VXA21/22

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 170 0.5 1.0 0.6 0.2 0.1 1.0 0.6 0.2 0.1 0.1 4.5 15 0.61 2.5 10.45 0.75 1 4 250 (8A) 26 41 46 15 26 41 58 58 1.1 1.7 1.9 0.61 1.1 1.7 2.4 2.4 3.3 6.4 8.8 2.5 3.3 6.4 11 11 0.50 0.40 0.40 0.45 0.50 0.40 0.38 0.38 1.1 1.8 2.3 0.75 1.1 1.8 2.8 2.8 6 8 1.5

V

18 33.2 38 32.4 57 19 H O W T O O R D E R ZP V A C U U M P A D S ZP F L AT T Y P E PA D W I T H R I B P A D D I A M E T E R P A D M AT E R I A L Part No Type A C B D E F Y 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 N Nitrile Rubber (Standard) S Silicon Rubber U Urethane F Fluorine Rubber GN Anti-static Nitrile Rubber GS Anti-static Silicon Rubber ZP10C C10 10 12 41

Series SYJA300 3 Port Air Operated Valve

SS3YJA5-40-031-01 SS3YJA7-41-031-01 SYJA714 1 pc. 2 pcs. 1 pc. 1 pc. 2 pcs. 1 pc. SYJA514 SYJ500-10-3A . SYJ700-10-2A .. Pilot Pressure Range 0.6 Pilot pressure (MPa) Pilot pressure range 0.5 0.4 Caution 0.3 Be sure to read before handing.

SYJA3000

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions. 0.2 SS5YJA3-41-03-M51 pc. SYJA3140 1 pc. SYJA3240 1 pc.

Vacuum System Peripherals:

Section code Note) Mounting SUP/EXH block assembly When the location is non-standard, indicate both SUP/EXH block assembly part no., quantity and manifold part number. 13-14-41 41 Date issued: Photo copying this page is recommended.

2/3 Port Valve

Use 2 port valve VNH33. 4.2-33 VNH Dimensions Dimensions (mm) Model Main port 2 port 3 port Pilot port H I A C B D E F G 3 8 3 8 Rc(PT) 1 8 2-Rc(PT) 2-Rc 3-Rc(PT) 3-Rc 50 60 79 90 77 95.5 111 119 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1

VQ7-6/7-8

Sockets Mounting bolts VQ7-6: M5 VQ7-8: M6 Proper tightening torque Nm 0.8 to 1.2 Receptacle housing Window Coil 41 Series VQ7-6/7-8 Specific Product Precautions 2 Be sure to read before handling. Refer to pages 37 through 40 for safety instructions and common precautions.

%silltr

+o.o (s6.7) 48.3 71 .5 84.9 342.5 50.9 25.4 67 .4 a a 7 4.4 2.2 1 . 1 0.55 ls.s 22 1 1 40 250 125 oc .tc 54.6 47.6 52.4 72.4 39 (86) 46.3 /oa ll 46.6 55.8 27.9 73.9 37 3.9 2 78 39 20.3 10.9 50 400 200 100 50 EA (87) 43.5 (e6.5) 48.3 71 .3 35.7 84.8 42.4 50.8 25.4 (ee.2) 51.6 27.4 68.3 36.8 1 0.5 79.9 40 20 0 63 650 300 150 75 (e4.4) 47.2 82.3 41 .1 (s1.2) 45.6 67.4 33.7 80.1 40.1 4A 24 31

asilltr

, tri.gr,o*e 056 (r/6) h l:0.36 ot s 1s1"1 % l=0.36 r06 (170') % , 1 L l=0.52 150 \1%',) ls, th l=0.5 2O0 (2') h, t1 t:O.44 250121/z') h t:O.44 300 (3') 16, 1n l-0.55 400 (4') th, la l=0.65 056 (%6') 11,4a o75 (%',I 1'Aa 1 % 106 (1%a) 't% 15o 11%'l 13A 2 200 (2'1 1'la 2'Aa 25O l2%',) 1151e 213,4e 300 (3') 2 2% 400 (41 2uAe 33Aa NOTE l) Female lhread length ('l l rs shorter lor lhe above listed

Title not found

41"ry19e: 4-position dual 3-port valves for \ \ ..;'r..:.. independent control of ' .:1-.i/-9-.A & B ports Availabe conf igurations [N.C./N.C ]. I N I n / N l / . \ I n i r N l a / N l ^ l : , ! . : ' : ) ' , + . .

Vacuum

manifold assembly: sta. 1-4) NZXl101-KlsLZ-EC-M NZZXlO4-TB-A Parl Number / Configuration Six station manitold assembly: sra. 1) NZX 1071 -K3sMZ-F-M sta. 2-5) NZX1071-K1sLZ-EC-M sta. 6) zx'l-BABI NZZXl O6-TB-A 4tl 2 ' Part Number / Configuratlon Four station manifold assembly: sta. 1-2) NZX'I101-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 784 Compact Pressure Switch Series ZSE2/ISE2 01 T1 Dimensions: ISE2Connector type: ISE2-15C Grommet type: ISE2-15 01 T1 01 T1 Pressure setting trimmer Pressure setting trimmer L H SET L H SET 15 15 Indicator light (Red) Indicator light (Red) 20 20 600 (3000) 600 (3000) ZSE ISE ZSP 48.5 41

Thermo-dryer

Correction Factors Data Inlet Air Temperature Data Outlet Air Pressure Dew Point Data Air Flow Capacity A C E Inlet air temperature F (C) Correction factor Outlet air pressure dew point F (C) Correction factor 3.5 (100) 7.1 (200) 10.6 (300) 14.1 (400) 17.6 (500) 21.2 (600) 24.7 (700) 28.3 (800) Air flow capacity scfm (L/min [ANR]) Model IDH4 IDH6 68 (20) 1.36 37.4 (3) 0.50 77 (25) 1.24 41

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

15.2 18.5 18.5 20.9 18.5 20.9 18.5 20.9 65.9 67.8 65.9 67.8 75.6 77.7 75.6 77.7 75.6 77.7 84.2 85.8 84.2 85.8 84.2 85.8 69.9 71.8 69.9 71.8 81.1 83.2 81.1 83.2 81.1 83.2 88.2 89.8 88.2 89.8 88.2 89.8 63.9 65.8 63.9 65.8 73.6 75.7 73.6 75.7 73.6 75.7 82.2 83.8 82.2 83.8 82.2 83.8 17 19 17 19 19 21 19 21 19 21 21 22 21 22 21 22 19 21 19 21 21 23 21 23 21 23 23 24 23 24 23 24 22 23 30 31 39 41

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

25.2 30 20 20 10 30 60.5 (N02L: 61.5) 2 x M3 x 0.5 thread depth 4 ZSE ISE Piping port 02L: R1/4 N02L: NPT1/4 3.5 ZSP PS 8.8 Atmospheric vent port 2.6 ISA PSE IS 10.3 29.5 ISG ZSM Width across flats 17 M5 x 0.8 thread depth 5 41 2 25.2 49.5 58.8 64.8 Piping port Rc1/8 Piping port URJ1/4 Piping port TSJ1/4 -A2L: URJ1/4 -B2L: TSJ1/4 -C01L: Rc1/8 737 Series ZSE80/ISE80 Dimensions With bracket

Card Motor

(500) Vertical: 1.8 (50) Horizontal: 17.6 (500), Vertical: 3.5 (100) Optical linear encoder (incremental) Sensor 30 None 1.25 Provided 30 None 1.25 Provided 30 None 1.25 Provided Pushing operation 6 1 to 4.8 1 to 5 1 to 3.9 Positioning operation Positioning repeatability (m) Note 4)5) Accuracy (m) Note 4)5) 90 5 90 5 90 5 Measurement Maximum speed (mm/s)Note 6) 100 10 100 10 100 10 400 41

Industrial Filter FGD Series

Antistatic specifications (FGDE, FGDF) Note) For a comparison with the nominal filtration accuracy according to the element category, refer to pages 41 and 42. 24 C

HAW

(Refer to the instruction manual for details on the cleaning.) 42 47 49.5 40 39.5 43 44.5 34.5 35.5 36 38 40 41.5 10 12000 14000 HAW75 45 48.5 52 45 41 43 45.5 34.5 35.5 36 39 40 42.5 15000 18000 20 HAW110 Conditions: Air pressure 0.7 MPa, Cooling water temperature 30C. Inlet air temperature 50C is saturated air. At 70C or more, it is humid air with dew point 67C. 16

1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--