ML2B

7 !1 r #6 @3 #9 @7 y u t !5 #8 #9 @7 w !6 e q #5 #4 $9 $1 $0 ^1 ^0 $7 $8 ^0 !2 #2 @4 !3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

LECP6_C

PLC (PLC) 15ms30ms /P.36 8.4 () () (LED()) /P.12 3.2 /P.28 7. /P.28 7. /P.28 7. /P.11 3.

Compact Cylinder with Air Cushion and Lock Series RLQ

23.5 28.5 Rod end nut 7 Compact Cylinder with Air Cushion and Lock Series RLQ Dimensions/40 (Emergency Stop) Foot/RLQL40 34 17 44 + Stroke Special cap bolt 33 64 4 64 78 4-6.6 3.2 7 7 62 + Stroke 102.2 + Stroke 11.2 11.2 Rod end nut 38.5 Front flange/RLQF40 40 54 8 17 95 + Stroke 4-5.5 62 72 34 44 + Stroke Rod end nut 38.5 Rear flange/RLQG40 40 54 4-5.5 8 93 + Stroke 7 34 44 + Stroke 62

S070

Lead wire AWG#26) 3.5 27 27.5 25 22 3 11 28.5 3.5 4-11-6 7 Series S070 3 Port Solenoid Valve Compact Direct Operated Dimensions Body ported S070C-G-32 Grommet type R1.1 2 7 7.2 V100 R1.1 Mounting screw (AXT632-106A-2) M2 x 0.4, thread depth 6 mm or more SY SYJ 150 (Lead wire AWG#26) 5 21 5.5 2 (OUT) port VK 5.5 4 4 11.5 9.5 VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

CEx-OMQ0011

P1 No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 59 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

S070

lead type VQZ VZ VS 0.1 W with power saving circuit 150 (Lead wire AWG#26) 3.5 27 6 VFN 26 23.5 20.5 3 9.5 28.5 3.5 4-11-5 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 mounting hole 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1

ZL3-OM00601

Mounting and Installation 7 3.1. Installation 7 3.2. Operating Enviroment 8 3.3. Air Supply 9 3.4. Piping 10 3.5. Wiring 12 4. Solenoid Valve 13 5. Vacuum Pressure Switch 14 6. Vaccum release flow adjusting needle 15 7. Structural Drawing and Replacement of Parts 16 8. Maintenaunce 20 9. Specifications 21 10. Pneumatic Circuit 24 11.

ZL3-OM00801

No.ZL3-OM00801-A / / ZL3 ZL6 No.ZL3-OM00801-A 2 1. 5 2. 6 3. 7 3.1. 7 3.2. 8 3.3. 9 3.4. 10 3.5. 12 4. 13 5. 14 6. 15 7. 16 8. 20 9. 21 10. 24 11. ,, 25 11.1. 25 11.2. 26 11.3. 26 12. 27 13. 28 1 - No.ZL3-OM00801-A /ZL3ZL6 *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

MLU

Size 25 32 40 50 l 18.2 22.2 26.2 32.2 d 7.6 9.6 9.6 13.4 L 23 27 31 38 d M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 D 16.5 18 21 26 Dd9 C 19.6 21.9 25.4 31.2 B 17 19 22 27 H 6 7 8 11 Size 25 32 40 50 Part no.

Digital Flow Switch (Remote type monitor unit)

When setting, allow 7 digits or more between Set point 1 and Set point 2 (Set point 3 and Set point 4). 2: When Set point 1 = Set point 2 (Set point 3 = Set point 4), chattering may occur. -19No.PF-OMG0008-F Initialize mode Default settings PF2A3 series Item Default settings Page PF2A30 series [10L] 1 to 10 L/min type (PF2A510) Selection of the connected sensor Page 21 PF2A31 series [11L]

MX-OMP0051

Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved 21

AIR SLIDE TABLE

Solid state switch A Stroke Stroke Model 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 0 0.6 3.6 5.6 5.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 5.1 5.1 5.1 11.1 28.1 5.1 MXQ12(A,C) 16.5 16.5 16.5 16.5 16.5 16.5 16.5 14.1 6.1 6.1 14.1 14.1 33.1 33.1 MXQ16(A) 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20 14 14 21 21 27 46 46 MXQ20(A) 32.2 21.2 21.2 21.2

ZSE3/ISE3

output specifications 21 and 23.

VS7-6

Material VS7-8-FG-D VS7-8-FHG VS7-8-FJG VS7-8-FPG q w e r t Return spring Gasket Gasket Gasket Mini-Y-packing Pilot valve assembly Detent assembly Double pilot check spacer Packing SUS NBR NBR NBR NBR AXT510-21 AXT510-13 AXT510-14-2 AXT510-14-1 MY-14N AXT510-21 AXT510-13 AXT510-14-2 AXT510-14-1 MY-14N AXT511CAXT511CAXT511CAXT511CAXT511Cy u AXT510-9 i VV72-FPG o NBR AXT644-7-1 1.19-16 VS7

Modular Type Regulator Series AR

7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25 26 31 35.5 37 T 18.5 28.5 32.5 38.5 42.5 42.5 U 14 16 19 21 21 AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 0 3.5 3.5 3 3.3 3.3 Note) For AR20 only, the position of the pressure gauge is above the center of the piping. 40 Regulator AR20 to 60 Made to Order Specifications Contact

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 14 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS SNKJ-016SUS NTJ-015SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 NDH10 U1 NX R1 Part no. +0.048 0 Y-J010SUS 3.3 3.2 8 10 +0.048 0 Y-J016SUS 5 6.5 12 10 Rod end cap T-bracket

LG1H

7 !6 o !5 !1 i !4 Section A-A u Parts list Material Note No. Description No.

PFxx-OMY0005

20 19 18 17 16 Item Pressure measured value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Accumulated Accumulated System Fixed Pressure Temp.

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60