20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC?010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC?010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC2.424 VDC21.6 to 26.4 VDC0.56 inputs4 outputs1 M (when differential receiver), 200 k (when open collector)0 to ?

SI Unit for Vacuum Manifold

.+200 -100..+100 -100..+100 Set rated pressure range of pressure sensor. Refer to Section 5.2. Caution The Pressure range parameter should be set to match the actual pressure sensor specifications. 4.1.5.

SI Unit for Vacuum Manifold

Pressure value (Pressure range parameter : -100...200 kPa) bit 15...0 Pressure value[kPa] Note 0x0 0.0 0x0001 0.1 The table on the left shows an example when Pressure range parameter ... ...

IDX-OM-W093

/200,220V 50/60Hz CM OLR FM MC MC2 PRS PRS2 ILS THR C01 C11 TB CN GFCI EDV PE TDR BK WH GR SY BU IDF80/90-20-T BR B A A B YE AC 200/200,220V 50/60Hz OR G/Y / IDF60/70/80/90 Series 12-4 IDX-OM-W093 T IDF60/70-30-T SIGNAL CM OLR FM MC MC2 PRS PRS2 ILS THR C11 TB CN GFCI EDV PE TDR APR IDF80/90-30-T SIGNAL CM FM MC MC2 PRS PRS2 ILS THR

IDX-OM-M051

Checks and Inspection Table 2 Facility water system Circulating type Transient type Item Circulating fluid Filling of circulating fluid Transient fluid pH [25C] 6.5 to 8.2 6.0 to 8.0 6.8 to8.0 Electrical conductivity (mS/m) [25C] 80 or less 30 or less 40 or less Standard items Chloride ions (mg/L) 200 or less 50 or less 50 or less Sulfuric acid ions (mg/L) 200 or less 50 or less 50 or less

IDX-OM-Z004

50 50 (mg/L) 200 50 50 [pH4.8](mgCaCO3/L) 100 50 50 (mgCaCO3/L) 200 70 70 (mgCaCO3/L) 150 50 50 (mgSiO2/L) 50 30 30 (mg/L) 1.0 0.3 1.0 (mg/L) 0.3 0.1 1.0 (mg/L) (mg/L) 1.0 0.1 1.0 (mg/L) 0.3 0.3 0.3 (mg/L) 4.0 4.0 4.0 6.07.0 1 2 JIS K 0101 2 a b c 4.2 IDF100150F-W 4 2 IDX-OM-Z004 4 (3) 1 Y Y , Y Y (4) 3 2 (5) 1( 2 3 4 a) 1. 1.5 2. 4.2 IDF100150F-W

IDX-OM-P023E

Table 2 Facility water system Circulating type Transient type Item Circulating fluid Filling of circulating fluid Transient fluid pH [25C] 6.5 to 8.2 6.0 to 8.0 6.8 to8.0 Electrical conductivity (mS/m) [25C] 80 or less 30 or less 40 or less Standard items Chloride ions (mg/L) 200 or less 50 or less 50 or less Sulfuric acid ions (mg/L) 200 or less 50 or less 50 or less Acid consumption [pH4.8

IDX-OM-P026E

Table 2 Facility water system Circulating type Transient type Item Circulating fluid Filling of circulating fluid Transient fluid pH [25C] 6.5 to 8.2 6.0 to 8.0 6.8 to8.0 Electrical conductivity (mS/m) [25C] 80 or less 30 or less 40 or less Standard items Chloride ions (mg/L) 200 or less 50 or less 50 or less Sulfuric acid ions (mg/L) 200 or less 50 or less 50 or less Acid consumption [pH4.8

PSxx-OMF0005CN

ON (+)ON 1 OFF ()ON OFF DC(+)DC(-) 2 ON 80 mA 3 () DC(+)DC(-) NPN PNP ( ) 4 OFF () ( ) 5 () DIN 6 -24No.PS-OMF0005CN-E No. 7 / ( 8 () ) -25No.PS-OMF0005CN-E ISA2-G1 ISA2-G5 ISA2-H1 ISA2-H5 0.010.25 mm 0.030.50 mm (5 m) 30200 kPa 50200 kPa 1.5 20 50 kPa 5 10 L/min (ANR) 100 kPa 8 15 200 kPa 12 22 DC1224 V10 (p-p)10() 15 mA NPN PNP NPN PNP 1 1 1 80 mA 30 V(

EXxx-OMN0029CN

EDS Enable (SC_MonSs) 1 Disable Enable (Inrush) 100 msec 2 Disable 0.1 ms 1.0 ms 1.0 ms 10 ms 20 ms 3 (Filter_T) 1.0 ms 15 ms 15 ms 100 ms 200 ms 4 (SigExt_T) Enable (SC_MonOp) 5 1 Disable Auto (SC_RstOp) 6 Manual Enable 7 (OC_Mon) 6 Disable Clear OFF 2 6 Hold 8 (Fault_MD) ForceON ON Clear OFF 2 3 6 Hold 9 (Idle_MD) ForceON ON ON Enable Val165000

EXxx-OMN0027CN

PLC H.T. ) Enable (SC_MonSs) 1 Disable Enable 2 1 2 (OC_Mon) Disable Enable (Inrush) 100msec 3 Disable 0.1 ms 1.0 ms 4 (Filter_T) 1.0 ms 10 ms 20 ms 1.0 ms 15 ms 5 (SigExt_T) 15 ms 100 ms 200 ms Enable Val165000 4 ON 3 ON/OFF (Counter) 6 Disable 1(EX600-DXPC1EX600-DXNC1) 22 OFF 0.5 mA ()OFF 0.5 mA 3 OFF 0.5 mA 31 4x1000 -54No.EX-OMN0027CN-D No. (H.T.

EXxx-OMV0017-D

Timing of Wireless Communication 20 / 40 / 100/ 200 / 500 / 1,000 / 2,000 / 5,000 msec 500 msec Activated only when protocol V.2.0 is used If wireless communication (including retries) does not succeed due to obstacles or for other reasons, it is judged to have failed after a set amount of time and disconnected. Afterwards, the Base and the Remote are reconnected.

4

Voltage 100 VAC 200 VAC DC Others Color Blue Red Red (+), Black () Gray q w e r t y Connector for DIN Terminal Description Part no. B1B09-2A (Standard) GM209NJ-B17 (CE-compliant) u i o !1 DIN connector !

Air Cylinder: Standard Double Acting, Single/Double Rod Series NCM

V 12 V Relay, PLC 200 V or less 2-wire 24 V Connector 24 V or less Grommet Diagnostic indication (2-color indication) Solid state switches marked with are produced upon receipt of order.

Compact Cylinder Double Acting, Single Rod Bore size: 056(9/16”), 075(3/4”), 106(1 1/16”), 150(1 1/2”), 200(2”), 250(2 1/2”), 300(3”), 400(4”) Series NCQ8

Compact Cylinder Double Acting, Single Rod Bore size: 056(9/16), 075(3/4), 106(1 1/16), 150(1 1/2), 200(2), 250(2 1/2), 300(3), 400(4) Series NCQ8 How to Order Without auto switch B 056 025 NCQ8 B 056 025 Z M9BW S NCDQ8 With auto switch Built-in magnet X-Option Nil XB6 XC4 Standard High temp.