ZQ-OM01601

H_2:5.0 kPa (OUT2) OFF ON (V) 17 - <> OUT1 (16 -) 1 [P_1] 1 1 1 1 [H_1] [H_2] OUT1 18 - 2[F 0] [F] 2 2 [F 0] 21 SI kPa [F 1] OUT1 22 HYS ONOFF -70 kPa(P_1) 10 kPa(H_1) [F 2] OUT2 24 ON ON 5 kPa(H_2) OFF OFF 0 kPa(H_3) ON 1 kPa(H_4) 19 - [F 3] 26 2.5 ms [F 4] 27 [F 6] 29 0% [F11] 30 1,000 [F80] 31 OFF [F81] 32 OFF [F90] 33 OFF [F96] 33 OFF [F98] 36 [F99] 38 OFF 20

IDX-OM-W029

6 6 6-1 IDU22E IDU37E IDU55E IDU75E 3/min (ANR)( 1) 50Hz/60Hz 3.9/4.3 5.7/6.1 8.4/9.8 11.0/12.5 m MPa 0.7 55 32 10 580 MPa 0.151.0 240 (85%) AC230V10% 50Hz ( 4) V ( 4) AC200/220V10% 50Hz/60Hz ( 4) AC230V (50Hz) 4.3 6.9 10.7 AC200V (2) A (50/60Hz) 4.2/4.8 6.7/7.3 8.2/9.3 AC230V (50Hz) 960 1570 2300 AC200V (2) (50/60Hz) 1100/1450 1570/2050 2000/2850 AC230V (50Hz) 10 20

VBA-OM-S001

No gap Booster regulator Air tank Booster regulator A B C D E F G H I J K L M Grooves There should be no damage or dust O-rings VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc 3/8 257 60 Rc 1/4 20 Air tank There is a slight play on the diagonal parts.

VBA-OM-P018

VBAT05A1-U-X104 VBAT10A1-U-X104 1.5MPa Q235B 5L 10L 075 6.6kg 11.5kg IN 3/8 VBAT-V1 OUT 3/8 1/2 1/4 VBA1 VBA1/VBA2 TSG R0003-2007 2 () IN (I) :VBA1 4VBA2 8 6 : OUT VBA2 (J) Rc3/8 VBA1 OUT IN Rc1/2 Rc3/8 () OUT VBA1 12~14Nm(R1/4) VBA2 22~24Nm(R3/8) OUT O Rc1/4 O A B C D E F G H I J K L M O VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc3/8 257 60 Rc1/4 20

VBA-OM-S006

VBAT-U 1 1 ( 3 ) VBAT-V1 () () / / VBAT-M46C / VBAT-M46 VBAT05S1-U-X104 2 OUT VBAT-M46C VBAT05S1-U-X104 VBAT10S1-U-X104 IN VBAT05S1-U-X104 VBAT10S1-U-X104 VBA1 VBA1/VBA2 VBA2 5.3kg 8kg 5L 10L OUT 3/8 1/2 TSG R0003-2007 1.5MPa SUS304 0~75 oC 1/4 IN 3/8 O VBA1 1 SMC VBAT-V1 1 VBA11A 150 337 370 307 163 160 100 200 Rc3/8 257 60 A B C D E F G H I J K L M 278 130 39 Rc1/4 20

PSxx-OMU0002CN

-2No.PS-OMU0002CN-D 1 / *3) 1 1.5 3) 1 1 -3No.PS-OMU0002CN-D () () () () -4No.PS-OMU0002CN-D () * UL UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) -5No.PS-OMU0002CN-D * FG (35 N () () *() 6 33 () () DC(-)() () * -6No.PS-OMU0002CN-D ( ) () CE -550(5) * 1015 10 1% 2264 LCD * -7No.PS-OMU0002CN-D M5 ISE20A X M 3 ISE20A -0.100~1.000 Mpa Y ZSE20A 0.0~-101.0 kPa K ZSE20AF

ISE70_75.eng

Normally closed URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

VQZ100V-OMT0001

16 No.VQZ100V-OMT0001 Revision history TW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved No.VQZ100V-OMT0001

VFR2000-OMM0001

-15No.VFR2000-OMM0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009 SMC Corporation All Rights Reserved No.VFR2000-OMM0001

VFR5000-OMN0001

rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 VFR5000-OMN0001 / / / / 1 1 3) 3) 1 1 () 3 VFR5000-OMN0001 VFR5000 Series 5 / 1 DC 3 () 0.1 2 C-R () C-R DC 3% AC 20%

VFR6000-OMQ0001

rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 VFR6000-OMQ0001 / / / / 1 1 3) 3) 1 1 () 3 VFR6000-OMQ0001 VFR6000 Series 5 / 1 DC 3 () 0.1 2 C-R () C-R DC 3% AC 20%

VT317-OMH0003

-2VT317**-OMH0003-A / *3) 1 1.5 *3)1 1 () [] -3VT317**-OMH0003-A VT317 Series 3 / / () () () () C-R ( )C-R DC 2% AC 20% () (SSR)AC () 1) (C-R ) OFF 2) () 1 2 1V -10 1 DC N.O.() 3 4 VT317**-OMH0003-A VT317 Series 3 / () DC 30N 1) 1 2) 1 ()ISO VG32 2 ISO VG32 (SDS) R,NPT 23 RNPT Nm Rc 1/8 35 Rc 1/4 812 N.C.N.O. 5 VT317**-OMH0003-A VT317 Series 3 / () () 30 () , 1

EX180-SDN3_4_5_6_eng

Ambient temperature for operation: -10 to 50 oC Ambient temperature for storage: -20 to 60 oC Pollution degree 2: (UL508) PWR(V) PWR MNS PWR(V) PWR The following instructions must be followed during maintenance: Turn off the power supply. Stop the air supply, exhaust the residual pressure and verify that the air is released before performing maintenance. Otherwise an injury can result.

EX260-SDN_eng

Description No.1 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 0 HW Set the address and speed in a local with switch on the SI unit Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

EX600-SDNA_eng

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range The status display LED displays the power supply and communication status. -20 to 60 oC Storage temperature range 24 VDC Class2, 2 A Power supply 24 VDC Class2, 2 A Output DeviceNetTM status

EX260-SPR-A_eng

URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010 SMC Corporation All Rights Reserved

EX600-SPRA_eng

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range The status display LED displays the power supply and communication status. -20 to 60 oC Storage temperature range 24 VDC Class2, 2 A Power supply SI unit common status PROFIBUS DP status

EXxx-OMP0004CN

No.4 SI L ERR LED SI L RUN LED SI SI No.5 SI L ERR LED SI L RUN LED SI SI No.6 SI SI SI SI L ERR LED SI L RUN LED -23No.EX-OMP0004CN-I No.7 SI SY/SV/S0700 32 VQC 24 No.8 SI ( 0.6 Nm) SI SI LED SI COM SI COM SI No.9 LED SI COM SI COM SI -24No.EX-OMP0004CN-I SI SI (0.6 Nm) (1) (2) (3) (4) SI M3 0.6Nm M330 SI -25No.EX-OMP0004CN-I -10+50 3585%RH 20

EX260-SMJ_eng

Ambient temperature for operation: -10 to 50 oC Ambient temperature for storage: -20 to 60 oC Pollution degree 3: (UL508) Provide grounding to assure the safety and noise resistance of the Fieldbus system. Individual grounding should be provided close to the product with a short cable.

EX600-SMJ_eng

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range The status display LED displays the power supply and communication status. -20 to 60 oC Storage temperature range 24 VDC Class2, 2 A Power supply 24 VDC Class2, 2 A Output CC-Link status