.: 10-32, Option: None, Types of Screw: UNF, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 1/4, Body Size: M5 Standard, Made-to-order specifications: None

.: 10-32, Option: None, Types of Screw: UNF, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 1/4, Body Size: M5 Standard, Made-to-order specifications: None

.: 10-32, Option: None, Types of Screw: UNF, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 1/4, Body Size: M5 Standard, Made-to-order specifications: None

.: 10-32, Option: None, Types of Screw: UNF, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 1/4, Body Size: M5 Standard, Made-to-order specifications: None

.: 10-32, Types of Screw: UNF, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 1/4, Body Size: 1, Sealing Method: No Sealant, Indicator window direction: 180°, Made-to-order specifications: None

.: 10-32, Types of Screw: UNF, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 1/4, Body Size: 1, Sealing Method: No Sealant, Indicator window direction: 0°, Made-to-order specifications: None

.: 10-32, Types of Screw: UNF, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 1/4, Body Size: 1, Sealing Method: No Sealant, Indicator window direction: 0°, Made-to-order specifications: None

HRX-OM-I051

An excessive amount of the circulating fluid is observed in the tank. 07 Reservoir High Level WRN Continued Drain the circulating fluid. Check the load specification. Replacement of the thermal fuse is required. Call the supplier for service. 08 Temp. Fuse Cutout FLT Stop The circulating fluid tank was raised in temperature.

HRX-OM-K003

Alarm1 Water Leak Detect FLT 01 Alarm2 Incorrect Phase Error FLT 02 Alarm5 Reservoir Low Level FLT 05 Alarm6 Reservoir Low Level WRN 06 Alarm7 Reservoir High Level WRN 07 Alarm8 Temp. Fuse Cutout FLT 08 Alarm9 Reservoir High Temp. FLT 09 Alarm10 Return High Temp WRN 10 Alarm11 Reservoir High Temp.

Ejector Valve Unit Series ZYY/ZYX 1

Note 1) Note 2) Nil 1 None With silencer Max. vacuum pressure Manual override S L 84 kPa 53 kPa Nil D E Non-locking push type Push-turn locking slotted type Push-turn locking lever type Nozzle diameter 0.7 mm 1.0 mm 07 10 13-8-4 5 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYX3000 Lead wire/ Voltage suppressor specifications Plug-in type Serial transmission type LOZ

FR Soft Nylon Tubing Series TRS Flame Resistant (Equivalent to UL-94 Standard V-0)

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

V

Operating Valve (Air Supply & Release Valve) Pilot: VJ114 Vacuum Solid State Type ZSE1-0 Switch Diaphragm State Type ZSM1-0 Suction Filter 30m PE (Polyethylene) Lubrication Forbidden Solenoid Supply 24V DC H O W T O O R D E R (N)ZM V A C U U M E J E C T O R (N)ZM D I M E N S I O N S W I T H VA C U U M S W I T C H D I M E N S I O N S B A S I C T Y P E N O Z Z L E D I A M E T E R 05 0.5mm 07

TS/TISA

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Antistatic Tubing Series TA

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

KV2

Y Plug-In 99 U Cartridge Q SAE 45 Flare S VD Male Double Universal 90 Elbow Y Male Run Tee Tube Size Z Male Branch Universal 90 Elbow 5/32 03 Female Connector F 1/4 07 Female 90 Elbow LF 3/8 11 Female Universal 90 Elbow VF 1/2 13 Female 45 Elbow KF 5/8 15 Female Branch Tee TF 3/4 19 Female Bulkhead Connector Bulkhead Union E Plug-In Reducer R Male Double Y Union Double Y UD Plug P Pipe Thread

155

Voltage symbol 24 VDC V100-61-3-05 DC 24 VZ 12 VDC V100-61-3-06 DC 12 VZ 100 VAC V100-61-2-01 100/110 VZ 200 VAC V100-61-2-02 200/220 VZ 110 VAC V100-61-2-01 100/110 VZ 220 VAC V100-61-2-02 200/220 VZ 240 VAC V100-61-2-07 240 VZ If an AC specification without DIN Terminal (DO) is selected, always use a DIN connector with surge voltage suppressor as the connector.

T/TIA

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Clean Room Regulator/Fluoro Resin Type Series SRF30

(inch size) 11 3/8 SRF30T 11 Tubing SRF30S 07 Integral fittings Pilot port thread type Applicable tube size Inch size (Tubing size regulator port) Metric size (Tubing size regulator port) Nil N Rc1/8 NPT1/8 07 11 1/4 x 5/32 (with plug-in reducer) 3/8 x 1/4 (standard size) 6 x 4 (with plug-in reducer) 8 x 6 (with plug-in reducer) 10 x 8 (standard size) 06 08 10 Note)The reducer method allows

Ejector Valve Unit, Series ZYY/ZYX

5V, 3VDC/100V, 110V, 200V, 220VAC Nil 1 None With silencer Lead wire length 300mm Lead wire length 600mm With lead wires (length 300mm) Without lead wires Without connector With lead wires (length 300mm) Without lead wires Without connector G H L LN LO M MN MO Grommet L type plug connector Max. vacuum pressure -84kPa {-630mmHg} -53kPa {-400mmHg} S L M type plug connector Nozzle diameter 07

S Couplers

/O.D. mm Symbol Symbol Symbol 01 02 03 04 N01 N02 N03 N04 07 09 11 13 06 08 10 12 07 09 11 13 6 8 10 12 1/4" 5/16" 3/8" 1/2" R, Rc1/8 R, Rc1/4 R, Rc3/8 R, Rc1/2 NPT1/8 NPT1/4 NPT3/8 NPT1/2 50 60 65 80 85 110 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Metric size The figures in ( ) indicate the internal diameter of the applicable hose.