Body Size: -, Applicable Tubing: -, AS: AS, Size: M5 Basis, 1F: 1F, Tube Size: Ø3.2

Size: 4 [0.57m³/min (ANR), 20.13scfm], Version: NIL (All Sizes Except 15), Voltage: 23 [230VAC (50Hz), Single Phase], Option 1: -, Option 2: -

Size: 75 [12.5³/min (ANR), 441.43scfm], Version: NIL (All Sizes Except 15), Voltage: 23 [230VAC (50Hz), Single Phase], Option 1: -, Option 2: -

Size: 8 [1.2m³/min (ANR), 42.38scfm], Version: NIL (All Sizes Except 15), Voltage: 23 [230VAC (50Hz), Single Phase], Option 1: -, Option 2: -

Size: 11 [1.7m³/min (ANR), 60.03scfm], Version: NIL (All Sizes Except 15), Voltage: 23 [230VAC (50Hz), Single Phase], Option 1: -, Option 2: -

Size: 6 [200~800 L/min (ANR), (7.06~28.25 scfm)], Combination of Built-in Products: -, Option: -

Type: [Fitting] Pipe/Plug, Fitting Type: Other shapes, Body Material: [PBT Resin] PBT, Application: Standard/Mini, Shape: [Others] Sputtering Cover, Applicable Fitting Size (mm): 3.2, Applicable tube fitting size (inches): -

Type: [Fitting] One-Touch Coupling, Fitting Type: Other shapes, Tube Size 1(φ): 3.2, Application: Standard/Mini, Shape: [Others] Multi-Connector, Compatible Fluid: Air, Tube Material: Soft Nylon / Polyurethane, Number of Connection Tubes(piece): 6, Connector Type: Multi-connector, Options: None

Type: [Fitting] One-Touch Coupling, Fitting Type: Other shapes, Tube Size 1(φ): 3.2, Application: Standard/Mini, Shape: [Others] Multi-Connector, Compatible Fluid: Air, Tube Material: Soft Nylon / Polyurethane, Number of Connection Tubes(piece): 6, Connector Type: Plug side only, Options: None

Type: [Fitting] One-Touch Coupling, Fitting Type: Other shapes, Tube Size 1(φ): 3.2, Application: Standard/Mini, Shape: [Others] Multi-Connector, Compatible Fluid: Air, Tube Material: Soft Nylon / Polyurethane, Number of Connection Tubes(piece): 6, Connector Type: Socket side only, Options: None

Type: [Fitting] One-Touch Coupling, Fitting Type: Other shapes, Tube Size 1(φ): 3.2, Application: Standard/Mini, Shape: [Others] Multi-Connector, Compatible Fluid: Air, Tube Material: Soft Nylon / Polyurethane, Number of Connection Tubes(piece): 12, Connector Type: Multi-connector, Options: None

Type: [Fitting] One-Touch Coupling, Fitting Type: Other shapes, Tube Size 1(φ): 3.2, Application: Standard/Mini, Shape: [Others] Multi-Connector, Compatible Fluid: Air, Tube Material: Soft Nylon / Polyurethane, Number of Connection Tubes(piece): 12, Connector Type: Plug side only, Options: None

Type: [Fitting] One-Touch Coupling, Fitting Type: Other shapes, Tube Size 1(φ): 3.2, Application: Standard/Mini, Shape: [Others] Multi-Connector, Compatible Fluid: Air, Tube Material: Soft Nylon / Polyurethane, Number of Connection Tubes(piece): 12, Connector Type: Socket side only, Options: None

Type: [Fitting] One-Touch Coupling, Fitting Type: Union with same diameter, Tube Size 1(φ): -, Body Material: [303/304 Stainless Steel] SUS304+PBT, Application: Standard/Mini, Packing, Material of O-Ring: [NBR] Standard (NBR), Tube to Tube Union Shape: [Manifolds] Multi-Connector, Compatible Fluid: Air, Number of Connection Tubes(piece): 10, Release button color: Blue, Custom-made specifications

Type: [Fitting] One-Touch Coupling, Fitting Type: Union with same diameter, Tube Size 1(φ): -, Body Material: [303/304 Stainless Steel] SUS304+PBT, Application: Standard/Mini, Packing, Material of O-Ring: [NBR] Standard (NBR), Tube to Tube Union Shape: [Manifolds] Multi-Connector, Compatible Fluid: Air, Number of Connection Tubes(piece): 20, Release button color: Blue, Custom-made specifications

Type: [Fitting] One-Touch Coupling, Fitting Type: Other shapes, Tube Size 1(φ): -, Body Material: [303/304 Stainless Steel] SUS304+PBT, Application: Standard/Mini, Packing, Material of O-Ring: [NBR] Standard (NBR), Shape: [Plugs] Plug Connector, Compatible Fluid: Air, Number of Connection Tubes(piece): 10, Release button color: Blue, Custom-made specifications: N/A

Type: [Fitting] One-Touch Coupling, Fitting Type: Other shapes, Tube Size 1(φ): -, Body Material: [303/304 Stainless Steel] SUS304+PBT, Application: Standard/Mini, Packing, Material of O-Ring: [NBR] Standard (NBR), Shape: [Plugs] Plug Connector, Compatible Fluid: Air, Number of Connection Tubes(piece): 20, Release button color: Blue, Custom-made specifications: N/A

Type: [Fitting] One-Touch Coupling, Fitting Type: Socket and reducer, Tube Size 1(φ): -, Body Material: [303/304 Stainless Steel] SUS304+PBT, Application: Standard/Mini, Packing, Material of O-Ring: [NBR] Standard (NBR), Tube to Stem Shape: [Others] Socket Connector, Compatible Fluid: Air, Number of Connection Tubes(piece): 10, Release button color: Blue, Custom-made specifications: N/A

Type: [Fitting] One-Touch Coupling, Fitting Type: Socket and reducer, Tube Size 1(φ): -, Body Material: [303/304 Stainless Steel] SUS304+PBT, Application: Standard/Mini, Packing, Material of O-Ring: [NBR] Standard (NBR), Tube to Stem Shape: [Others] Socket Connector, Compatible Fluid: Air, Number of Connection Tubes(piece): 20, Release button color: Blue, Custom-made specifications: N/A

Type: Lubricating Device, Type: Mist spray unit, Material: Die-cast aluminum / Platinum silver coated, Rated Voltage: 200 V AC (50/60 Hz), Air blow circuit: None, Float switch specifications: For the upper and lower limit control, Nozzle tube: -, Nozzle tube length(mm): -, Number of mixing valves used(pcs.): -