VXA21/22

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J M 14.5 17 L 29 32 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104

VXD21/22/23

Conduit terminal: T Cable 6 to 12 Model Grommet Electrical entry Bracket Conduit Conduit terminal DIN terminal R Q 59 59 60 P Port size Rc VXD2140 Q R a b c d e f M L K J H F E D C B A N 69 (76) 77 (84) 87 (97) Q N 61 69 79 Q N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Normally open Normally closed VXD2142 , 30 30 35 59 59 62 57 74 81 34 51 58 29 37 43 34 43 47 20 20 23 92 92 95 104

VXF

Outside Local Area: (800) 258-9200-www.stevenengineering.com Solenoid Specifications VX3 Pilot exhaust noise (dB) Apparent power VA Temperature rise (C) (Rated voltage) Power consumptions W (Holding) Air operated type Voltage fluctuation (%) Frequency (Hz) Power source VXA Model With silencer Holding Without silencer Inrush VN AC 50 20 11 4.5 60 45 35 55 45 35 55 60 50 60 Rated value 10 104

Vacuum Equipment

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series ZPT/ZPR 13-11-104 Vacuum Pad Ball Joint Type Ball joint type ideal for adsorption on slanted work surface Pad diameter: 10, 13, 16, 20, 25, 32, 40, 50 In the rectangular, compact cylinder Series CU with a high level of mounting precision, a

SQ1000/2000

Dimension L 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 104 Series SQ1000/2000 Manifold Options for SQ1000/SQ2000 Negative COM specifications The following valve part numbers are for negative COM specifications. Manifold part numbers are the same as standard.

SYJA3000

3.2 (0.18) 3 position closed center SYJA5320-M5 M5 X 0.8 M5 X 0.8 3.6 (0.2) [2.7 (0.15)] 3 position exhaust center SYJA5420-M5 70 PA,B: 4.0 (0.22) [2.7 (0.15)] A,BR1,R2: 3.4 (0.19) 3 position pressure center SYJA5520-M5 2 position single 4.5 (0.25) 79 (45) SYJA5140-01 Base mounted 2 position double 4.5 (0.25) 94 (60) SYJA5240-01 3 position closed center 3.4 (0.19) SYJA5340-01 M5 X 0.8 1/8 104

VCB

depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31 67.5 36 6 18 86 66 53 99 53 44 62 22 1/4 M5 19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104

Series VCL

G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104

Series VCS

Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104

VKF300

18.5 R P R P 11.5 18 37 11.5 18 37 67.5 59 Max .10 71.5 Pg.7 Manual override (non-locking) 4Rc(PT) 1/8 (ports P, R) 18 25 31 53.5 Approx. 300 (lead wire length) Light (DZ type only) 4Rc(PT) 1/8 (ports P, R) 75.5 83 Manual override (non-locking) nRc(PT) 1/8 (port A) Applicable cord O.D. 4 to 6.5 A A P = 19 20 L: Dimension table n: Stations n L L1 L2 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104

VQ

SY SYJ (L5) Plug assembly (L4) VK 2-4.5Mounting hole 1 2 3 VVQ100-12A(L3) 88 (8.5) L2 VZ 48.7 L1 VT VT (45) (35) 33 25 (5.5) VP 23.5 12.3 VG R11 Manual override 21.5 (Min. bending inner radius) (29.3) VP 104 VQ VQZ Stations 1 2 3 4 5 n Dside Uside VZ 2-M5 X 0.8(E port) VS 2-M5 X 0.8(P port) 42.9 A A 20 (8.5) 1.5 5 n-M5 X 0.8 (A port) 5 (7.5) 15 P=10 38 Equation: L1=10n+32 L2=10n+43

Series VQ Base Mounted Metal Seal/Rubber Seal

#8 Valve 2 position single SV5Q11V, #9 2 position doubleSV5Q11V, #10 3 position SV5Q11V, #10 16 212.5 240.5 262.5 273 15 202 230 250 260.5 14 191.5 219.5 250 260.5 13 181 209 237.5 248 12 170.5 198.5 225 235.5 11 160 188 212.5 223 10 149.5 177.5 200 210.5 9 139 167 187.5 198 8 128.5 156.5 187.5 198 7 118 146 175 185.5 6 107.5 135.5 162.5 173 5 97 125 150 160.5 4 86.5 114.5 137.5 148 3 76 104

VQC

3 4 5 6 7 Stations D-side 8 U-side M12 Female thread 2-C8 3(R) port 0 DIN rail clamp screw 1 62.5 60 (12) 40.5 25 9.5 7.5 18.5 M12 Male thread 20.5 (7.5) 2n-C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2-C8 1(P) port 34 P = 10.5 Formulas: L1 = 10.5n + 45, L2 = 10.5n + 93.5 n: Stations (maximum 16 stations) n L L1 L2 L3 L4 1 55.5 104

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Station (Max. 20) Dimensions L n 2 30.5 43.5 75 85.5 18 198.5 211.5 237.5 248 19 209 222 250 260.5 20 219.5 232.5 262.5 273 13 146 159 187.5 198 14 156.5 169.5 200 210.5 15 167 180 200 210.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 10 114.5 127.5 150 160.5 11 125 138 162.5 173 12 135.5 148.5 175 185.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9 104

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Dimensions Equation L1=10.5n+9.5 L2=10.5n+17.5 n: Station (Max. 20 stations) L n 2 30.5 38.5 62.5 73 18 198.5 206.5 237.5 248 19 209 217 237.5 248 20 219.5 227.5 250 260.5 15 167 175 200 210.5 16 177.5 185.5 212.5 223 17 188 196 225 235.5 10 114.5 122.5 150 160.5 11 125 133 162.5 173 12 135.5 143.5 175 185.5 13 146 154 175 185.5 14 156.5 164.5 187.5 198 7 83 91 112.5 123 8 93.5 101.5 125 135.5 9 104

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Cover diameter 1.5 Cross section 0.23mm2 R1 R2 R1 R2 5 3 5 3 < >: AC < >: AC Equation L1=10.5n+9.5 L2=10.5n+17.5 n: Station (Max. 20 stations) Dimensions L n 2 30.5 38.5 62.5 73 20 219.5 227.5 250 260.5 17 188 196 225 235.5 18 198.5 206.5 237.5 248 19 209 217 237.5 248 12 135.5 143.5 175 185.5 13 146 154 175 185.5 14 156.5 164.5 187.5 198 15 167 175 200 210.5 16 177.5 185.5 212.5 223 9 104

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L1=10.5n+9.5 L2=10.5n+22.5 L n 2 30.5 43.5 75 85.5 18 198.5 211.5 237.5 248 19 209 222 250 260.5 20 219.5 232.5 262.5 273 13 146 159 187.5 198 14 156.5 169.5 200 210.5 15 167 180 200 210.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 10 114.5 127.5 150 160.5 11 125 138 162.5 173 12 135.5 148.5 175 185.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9 104

VY511, VYU5

P 500 150 144 400 104 100 300 P 66 43 26 16 90 200 50 56 34 22 14 8 5 100 0 0 20 30 40 50 60 70 80 90 100 10 20 30 40 50 60 70 80 90 100 10 Bore size (mm) Bore size (mm) 1.15-33 Series VY511/VYU5 Precautions Be sure to read before handling. Refer to p.0-26 and 0-27 for Safety Instruction and common precautions on the products mentioned in this catalog.

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

ZCUK

Model Bore size (mm) Cylinder stroke (mm) 5 63 (68) 103 (128) 180 (214) 304 (358) 514 (587) 49 (54) 79 (104) 145 (179) 259 (313) 421 (494) 10 15 20 25 30 40 50 69 (79) 115 (145) 204 (244) 343 (402) 574 (652) 53 (63) 86 (116) 159 (198) 279 (338) 451 (529) 75 (85) 127 (157) 228 (267) 382 (441) 634 (712) 57 (67) 93 (123) 173 (212) 299 (358) 481 (559) 81 (91) 139 (169) 252 (292) 421 (480) 694