CEx-OMQ0011 Nm N M1 M M3 W W2 W W4 ML2B25 10.0 1.2 3.0 200.0 58.0 65.0 100.0 ML2B32 20.0 2.4 6.0 300.0 80.0 96.0 150.0 ML2B40 40.0 4.8 12.0 500.0 106.0 140.0 250.0 ML2B25 ML2B32 ML2B40 J 0.43 0.68 1.21 18 ML2B/M1 ML2B/W1 ML2B/W1 0 0 0 Nm 0 0 0 N N 0 m/s m/s m/s ML2B/M2 ML2B/W2 ML2B/W2 N m N N m/s ML2B/M3 m/s m/s 20 ML2B/W3 ML2B/W3 10 Nm 5 3 2 1 N N m/s m/s m/s ML2B/W4 500 N 00 N
No.EX-OMN0013-I PRODUCT NAME SI unit for DeviceNet MODEL / Series / Product Number EX260-SDN# Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product elements 9 Installation and Wiring 10 Installation 10 Wiring 11 LED Indication and Settings 15 DeviceNet Objects 20 Troubleshooting and Maintenance 28 Specification 33 Specifications 33 Dimensions 35 Accessories
14 18 22 Applicable cylinder bore size (mm) ND NX Applicable pin Part No. 32, 40 50, 63 10 14 18 22 IY-G04 IY-G05 Part No.
) (mm) 10 18 - 4-2. 3-port solenoid valve Specifications Solenoid specifications Model No.
ZSE6 ISE6 8 10 ZSE3 ISE3 l50 l45 l48 56 70 4.5 (MAX.8) 35.5 12.5 GS PS ISA 9 8 7 6 10 ZSE1 ISE1 17 10-M3 ZSE2 ISE2 11 23 6 38 50 ZSP 48 (54) ISl ZSM DIN rail L PFl 7.5 10 25 5 IFl 4.5 35 27 Material: Aluminum Part number of DIN rail Part number ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 L 105 140 175 210 245 280 315 3.1-14
(M3 thread) (It is recommended to ground with resistance of 100 ohms or less) Accessories Hexagon socket head cap screw (M3 x 30): 2 pcs. Connects the SI unit and the valve manifold. Seal cap: 1 pc.
Series 10 12 16 20 25 32 40 50 63 80 100 MHZ2 3.0 5.0 7.0 7.0 8.0 8.5 MHZL2 6.0 7.0 10.0 11.0 MHL2 7.0 8.0 8.5 10.5 11.0 12.5 MHS2 6.5 7.0 7.5 8.5 MHS3, MHS(L)3 6.5 7.0 7.5 8.0 MHS4 6.5 7.0 7.5 8.5 MHC2 30 to -10 30 to 30 to 22.5 to -10 -10 -10 MHW2 88 to 54 to 58 to 41 to 30 to -4 -5 -6 -5 -5 Air cylinder Unit: mm Tube I.D.
(M3 screw) 5 Output connector Output signal interface for valve manifold. 6 LED display LED display to indicate the status of the SI unit. 2 7 Mounting hole Mounting hole for connection to the valve manifold. Accessories Hexagon socket head cap screw 2 pcs. M3 x 30 screw for connection to the valve manifold.
Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
to 40 Parallel style MHZL2 10 to 25 Wide type MHL2 10 to 40 Parallel style MHS2 (2 fingers) 32 to 63 Auto switch mounting screw Parallel style MHS3 (3 fingers)/MHS(L)3 32 to 63 Parallel style MHS4 (4 fingers) 32 to 63 Auto switch Angular style MHC2 10 to 25 1.
Option J: With drain guide Bracket (Option) female thread T: With element service indicator Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35
ZS-26-E (4 pcs. per set) Connector 3 Multi-channel Controller Series PSE200 Specifications Model PSE200 NPN open collector PSE201 PNP open collector Output specification 12 to 24VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage 55mA or less (Current consumption for sensor is not included.)
167 235 122 160 220 3 122 160 220 10 10 10 AME550 AME650 AME850 1 2 1 2 1 2 1 Please refer to page 14-20-57 for Made to Order Specifications. 14-20-41
(M3 screw) 5 Output connector Output signal interface for valve manifold. 6 LED display LED display to indicate the status of the SI unit. 2 7 Mounting hole Mounting hole for connection to the valve manifold. Accessories Hexagon socket head cap screw 2 pcs. M3 x 30 screw for connection to the valve manifold.
(See Fig. 10) Grease part number:GR-S-010(10g) Pin B Grease applied Bracket Piston rod of the built-in shock absorber Grease applied Fig.10 9 - Please do not remove the grease applied to the piston rod end of the built-in shock absorber and periodically check the condition of the grease. 10. Maintenance Service 10-1.
Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value
A 72 27 B 41.8 15.8 SFD100-02 23 Hole shape for bracket mounting 26.2 SMC 23 14.7 90 1.5 3 51 17 Use a countersunk head screw (M3) for bracket mounting. 72 27 3.5 SFD200-C SFD200-C Dimensions Model A 125 B SFD200C08 C10 C12 8 10 126 12 126 SMC 42 24 Bracket mounting dimensions 96.5 36 4 x 3.5 114.5 4 x 7 Applicable tubing O.D.
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
After checking the detection position, tighten M3 screws to fix the auto switch so that the bottom of the auto switch contact the cylinder tube. (The tightening torque of the M3 screw must be 0.5 to 0.7Nm.) Tighten the auto switch mounting screw(M4) to fix the auto switch mounting bracket.