Vacuum Unit Ejector / Vacuum Pump System

Construction/Replacement Parts 30 6.1. Construction for Single Unit 30 6.2. Component Parts 30 6.3. Replacement Parts 31 6.4. Replacement Parts for Single Unit/How to Order 31 7. Exploded View of Manifold/Replacement Parts 35 7.1. Exploded View of Manifold 35 7.2. How to Increase Manifold Stations 35 7.3. Component Parts 38 7.4. Replacement Parts 38 7.5.

ML1C

Applicable bore Shock absorber model ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 Side Support Side support A 2 x G E E F 2 x H A B Side support B 2 x J A B (mm) A B C D E F G H J Part no.

CU

They do not guarantee an actual fixed range (expect approximately 30% dispersion).

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

17.5 NPT 3/8 35.5 41.8 49.6 55.6 30 22.2 NPT 1/2 37.6 45.8 49.6 55.6 30 15-13-4

KA

1 4 3 8 30 30.5 17 KAT10-U02 KAT10-U03 26.5 18.5 17 10 21 29.0 29.0 1 2 KAT10-U04 30 31.5 51 31 34 22 1 4 3 8 27 28 31.5 32.5 KAT12-U02 KAT12-U03 17 20.9 17 12 28.5 22 45.2 45.2 1 2 KAT12-U04 31 33.5 22 54 Reference dimensions after Uni thread installation.

Series KP/KPQ/KPG

Open the inner package of double packaging in a clean room or other clean environment. 12 to 14 R 1/4 22 to 24 R 3/8 28 to 30 R 1/2 Mounting 3. Tightening tools Tighten with an appropriate wrench using the hexagon wrench flats on the body. Position the wrench on the base as close as possible to the threads.

Series KP/KPQ/KPG

Open the inner package of double packaging in a clean room or other clean environment. 12 to 14 R 1/4 22 to 24 R 3/8 28 to 30 R 1/2 Mounting 3. Tightening tools Tighten with an appropriate wrench using the hexagon wrench flats on the body. Position the wrench on the base as close as possible to the threads.

KP/KPQ/KPG

Open the inner package of double packaging in a clean room or other clean environment. 12 to 14 R 1/4 22 to 24 R 3/8 28 to 30 R 1/2 3. Tightening tools Tighten with an appropriate wrench using the hexagon wrench flats on the body. Position the wrench on the base as close as possible to the threads.

3 Port Air Operated Valve Series SYJA300 1

Not required Unrestricted 150/30 Note 1) Be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation. Note 2) Impact resistance: No malfunction resulted from the impact test using a drop impact tester.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VZ VS VFN Silencer (For manifold EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions 13 Silencer part no.

Magnetically Coupled Rodless Cylinder Basic Type Series NCY3B ø6(1/4"), ø10(3/8"), ø15(5/8"), ø20(3/4"), ø25(1"), ø32(1-1/4"), ø40(1-1/2"), ø50(2"), ø63(2-1/2")

5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 1/4" 6 12 3/8" 10 20 5/8" 15 40 3/4" 20 60 1" 25 80 1-1/4" 32 80 1-1/2" 40 80 2" 50 80 2-1/2" 63 80 Note) The longer the stroke, the larger the amount of deflection in a cylinder tube.

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

Free Mount Cylinder Double Acting, Single Rod Series CU 6, 10, 16, 20, 25, 32 How to Order CU 6 30 D 30 6 30 M9BW CDU With auto switch D Made to order Refer to page 484 for the Made to Order specifications. Built-in magnet Number of auto switches Bore size 2 pcs. 1 pc.

Safety Instructions

Connecting Female Thread: G Approx. spanner tightening angle after tightened by hand deg Standard torque (Nm) Nominal size of uni thread 1 8 1 4 3 8 1 2 30 to 45 15 to 30 15 to 30 15 to 30 3 to 4 4 to 5 8 to 9 14 to 15 2. Gasket can be recycled 6 to 10 times. It can be replaced easily when it has sustained damage.

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

VXR21/22/23

Add 10 g for conduit type, 30 g for DIN terminal 60 g for conduit terminal type respectively. Refer to Glossary on page 17-3-15 for details of max. operating pressure differential min. operating pressure differential and max. system pressure.

V

~ 75PSI 30 ~ 75 PSI Standard Supply Pressure 0.4MPa / 160PSI Hysteresis Hysteresis modo, wind comparator modo 160PSI Operating Temperature Range 5 ~ 50C / 40~120PSI 40~120 PSI Temperature Specification + -3%F.S.

NCRBIBwserbs

180 180c 270 270a X For70 PSI NC RBl BW Wiih Auto Switch Capability Mounling B Basic Body F Flange Mount Auto Switch D With auto switch capability (with switch mounting clamp assembly) Length ot Lead Wire Double End Shaft Size Torque (mm)-(inlbs) 1 0 _ 1 . 0 '15 2.65 20 _ 6.08 30 15.62 *Apdi6lo 20 and 30 boE only Nole:Crnnetor type is.ot avaitabte tor soid 3 wir6lyp.

Adsorption Plate

SP 30 1 1 Adsorption Plate Port position Refer to the table for the port position dimensions on the side. The back side port is plugged with a Tapered Screw Plug.

SYA3000/5000/7000

(49.5) (42.5) 30 24.5 28 15 89.2 Manual override 39.4 1.8 (Breathing hole) 1/4 (P port) 1.2 0.9 2 (23.9) 18 (5.5) 47.6 12.5 EB P EA 2 x 2.2 die-cast hole (For manifold gasket positioning) 1/8 (EA, EB port) 36 SYA7120-02(-F2) 1/4 (A, B port) 20 40 30 24.5 28 39.4 1740 5 Port Air Operated Valve Series SYA3000/5000/7000 Dimensions/Series SYA7000: Body Ported 2 position double SYA7220-F2) C8

5 Port Air Operated Valve SYA3000/5000/7000 Series

(49.5) (42.5) 30 24.5 28 15 89.2 Manual override 39.4 1.8 1/4 (P port) 1.2 (Breathing hole) 0.9 2 (23.9) 18 (5.5) 47.6 12.5 EB P EA 1/8 (EA, EB port) 2 x 2.2 die-cast hole (For manifold gasket positioning) 36 SYA7120-02(-F2) 1/4 (A, B port) 20 40 30 24.5 28 39.4 1470 5 Port Air Operated Valve SYA3000/5000/7000 Series Dimensions/SYA7000 Series: Body Ported 2 position double SYA7220-(F2) C8