OML0058

I s i t p o s s i b l e f o r c a b l e o f I s t h e a n y i n f l u e n c e s t r o k e re a d i n g c y l i n d e r t o o f n o i s e ? b e w i r e d s e p a r a t e l y f r o m t h e p o w e r l i n e ? t h e p o w e r l i n e ?

High Power Cylinder:

2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective area So (mm2)

DOC1020530

Bit 7 Bit 2 Bit 0 Enable Enable Fault Reset Quick Stop Switch On Operation Voltage Shutdown 0 1 1 0 (2)/(6)/(8) Switch On 0 0 1 1 1 (3) Disable Voltage 0 0 (7)/(9)/(10)/(1 2) Quick Stop 0 0 1 (7)/(10)/(11) Disable Operation 0 0 1 1 1 (5) Enable Operation 0 1 1 1 1 (4)/(16) Fault Reset 0 1 (Note) (15) Note.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

(Values at the initial period) VG JIS Symbol VP S070 VQ Model Valve model VKF VS3145 VS3135 P A C [dm3(sb Cv b Cv b Cv b Cv Flow characteristics 6.1 7.3 9.0 0.3 0.2 0.2 1.6 1.8 2.4 0.4 0.2 0.3 1.5 1.8 2.3 1/4 3/8 1/2 3/4 6.1 7.2 9.0 0.27 0.21 4.8 5.1 16 15 0.34 0.46 4.1 4.5 18 20 VZ VS AC DC 30 or less

5 Port Air Operated Valve SYA3000/5000/7000 Series

(F2) C8, N9 C10, N11 3 4 5 109.7 48.1 51.6 38.1 2 x M5 x 0.8 (Pilot port) 13.6 B A One-touch fitting (A, B port) Applicable tubing O.D.: 8, 5/16" 10, 3/8" 2 x 4.2 (For manifold mounting) 19 42 (66) (52) 2 x 4.2 (For mounting) (5.5) 47.6 SYA7 20-02-(F2) 3 4 5 (49.5) (42.5) 30 1/4 (A, B port) 24.5 15 20 Manual override 1/4 (P port) 2 x 1.8 (Breathing hole) 0.9 2 40 (23.9) 18 30 24.5 EB P EA

SYA3000/5000/7000

M5 x 0.8 (Pilot port) VZA 13.6 B VFA A One-touch fitting (A, B port) Applicable tubing O.D.: 8, 5/16" 10, 3/8" 19 2 x 4.2 (For manifold mounting) VFRA 42 VA (66) 2 x 4.2 (For mounting) (52) (5.5) 47.6 SYA7 20-02-F2) 3 4 5 (49.5) (42.5) 30 24.5 1/4 (A, B port) 15 20 Manual override 1/4 (P port) 2 x 1.8 (Breathing hole) 0.9 2 40 (23.9) 18 30 24.5 EB P EA 2 x 2.2 die-cast hole (For manifold

1

, 15 MDHR2 With auto switch 12-14-2

Title not found

to 50mm/s) i2 to 100 Heal resislant aulo swilch 16 to 63 Hea\./ duty sctaper 20 to 100 Stalnless steelpiston rod and rod nut 12 10 100 AdjuslaLle stroke exlend 12 to 100 Adjustable slroke retract 1 2 l o 1 0 0 DualsLroke, dual rod 1 2 b 1 m DLralstroke s ngle rod 12 to 100 NPI Porr (1) 32 10 160 32 lo 100 Wilh lrcnr gulde boss (1) 12 to lO0 20 to 10O lnch-sizewrcnch flab 12 to 100 (1) Not

Digital Flow Switch (Remote type monitor unit)

to 186 1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x

VNC

N.O. 5.7 5.5 2 VXA 1 4 VNC0 VNC02 10.4 10.2 50 VN 12 (P1) 10 (P2) Note) The companion flange is JIS B 2210 10K (standard) or its equivalent.

High Vacuum L Type Valve

Step 8 3 Bolt b Tightening torque of bolt b Nm Tightening torque of bolt a Nm 1 2 Valve Tightening Valve Tightening 4 Size Torque Size Torque XLD-25 1.5 All size 0.3 -40 2.5 -50 6 -63 6 Bonnet assembly -80 15 -100 20 Heater -160 102 Pilot port M Bolt a Cover Body Apply 0.2MPa of air pressure to the pilot port M (for main pumping).

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

16 20 25 12 16 20 25 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 M5 x 0.8 M5 x 0.8 Double acting Single rod 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5

Guide Cylinder

Bore size(mm) Auto switch model 20 50 40 32 25 D-M9(V) D-M9W(V) D-A9(V) Note 1) Note 1) Note 1) Note 1) Note 1) BMA3-020 BMA3-025 BMA3-032 BMA3-040 BMA3-050 (A set of a,b,c,d) (A set of a,b,c,d) (A set of a,b,c,d) (A set of a,b,c,d) (A set of a,b,c,d) Note 2) D-M9A(V) BMA3-020S BMA3-025S BMA3-032S BMA3-040S BMA3-050S (A set of b,c,d,e) (A set of b,c,d,e) (A set of b,c,d,e) (A set of b,c,d

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Compound No. 1349-80 Symbol Nil N1 Leakage Pa m3/s or less Note 1) Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10