AW20-B to AW60-B

) + Nil Without auto drain b Float type auto drain C Note 6) N.C.

Thermo-chiller

(including 6 M8 bolts)7 Weight (dry state) [kg] Approx. 222 Approx. 251 Approx. 315 1 Use uid in condition below as the circulating uid.

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

Thermo-chiller

(including 6 M8 bolts)8 Accessories Weight (dry state) kg 214 HRS200 Series 18-E700

3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

valve etc. 317 02 1 G V T Body type T Body ported O Manifold Thread type Rc G NPT NPTF Nil F N T Valve option Nil Standard type E Continuous duty type V For vacuum CE-compliant Nil CE-compliant Q Q Rated voltage CE-compliant: Electrical entry is applicable only for the DIN terminal. 1 2 100 VAC, Hz 200 VAC, Hz 50 60 50 60 3 4 5 6 110 VAC, Hz 220 VAC, Hz 24 VDC 12 VDC 7 240 VAC, Hz 50

BP1000

Refer to gauge guide (P.94). r w q w q Sample Order Number Port 2P 4PL 01 S BP10 e r t 0 4 4 4 4 1 MPA e 2P 4PL qIN wOUT erGauge port (Inlet) Specifications BP1030 15 to 300 psig (0.1 to 2.1 MPa) BP1001 0.5 to 10 psig (0.0034 to 0.07 MPa) BP1002 1 to 30 psig (0.007 to 0.2 MPa) BP1006 2 to 60 psig (0.014 to 0.4 MPa) BP1010 5 to 100 psig (0.034 to 0.7 MPa) BP1020 15 to 200 psig (0.1 to 1.4

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

8 22 8 15 80 18 M6 x 1 20 40 36 M26 x 1.5 124 13 10 70 41 41.6 3 16 11 29 10 16 92 23 M6 x 1 26 50 46 M32 x 2 150 13 TF TN Nil P (Piping port) ZZ X W TT Model 12-REA25 12-REA32 12-REA40 50 Rc1/8 30 NPT1/8 137 G1/8 17 50 Rc1/8 40 NPT1/8 156 G1/8 19 60 Rc1/4 40 NPT1/4 182 G1/4 22 12-REA50/63 0 L0.2 33 B 2 x 4 x V Effective thread depth 16 2 x P (Piping port) 14 14 8 (R) D X Q Q 14.5 22 I 2

S

Model End Plate Mounted Housing Mounted NCX2H15 * 0.2 ~ 2in/sec NCX2H25 0.2 ~ 1.6in/sec 0.2 ~ 4in/sec Deflection x 10-3 inch Stroke (Inch) Stroke Inch Model Load (lb) Model Load (lb) 2 4 6 8 4 8 NCX2N10 2 2.8 NCX2N10 0.5 2.4 11.8 NCX2N15 6 3.2 11 NCX2N15 1 3.5 8.7 14.7 39.4 NCX2N25 13 0.8 3.2 H O W T O O R D E R NCX2 S E R I E S S L I D E U N I T NCX2N25 2 12 3.5 6.3 9.8 Note) Values are

PROFINET Compatible Fieldbus System

Select SI unit MAC address for assigning IP address. -33No.EX-OMT0009 (6)[Edit Ethernet Node] will be displayed with GW unit MAC address.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Note 6) When the current output is selected.

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

80 85 90 95 100 105 60 65 70 75 80 85 73 78 83 88 93 98 16 to 25 Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2 x P through A1 H E 4 x T counterbore 0.5 B S Z (mm) S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0

IDUS/IDFS

Inlet air temperature 35C Outlet air pressure dew point 10C Ambient temperature 35C Inlet air pressure 0.5MPa Air flow 1200 l/min (ANR) Inlet air temperature 55C Outlet air pressure dew point 10C Ambient temperature 35C Inlet air pressure 0.7MPa Air flow 350 l/min (ANR) Condition Condition A = 0.75 based on conditions q, w and e 1 1 B = 0.95 based on conditions q, w and e C = 1.00 based on

Stainless Steel Heat

6 Series IDUS/IDFS Option Specification Refer to pages 1 and 5 for "How to Order" of options.

VNH

R S T U V VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 202.5 232 267 286.5 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 x 8 7 x 10 9 x 12 9 x 12 20 24 24 70 92 109 17-4-34 5 Series VNH High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Precautions

ZCUK

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Air Suction Filter With One-touch Fittings Series ZFB 1

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Recommended air flow Tubing size Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Unrestricted 360 piping tube mounting. The connector for the IN side is a universal joint type that enables a tube to be connected in any direction within 360.

Title not found

"i."}Jsr-ot "I r Rod Cross Section, Z + 2 X S T R O K E nod Cover Head Cover Spring Extend/Double Clevis Type (D) nc'rzxo I &:i6iFl-{st'irr.el r q @ f l * I trB Al Bod Cross uNrT rNcH (Mrvr) 010 (318") I Osilttr SERIES NCDJ2 Auto Switch Guide Applicable cylinder bore size (mm) 6 1 0 Mounting 1 6 Band mounted type Grommet Reed Switch P 4 7 -.lHlr Solid State Auto Switch D-H7A1, D-H7A2, D.H7B

NVZseies

I I ll-.Y (gmmm) * Lead wire ,.6> i?!

VZM400

6 !0 PE PE e !5 w !3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !

3 Position Cylinder Series RZQ

5.5 6 6.5 RHC 12 11 10 12 RZQ D-A79W 13 14 14 16 D-F7 (V) D-J79 (C) D-F7W (V) D-F7BA (V) D-F7NTL D-F79F 6 6 6 6.5 D-X D-P4DW 5 5 5 Individual -X Since the operating range is provided as a guideline including hysteresis, it cannot be guaranteed (assuming approximately 30% dispersion).