ZSE30/ISE30

kPa PRESSURE kPa PRESSURE kPa PRESSURE kPa PRESSURE kPa PRESSURE OUT OUT OUT OUT OUT SET SET SET SET SET With One-touch fitting (4, 6, 5/32", 1/4") Reduced dimensions in piping direction 17.8 mm reduction Straight type 12.4 mm reduction Elbow type 14.4 22.4 12.4 mm 17.8 mm 32.2 34.8 KQ2H06-M5 KQ2L06-M5 Comparison when One-touch fittings (KQ2H06-M5 / KQ2L06-M5) are connected to the piping

Silencer Series AN

18 2 3 7 12 23.5 36 66 84 AN05 AN10 AN15 AN20 AN30 AN40 15 23 32 45 58.5 68 M5 x 0.8 1/8 1 2 3 7 12 18 AN103 AN203 AN303 AN403 25 dB(A) 30 dB(A) 1/4 30 dB(A) 3/8 1/2 25 dB(A) One-touch Fitting Connection (Resin body) Type New model Existing model New New New Sonic conductance C [dm3/(sbar)] Noise reduction Sonic conductance C [dm3/(sbar)] Length (mm) Length (mm) Noise reduction Port

4 Port Solenoid Valve Series VQD1000

M5 (A, B port) C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 46 12.5 P=11 L plug connector (L) Dimensions n: Stations L n 20 237 229 19 226 218 17 204 196 15 182 174 13 160 152 11 138 130 9 116 108 7 94 86 6 83 75 18 215 207 5 72 64 16 193 185 4 61 53 14 171 163 3 50 42 12 149 141 L2 L1 2 39 31 10 127 119 8 105 97 637

CY1F

(mm) D-A90V D-A96V D-A93V 22 Bore size D-F9V D-F9WV D-F9 D-F9W D-A90 D-A96 D-A93 (mm) 32 20 Mounting patternq, w 32 35 Mounting patterne 20 12 Auto Switch Mounting As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries. Insert the auto switch into the switch groove.

MXH

Bottom hole dia 5.1 6-9.3 counterbore depth 8 Plug for port (Hexagon socket head set screw) 4-M5 x 0.8 x 4l 4-M5 x 0.8 Depth 11 4-M5 x 0.8 depth 8 Guide rail width 12 2-M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9.5 34 6 24.5 63.5 64.5 34 34 32 7 32

ITV

Note) Breathing hole (M3 x 0.5) 3.7 3.7 13.7 1 SUPz VACz OUT port (4, 5/32") SUP, VAC port (4, 5/32") OUTx 3 EXHc ATMc 2 5 EXH, ATM port (4, 5/32") 38 2-M3 x 0.5 thread depth 3.5 Bracket mounting hole L-bracket (Option) Flat bracket (Option) 6-3.5 19 74 2-3.5 19 27 19 64 Minimium bending radius 80 28 Body +50 0 3000 15 35 (30.9) 4 8.7 9.9 Cable connector (4-wire) Straight type (Option) 7

Pneumatic Transfer System Series MF

When equipped with system 2, there are four supply ports, A through D. 32 Air supply ring 24 24 21 Air supply unit body 12 Rc(PT)1/8 Air supply port (plug) 32 IN IN 64 52 (Min. 29) 42 (Min. 29) Supply block unit OUT 342 (Min. 316) + Stroke Air supply ring Air supply unit circuit diagram Rc(PT) 1/8 Air supply port 110 12 2-Rc(PT)1/8 Stroke end air supply port (64) 34.5 32 12 65.5 9

CU

) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with depth

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

Mechanically Jointed Rodless Cylinder Series MY2

x 0.8 M8 x 1.25 M10 x 1.5 GB 17 19.5 31.5 H 28 37 58 L 80 110.8 180 LA 70 100 158 NC 14 21.3 32.4 NE 27 35.5 56.5 NH 3 4 5 NT 4.7 6.5 9 LW 120 176 229 M 9 12 16 N 20 25 40 A 80 105 165 B 9.5 14 17.5 C 5.4 8.6 10.8 G 8.5 10.7 15.5 LB 87.4 124.7 148.3 LD 5.5 9 11 LE 5 6 8 (LL) 40 49.6 75 Model MY2HT16G MY2HT25G MY2HT40G P M5 x 0.8 1/8 1/4 PF 10 12 20 PI 41 57.6 72 PD 23 29.2 35.5 PG 10 12.5

Vacuum Pad

Buffer Assembly Part No. 10 Series ZP3 4 to 8 Pad diameter Dimensions/With Adapter: Vacuum Inlet Vertical Bellows Pad type ZP3-T04B;-A10-B5 [Weight: 11.0 g] ZP3-T06B;-A10-B5 [Weight: 11.0 g] ZP3-T08B;-A10-B5 [Weight: 11.1 g] M10 x 1 M10 x 1 M10 x 1 Width across flat 14 Width across flat 14 Width across flat 14 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 8 3 3 3 3 8 3 3 12 12 12 14 14 14 22 22 22 8 2

Vacuum Pad

Buffer Assembly Part No. 10 Series ZP3 4 to 8 Pad diameter Dimensions/With Adapter: Vacuum Inlet Vertical Bellows Pad type ZP3-T04B;-A10-B5 [Weight: 11.0 g] ZP3-T06B;-A10-B5 [Weight: 11.0 g] ZP3-T08B;-A10-B5 [Weight: 11.1 g] M10 x 1 M10 x 1 M10 x 1 Width across flat 14 Width across flat 14 Width across flat 14 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 8 3 3 3 3 8 3 3 12 12 12 14 14 14 22 22 22 8 2

Vacuum Pad

Buffer Assembly Part No. 10 Series ZP3 4 to 8 Pad diameter Dimensions/With Adapter: Vacuum Inlet Vertical Bellows Pad type ZP3-T04B;-A10-B5 [Weight: 11.0 g] ZP3-T06B;-A10-B5 [Weight: 11.0 g] ZP3-T08B;-A10-B5 [Weight: 11.1 g] M10 x 1 M10 x 1 M10 x 1 Width across flat 14 Width across flat 14 Width across flat 14 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 8 3 3 3 3 8 3 3 12 12 12 14 14 14 22 22 22 8 2

MLGC

160 176 125 165 M 8 160 115 4 11 12 142 95 18 19 96 42 35 67 190 210 135 200 M10 194 P GL GQ GR I J K L M N O Q R S T U V W Bore size (mm) 20 25 32 40 93 60 5.5 80 M5 x 0.8 4 4 35 50 25 14 26 16 53 50 105 M6 x 1 112 103 70 9 95 M5 x 0.8 7 7 40 60 32 14 31 20 63 60 125 M8 x 1.25 132 104 70 9 95 Rc 1/8 Rc 1/8 7 7 40 60 32 13 38 20 63 60 125 M8 x 1.25 132 115 82.5 11 115 8 8 45 75 38 14 47

MLGC

160 176 125 165 M 8 160 115 4 12 11 142 95 19 18 67 190 210 135 96 200 M10 42 194 35 J K L U I O T GR N S W P GL GQ M Q R V Bore size (mm) 20 25 32 40 93 60 5.5 80 35 16 4 25 26 50 M5 x 0.8 4 50 14 53 105 M6 x 1 112 103 70 9 95 40 20 7 32 31 60 M5 x 0.8 7 60 14 63 125 M8 x 1.25 132 104 70 9 95 40 20 7 32 38 60 Rc 1/8 Rc 1/8 7 60 13 63 125 M8 x 1.25 132 115 82.5 11 115 45 25 8 38 47 70 8

CRBU

T U V W X Y Model H K L M N R A B C D G E(g6) F(h9) S1 S2 5-0.004 -0.012 -0.004 -0.012 -0.005 -0.014 0 -0.043 0 -0.043 0 -0.043 CRBUWU15-lD 34 25 21.2 18 1.5 15.5 10 0.5 10.5 10.5 3.5 M5 X 0.8 M3 X 0.5 21 3 29 36 48 3.2 12 CRBUWU20-lD 34.5 25 20 1.5 17 10 0.5 11.5 11 42 4.5 M5 X 0.8 M4 X 0.7 26 4 36 44 59 4 6 14 CRBUWU30-lD 50 47.5 29 22 2 17.5 12 1 12 13 5.5 M5 X 0.8 M5 X 0.8 29 4.5 42 52

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

7 M4 x 0.7 8 10 A 15 8.5 M5 x 0.8 1214

Precautions 1

size (mm) 20 25 32 40 0 0.033 65.3 8 5 41 75 60 4 7 13 8 30 26 13 34 15.5 18 Up to 300 20 0 0.033 70.5 8 6 45 75 60 4 7 13 10 37 32 17 40 19.5 22 Up to 300 26 0 0.033 76.5 8 6 45 75 60 4 7 13 12 37 32 17 40 19.5 22 Up to 300 26 0 0.039 84.5 10 8 50 82 36 66 5 7 16 14 47.3 41 22 52 21 24 Up to 300 32 (mm) ZZ Z S QY Q NN NA N I MM K Bore size (mm) 20 25 32 40 116 107 62 14 19.8 M20 x 1.5

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

3 Position Cylinder Series RZQ

RZQ mounting bolt C CR D 110 135 160 120 145 170 130 155 180 135 160 185 CH Model RZQB32-25RZQB32-50RZQB32-75RZQB40-25RZQB40-50RZQB40-75RZQB50-25RZQB50-50RZQB50-75RZQB63-25RZQB63-50RZQB63-75Mounting bolt M5 x 110l M5 x 135l M5 x 160l M5 x 120l M5 x 145l M5 x 170l M6 x 130l M6 x 155l M6 x 180l M8 x 135l M8 x 160l M8 x 185l 9.5 8 10 8.5 16.5 11.5 3 17.5 12.5 3.5 4 Series RZQ Model Selection