SMC high purity series LVA valve has three types of body materials (SUS/PPS/PFA) that can be selected based on the customers application. Special diaphragm construction insures gentle opening and closing that prevents the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing particle formation.

Lightweight, point-of-use ZH and ZU series vacuum generators combine design simplicity with high performance. Simply plug an air supply tube in one end, and vacuum is ready at the other end. The slim ZU generators are extra compact. The ZH and ZU immediate response may be quicker than central vacuum systems. Also, these generators are often smaller and lighter than the bulky vacuum lines

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350-04 AMH450-06 AMH450-06 AMH550-06 AMH550-10 AMH650-14 AMH850-20 AMH850-20 IDG10-03 IDG20-03 IDG30-03 IDG50-03 IDG75-04 IDG100-04 AME150-03 AMF150-03 AME150-03 AMF150-03 AME250-03 AMF250-03 AME250-03 AMF250-03 AME350-04 AMF350-04 AME350-04 AMF350-04 AME450-06 AMF450-06 AME450-06 AMF450-06 AME550-10 AMF550-10 AME550-10 AMF550-10 AME650-14 AMF650

SMC high purity series LVA valve has three types of body materials (SUS/PPS/PFA) that can be selected based on the customers application. Special diaphragm construction insures gentle opening and closing that prevents the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing particle formation.

S Couplers Series KKA

Body size Port size KKA3 S-01 M KKA3 P-01 M R1 / 8 R1 / 8 1 / 8 KKA3 S-02M 1 / 8 KKA3 P-02M R1 / 4 R1 / 4 KKA3 S-03 M KKA3 P-03 M R3 / 8 R3 / 8 KKA4 S-02M KKA4 P-02M R1 / 4 R1 / 4 KKA4 S-03 M 1 / 4 KKA4 P-03 M 1 / 4 R3 / 8 R3 / 8 KKA4 S-04 M KKA4 P-04 M R1 / 2 R1 / 2 KKA6S-03 M KKA6P-03 M R3 / 8 R3 / 8 KKA6S-04 M KKA6P-04 M 1 / 2 1 / 2 R1 / 2 R1 / 2 KKA6S-06M KKA6P-06M R3 / 4 R3 / 4 Built-in

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Note 2) This filter does not include any companion flange, companion flange bolt, and O-ring. 4 x K depth L DRAIN (): Internal dimensions for FH342 type (mm) Model Weight (kg) d A B C D E F G H J J' K L M N P Q Threaded Rc Flange SSA FH340-03 FH340-04 FH342-06 FH342-08 FH34 -10 FH34 -12 FH341-16 FH440-03 FH44 -04 FH44 -06 FH44 -08 FH44 -10 FH44 -12 FH441-16 FH441-20 FH441-24 FH540-03 FH54

Fluoropolymer Piping Equipment

Applicable tubing size (inch) 1/8" x 0.086" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8" LVN Size Size Symbol Symbol 1 2 3 4 5 6 03 04 06 08 10 12 19 25 03 07 11 13 19 25 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQHB LQHB 1 1/8" TL TIL 2 1/4" 3 3/8" TLM TILM 4 5 6 1/2" 3/4" 1" TD TID TH TIH Note) For details of the applicable tubing sizes, refer to page 945. Specifications Piping 1.

3 Port Solenoid Valve/

Piping adapter Spacer with Bracket Mounting Position Dual residual pressure release valve (-X538) Dual residual pressure release valve with soft start-up function (-X555) (Max. 10) 201.8 82.9 (14) (14) 201.8 (Max. 10) 82.9 IN OUT IN OUT d c b a d a b c Model a b c d Note Model a b c d Note VP544-5DZ1-03-X538 33.9 57.2 95.7 220.7 AW30-03G-A Y300T-A E300-03-A VP544-5DZ1-03-X555 33.9 57.2 129.2

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, FLUOROPOLYMER, MFLD BASE, VALVE, FLUOROPOLYMER, 1.00782 lb, ModelManifold typeP (IN), A (OUT) typeValve stationsPort size (port P)Port size (port A)LLA3AStacking typeCommon IN/Individual OUT2 to 5 stations3/83/8

High Purity Fluoropolymer

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type

Microprocessor-Controlled Electro-Pneumatic Regulator ITV2000 EASY PROGRAMMING GUIDE

FOR TECHNICAL SUPPORT PLEASE CALL 1-800-762-7621 Page 6 last updated 11/03/03 10:05 AM

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Microprocessor-Controlled Electro-Pneumatic Regulator ITV2000 EASY PROGRAMMING GUIDE

Page 4 last updated 11/03/03 10:05 AM Microprocessor-Controlled Electro-Pneumatic Regulator ITV2000 EASY PROGRAMMING GUIDE ADJUSTING THE MINIMUM AND MAXIMUM PRESSURES The ITV allows the user to customize the minimum pressure (zero point) at 0% input signal and the maximum pressure (span) at 100% input signal.

MB

(mm) Auto switch model Bore size 50 63 80 100 125 32 40 D-A3/A44 D-G39/K39 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 BS1-125 BMB2-032 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F59F D-F5BAL D-F5NTL BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 BT-08 D-P5DWL D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL BMB3T-040 BMB3T-040 BMB3T-050 BMB3T-050 BMB3T-080 BMB3T-080 BAP2T-080 BMB4-032 BMB4-050 BMB4-050

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

LVQ

Metric sizes Inch sizes Body Class Type LQ-GP J PAX 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 4 04 04 04 04 6 06 06 06 8 08 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J PB Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin

. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing 100 ft. - Red TIUB-07-R1-50-MW 1/4" Polyurethane Tubing 50 ft. - Red TIUB-07-R1-100-MW 1/4" Polyurethane Tubing 100 ft. - Red TIUB-09-R1-50-MW 5/16" Polyurethane Tubing 50 ft. - Red TIUB-09-R1

. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing 100 ft. - Red TIUB-07-R1-50-MW 1/4" Polyurethane Tubing 50 ft. - Red TIUB-07-R1-100-MW 1/4" Polyurethane Tubing 100 ft. - Red TIUB-09-R1-50-MW 5/16" Polyurethane Tubing 50 ft. - Red TIUB-09-R1

. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing 100 ft. - Red TIUB-07-R1-50-MW 1/4" Polyurethane Tubing 50 ft. - Red TIUB-07-R1-100-MW 1/4" Polyurethane Tubing 100 ft. - Red TIUB-09-R1-50-MW 5/16" Polyurethane Tubing 50 ft. - Red TIUB-09-R1

. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing 100 ft. - Red TIUB-07-R1-50-MW 1/4" Polyurethane Tubing 50 ft. - Red TIUB-07-R1-100-MW 1/4" Polyurethane Tubing 100 ft. - Red TIUB-09-R1-50-MW 5/16" Polyurethane Tubing 50 ft. - Red TIUB-09-R1