) 16 (0410)h (041F)h (No.1) 16 (0420)h (042F)h (No.2) 16 . . . . . . . . . . . . . . . (07F0)h (07FF)h (No.63) 16 * ()No.0 (0400)h 1 0=1=ABS2=INC (0401)h 1 *1 1mm/s (0402)h 2 "(-)(+) 0.01mm 2 (0404)h 1 1 1mm/s 2 (0405)h 1 1 1mm/s (0406)h 1 *1 1% (0407)h 1 *1 1% (0408)h 1 *1 1mm/s (0409)h 1 *1 1% (040A)h 1 2 "(-)(+) 0.01mm 040Ch 2 2 "(-)(+) 0.01mm 040Eh 2 *1 0.01mm *1 31
10.2 IF LED PWR BUS STAT ALM CN2 STAT (LEC) CN2SW (LEC) IF (LEC) IF 29 - 11. 11.1 (LEC)IO (LEC) (LEC) 11.2 (LEC)IO (LEC)ID 1Rx80Rx8F Ry80Ry8F (LEC)IO IO (LEC) 11.3 (LEC) ON IO ON IO No IO (LEC) (LEC) 124(5) 30 - (ID=1 ) RWwn [bit0-7]0 RWwn [bit8-F]RWwn+18 (LEC)7.1 RWwn [bit0-7]1 (LEC) (RWrn+8[bit 8])1 INP(Rx8B)1 INP (LEC*6)6.3 IO RWwn [bit0-7]0(RWrn+8[bit 8])0 () INP 31
G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580
G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580
G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580
G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580
G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580
G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580
G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580
G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580
G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580
G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580
G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580
G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580
G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580
G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580
G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580
G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580
G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580
G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580