ATEX Compliant 5 Port Solenoid Valve Series 52-SY

02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11 2 4 1/8 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 5/32" One-touch fitting for 1/4" One-touch fitting for 5/16" 1/4 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 5/16" One-touch fitting for 3/8" 1/4 3/8 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 12

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

(Lead wire length) Applicable cable O.D. 3.5 to 7 89.6 Max. 10 58 [65] 91.5 84 42.6 62.5 72.7 M8 x 1 45 69.1 [76.1] Approx. 300 (Lead wire length) Pg7 80.6 [82.8] 90.6 70.8 [73] 79.7 72.3 65.8 23 15 23 15 23 15 23 15 48 48 48 48 12 12 12 12 20 20 20 20 54.5 54.5 54.5 54.5 57.6 Refer to the page 68 for dimensions with connector cable. 38 Series SYJ700 Manifold Specifications Manifold Specifications

CL

12 11 12 84 94 95 103 12 14 18 8 10 12 16 14 16.5 20 26 57.5 69 69 76 91 101 102 111 38 45 45 52 13 17 17 19 18 22 22 30 15.5 19.5 19.5 27 20 25 32 40 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 6 8 10 14 4 5 5.5 6 M4 x 0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Up to 200 Up to 300 Up to 300 Up to 300 25 Without rod boot With rod boot Bore size (mm) H1 NA P PG PH PL PW

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

Environment

SpeedWork Load Graph (Guide) For Step Motor (Servo/24 VDC) LECPA Horizontal Vertical LEY25m LEY25m for acceleration/deceleration: 2000 mm/s2 80 35 LEF 70 30 Lead 3: LEY25C Horizontal work load [kg] 29 Vertical work load [kg] 60 LEJ Lead 3: LEY25C 50 20 LEL Lead 6: LEY25B 40 Lead 6: LEY25B 15 30 LEM 10 20 18 Lead 12: LEY25A 7 LEY LEY 12 10 Lead 12: LEY25A 0 0 LES 0 300 200 400 100 500 600

VQC

(M5 thread) VQC100 0.72 0.72 C8 (for 8) Series VQC1000 to 50 N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") VQC101 1.0 0.65 Metal seal Rubber seal C10 (for 10) VQC200 C4 (For 4) C6 (For 6) C8 (For 8) 2.6 2.0 N11 (3/8") Series VQC2000 to 80 In case of branch type C12 (for 12) N13 (1/2") N3 (5/32") N7 (1/4") N9 (5/16") VQC201 3.2 2.2 C8 (For 8) C10 (For 10) C12 (For 12) ^{Metal seal}

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Connector Series VQ100 VQ110-M-M5 46.3 About 300 (In case of latching) 35.3 Manual override (Lead wire length) About 300 (Lead wire length) 4.9 4.9 12.4 15 E Lead wire color : Red 12 2.5 17 Lead wire color : Black 22.7(Mounting hole) In case of latching type In case of locking knob type SMC VQ110 -*M 34.8 30.7 JAPAN (5.9) 5 (5.9) 5 (4.1) 5 11 7 P A 4.9 8.5 4.9 3-M5 (M3) 30.2 36.6 ( ) :

PA300/500/700

15 0.29 0.23 3.1 3.8 2.9 3.8 12 14 0.36 0.25 VPA742 (Body ported) 0.64 Series VPA700 2.9/3.1 3.5/3.3 3.5/3.5 3.8/4.0 0.18/0.23 0.19/0.18 0.27/0.27 0.26/0.28 14/14 15/16 12/12 15/14 VPA744 (Base mounted) 0.71 Note 1) In the case of body ported type, the valve is without bracket.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Sensors (R) (P) 7.4 3 (13) M plug connector (M) L plug connector: 10-VQD1151-L-M5 M plug connector: 10-VQD1151-M-M5 5 5 5.5 2(B) 4(A) Direct manual override Lead wire length 300 mm 27 Indicator light 17.6 11.2 3 3(R) 9 0.3 3.8 10.9 3.5 5.5 9.1 2 x mounting hole 33.5 28.5 37 38 1(P) 1(P) 5.5 12 4-M5 x 0.8 13 L plug connector (L) (P, A, B, R port) 49 50.5 M plug connector (M) 598 4 Port Direct

VKF300

01 M5 x 0.8 Rc(PT) 1/8 (port A) VKF332 (with bracket) Body ported (single type) 5 G M5 Body ported (for manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Light/Surge voltage suppressor Valve option Port size For vacuum For low power consumption For vacuum/low power consumption For long loading time 01 Nil V Y Rc(PT) 1/8 (with sub plate) Without sub plate None With surge voltage suppressor

Dual Speed Controller with One-touch Fitting Series ASD 1

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

Self-seal Fittings Series KC

L M Nylon Urethane M5 0.8 KCH04-M5 KCH04-01S KCH06-M5 KCH06-01S KCH06-02S KCH08-01S KCH08-02S KCH08-03S KCH10-02S KCH10-03S KCH12-03S KCH12-04S 2.1 2.6 2.4 18 2.1 2.6 2.4 27.3 22.1 28.9 33.4 22.9 38.4 39.7 27.5 44.5 45 47.7 33.6 9.8 30.8 26.1 32.4 37.4 28.9 42.4 45.7 34 50.5 51.5 54.2 41.6 4 8 1 8 10 11.8 12 14 M5 0.8 10 16 14 20 27 25 34 43 48 41 19.5 1 8 1 4 1 8 1 4 3 8 1 4 3 8 3 8 1 2

Magnetically Coupled Rodless Cylinder

M5 6 47 8 61 26 70 9.5 6.0 28.5 41 92 40 M6 x 1.0 M5 6 55 8 71 Note 1) Dimension F provides a clearance of 1mm between the body and the floating joint, but does not consider dead weight deflection of the cylinder tube, etc.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Nil 20, 25, 32, 40 TN TF Standard stroke Refer to page 12 for standard stroke.

Low torque Metal seal type Rotary joint Series MQR

MQR8-F 12 circuits MQR12-F Specifications Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure Metal seal Guide structure Bearing supported Bearing supported at both ends Port size Male R1/8 Female M5 x 0.8 M5 x 0.8 Flow rate C[dm3/(s.bar)] b Cv characteristics 0.50 0.40 0.17 Lubrication Not required Min. operating pressure

REC

Reed switch Solid state switch Relay, PLC 100 V, 200 V Yes Connector Terminal conduit DIN terminal Grommet 12 V 2-wire 24 V PLC Relay, PLC 100 V, 200 V Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Grommet 2-wire 12 V Connector IC circuit 3-wire (NPN) 2-wire Terminal conduit 5 V, 12 V Relay, PLC Yes 24 V 12 V 3-wire (NPN) 3-wire (PNP)

IDG

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.