99

30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min

Magnetically Coupled

shaft indicates the moment point of the cylinder and the load section. 100 1000 Allowable driving force Fn (lbf) Allowable driving force Fn (lbf) 100 10 10 Usable range Usable range 1 0 1 2 3 4 1 0 2 4 6 Distance from cylinder shaft center Lo (inch) Distance from cylinder shaft center Lo (inch) NCY3B25 100 Allowable driving force Fn (lbf) 10 Usable range 1 0 1 2 3 4 5 Distance from cylinder

AC Servo Motor Driver (Pulse input type)

Approx. 5.6k Switch DICOM 24VDC 10 300mA Approx. 5mA VCES 1.0V ICEO 100 A (2) Digital output interface DO-1 A maximum of 2.6V voltage drop occurs in the driver. Servo amplifier Driver If polarity of diode is reversed, servo amplifier will fail. driver ALM, etc. Load DOCOM (Note) 24VDC 10 300mA Note.

LVQ

7 20 38.5 110 60 10 7 20 38.5 110 LVQ60 available only as V.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

10 to 40 39.5 M4 x 0.7 31.5 6 6( 5.8) 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5 7 5 16 10 to 60 44 M6 x 1.0 34 8 8( 7.8) 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10( 9.8) 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x 1.0 42 12 12(11.8) 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23 10 49.5 7 30 10 to 50, 75, 100 60.5 M6 x

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10

Cylinder with Lock Series CNS

Different surfaces, Same surface) 1 110 115 105 15 15 + 40 (n 2) 2 (n = 4, 8, 12, 16 ) 105 + 40 (n 4) 2 110 + 40 (n 4) 2 115 + 40 (n 4) 2 n (n = 2, 4, 6, 8 ) (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) 2 (Different surfaces, Same surface) 1 95 100 90 10 D-Y69 D-Y7PV D-Y7WV 10 + 30 (n 2) 2 (n = 4, 8, 12, 16 ) 90 + 30 (n 4) 2 95 + 30 (n 4) 2 100 + 30 (n 4) 2 n (n = 4, 8, 12, 16 ) (n = 4

155

V or less at 10 mA (2 V or less at 40 mA) 4 V or less 100 A or less at 24 VDC Leakage current 0.8 mA or less Indicator light Red LED illuminates when turned ON.

Digital Gap Checker ( compatible)

ON (500 to 351) (350 to 301) (300 to 251) (250 to 201) ISA3-F 3000 or less ISA3-G (3000 to 1751) X+1500 Process X+1250 X+1000 (1750 to 1501) (1500 to 1251) (1250 to 1001) data ISA3-H 2500 or less (2500 to 1751) Distance type Level 6 Level 7 Level 8 Level 9 Weight ISA-F X+15 X+10 X+5 X (5 to 0) 5 (20 to 16) (15 to 11) (10 to 6) ISA3-G X+75 X+50 X+25 X Display (25 to 0) 25 (100 to 76) (75

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

] Approx. 300 (Lead wire length) 98.6[103] 79 [83.4] R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 96.8 28 28 69 28 82 14 14 14 5 5 5 Refer to the page 91 for dimentions with connector cable. 9 Series SYJ3000 3 Position Closed Center/Exhaust Center/Pressure Center [ ]: AC 3 4 5 G H Grommet (G), (H): SYJ3 40-M5 M5 x 0.8 (A, B port) 10 5 10 2-3.2 (For mounting) 15.3 32 22 3 2.5 Manual override

IR1000/2000/3000

kPa) IRV2000 IRV2000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0

PFxx-OMX0007

(Displays 0 when the value is (Displays 0 when the value is below 90 L/min) below 180 L/min) 100 to 1050 L/min 200 to 2100 L/min 10.0 0 to 10%F.S. (Displays 0 when the value is (Displays 0 when the value is below 100 L/min) below 200 L/min) : The zero-cut range of the accumulated value and accumulated pulse value should be 1% F.S. or more.

Bag Filter

B to Nominal filtration accuracy of 5, 10, 25, 50, 100 m can be selected.

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Socket only (3 pcs.) 300A 600A 1000A 2000A 3000A AXT661-13A AXT661-13A-6 AXT661-13A-10 AXT661-13A-20 AXT661-13A-30 AXT661-13AN AXT661-13AN-6 AXT661-13AN-10 AXT661-13AN-20 AXT661-13AN-30 AXT661-14AN AXT661-14AN-6 AXT661-14AN-10 AXT661-14AN-20 AXT661-14AN-30 100/110 VAC for single: AXT661-31A-; for double: AXT661-32A200/220 VAC for single: AXT661-34A-; for double: AXT661-35Aare in accordance

CLK1

Hs 30.5 35 40.5 47.5 D-H7C 15 65 10 65 + 50 (n-2) A B Approx. Hs 3 5.5 7 7 n-2 2 D-H7C 31.5 28.5 30 30 15 + 50 ( ) (n = 2, 4, 6...) D-G5NTL 75 + 50 (n-2) 15 75 30.5 38 43 50 A B 0 (1) 0.5 2 2 D-A3 D-G3, D-K3 100 + 100 (n-2) 35 + 30 (n-2) 35 100 D-B5, D-B6 33.5 23.5 25 25 Approx.

Clean Gas Filter

Maximum Flow Rate Lines Clean Gas Filter 1000 SFC10 SFA30 Maximum flow rate L/min (ANR) A SFA20 100 SFB10 30 SFA10 10 1 0.6 1 0.8 0 0.2 0.4 Inlet pressure MPa Clean Gas Strainer 1000 SFB20 Maximum flow rate L/min (ANR) 100 10 1 0.6 1 0.8 0 0.2 0.4 Inlet pressure MPa 298 Clean Gas Filter: Cartridge Type/Disc Type SFA100/200/300 Series RoHS HAA HAW How to Order AT Precision filtration for compressed

Compact Vacuum Ejector Series ZA

Symbol Rated pressure range and accuracy Part no. 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC With pressure sensor (0 to 101 kPa, accuracy 2% F.S.) With pressure sensor (0 to 101 kPa, accuracy 1% F.S.) With pressure sensor (100 to 100 kPa, accuracy 2% F.S.) With pressure sensor (100 to 100 kPa, accuracy 1% F.S.)

3

20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 Air N2 Argon CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 20 2000 PFMC 5 500 Thermal type (MEMS) New New Dry air N2 1 L/min 10 1000 Bypass flow type 20 2000 PF2A 1 10 0.1 L/min 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200

SI Unit for Vacuum Manifold

Settable range : 10...988 (1.0 kPa...98.8 kPa) Combination conditions with other parameters : 10 H2 P2-P1 (100) ... ... ... ... ... 16 2 R/W 0x0064 Energy saving operation hysteresis (H2) of CH15 (100) -16No.EX-OMZ0018 3.4.5. Pressure P3 (Index 68) Table 3-13.