MGG

Pulling force N 4.9 Stroke (mm) Bore size (mm) Thread size Rubber cap M2.5 x 0.45 x 25l or more 2 20, 25, 32 M3 x 0.5 x 30l or more 3 40, 50, 63 10 M5 x 0.8 x 40l or more 3 80, 100 24.5 Remove the bolt for normal operation. It can cause lock malfunction or faulty release. 2. Locking type While pushing the M/O knob, turn it 90 counterclockwise.

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

2-Color Display

(Refer to Copy function on page 10.) 5 Series ZSE30A(F)/ISE30A Dimensions Z/ISE30A(F) Piping 01 N01 / 25 8 9.5 30 200.1 2 x M3 x 0.5 thread depth 4 Lead wire with connector M5 x 0.8 10 200.1 30 01: R1/8 N01: NPT1/8 1.5 Width across flats 12 C4H C6H N7H One-touch fitting 4 mm 5/32 inch straight One-touch fitting 6 mm straight One-touch fitting 1/4 inch straight 17.95 21.75 17.55 10.3 9.8 14

ZSE30A(F)/ISE30A

R1/8 (M5 female threaded) Option 2 ISG Nil None Bracket A N01 NPT1/8 (M5 female threaded) ZSM1 Straight type A1 C4H One-touch fitting 4 mm, 5/32 inch C6H One-touch fitting 6 mm Bracket B N7H One-touch fitting 1/4 inch A2 Elbow type C4L One-touch fitting 4 mm, 5/32 inch Bracket C C6L One-touch fitting 6 mm A3 N7L One-touch fitting 1/4 inch Panel mount adapter Unit specifications Option 1 With

VCW

) 10 is N.C.

Miniature Regulator

fitting R1/8, M5 x 0.8 2 1 6 One-touch fitting 5/32" One-touch fitting NPT1/8, M5 x 0.8 1/4" One-touch fitting M5 x 0.8 female thread is cut inside the pipe.

180

Gripper Cam Type MHY2-20D 2 x M5 x 0.8 thread depth 8 Pin hole positioning (Mounting thread) 14 5 19 42 4H9 + 0.030 depth 4 0 4 x M4 x 0.7 through (Thread for mounting attachment) 8 4 x M5 x 0.8 thread depth 10 10 0.005 0.025 (Mounting thread) 5 9 2 x 5.5 through (Mounting hole) 2 x M5 x 0.8 thread depth 10 18 (Mounting thread) (Limted area for mounting attachment) 38 48 36 36 37 25 21H9

Modular F.R.L. Units

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

Series AK1000

160 200 Flow Rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AK1400TA Inlet pressure: 0 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg abs) -21 600 Delivery pressure (kPa) -35 500 -48 400 -61 300 -75 200 -88 100 -101 0 0 1 2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4.5-6 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum port M5 x 0.8 Piping port 2 x M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA B D Mounting base side +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2 x M2 x 0.4 depth 3 8 5.7 3.5 L 20 20 6 x M4 x 0.7 depth 4.5 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 11-/22-MXP12-15

ZP3

8 M5 x 0.8 Effective thread depth 4 8 0 0.1 M5 x 0.8 Model 2 10 Vacuum inlet direction q Pad dia.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

MXP10-10 A Width across flats 1.5 H 13 (Plug: M-5P) 2-M5 x 0.8 Piping port Width across flats 5.5 4-M3 x 0.5 depth 4 6.5 16.4 M3 x 0.5 7 4 3.7 21 20 8.5 depth 2.5 3 4-M4 x 0.7 A 0.5 19 +0.030 0 depth 2.5 3 20 0.05 Prepared hole diameter 3.3 +0.030 0 15 W 0.50.05 B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 28 27 10 4.5 depth 1.5 3 J 6 +0.030 0 10 9.5 4 Section AA Mounting base

Information

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 ASG22F-M5 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 M5 x 0.8 6, 10, 16, 20 R1/8 20, 25, 32 R1/4 20, 25, 32, 40 R3/8 40, 50, 63 R1/2 63, 80, 100 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure 0.1 MPa Ambient and fluid temperature 5 to 60C (No freezing) Number of needle rotations 10 turns

ZSE F/ISE

) Variations R 1/ 4, NPT 1/4, G 1/ 4 (With M5 male thread) URJ 1/4, TSJ 1/ 4 Port size Leak rate 1 x 10 5 Pa. m 3/ s 1 x 10 10 Pam3/s 100 kPa 1MPa 100 kPa 1 MPa Rated pressure range 0 0 0 0 100 kPa 100 kPa 2 outputs NPN or PNP Output Switch output Output voltage 1 to 5 V Analog output 16-2-27 4 High Precision, Digital Pressure Switch For General Fluids Series ZSE50F/ISE50 How to Order ISE50

Soft Start-up Valve

of the rated voltage 12V 10% of the rated voltage 100V 10% of the rated voltage Allowable voltage fluctuation 10% of the rated voltage 110V *1 [115V] [-15% to +5% of the rated voltage] AC 200V 10% of the rated voltage 220V *1 [230V] 10% of the rated voltage [-15% to +5% of the rated voltage] Power consumption [W] DC 0.35 (With light: 0.4) 0.35 (With light: 0.45) With light: 0.4 100V 0.78

Ionizer

10 5 5 0 0 500 1500 2000 0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance

125

Applicable cable O.D. 3.5 to 7 63.9 Max. 10 101.7 56.4 45.1 VEX3121: M5 VEX3122: None (Port PA/Pilot air) M5 (Port PE/ Pilot exhaust) Pg7 M5 (Port P1/Pilot air) M5 (Port P2/Pilot air) Manual override A B P2 P1 102.6 PA 3 R A 2 A 2 64.1 61.8 59.1 58.6 58.1 58.1 1 P 1730 3 Port 3 Position Valve VEX3 Series Dimensions: Body Ported/VEX332 External pilot solenoid: VEX3321 Internal pilot solenoid

Low Profile Guide Type

(mm) D-M9V D-M9WV D-M9A D-M9AV D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-A90V D-A96V D-A93V Bore size (mm) D-A90 D-A96 D-A93 D-M9 D-M9W Bore size (mm) Mounting pattern q, w Mounting pattern e 32 32 20 22 35 20 10 15 25 12 5 10 Mounting of Auto Switch As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries.

Hydraulic Cylinders

49 1/8 17 8 32 M12 x 1.75 11 depth 6.5 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 40 M16 x 2 14 depth 8.6 65 55 10 22.4 19 20 7 52 9 71 1/4 20.5 10 50 M20 x 2.5 17.5 depth 10.8 71 60 11 28 24 24 8 58 11 81 1/4 22 10 63 M27 x 3 20 depth 13 80 67 13 35.5 30 33 9 69 13 97 1/4 25.5 10 80 M30 x 3.5 23 depth 15.2 95 78 17 45 41 36 14 86 15 117 3/8 30 15 100 M39 x 4 26 depth 17.5 122 96 26 56 50