SMC VVQ1000-50A-C3 fitting assy, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $2.83 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-50A-C4 fitting assy, VV5Q* MANIFOLD VQ 4/

SMC VVQ1000-50A-C3 fitting assy, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $2.83 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-50A-C4 fitting assy, VV5Q* MANIFOLD VQ 4/

SMC VVQ1000-50A-C3 fitting assy, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $2.83 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-50A-C4 fitting assy, VV5Q* MANIFOLD VQ 4/

SMC VVQ1000-50A-C3 fitting assy, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $2.83 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-50A-C4 fitting assy, VV5Q* MANIFOLD VQ 4/

SMC VVQ1000-50A-C3 fitting assy, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $2.83 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-50A-C4 fitting assy, VV5Q* MANIFOLD VQ 4/

Regulator for 2 MPa ARX 20

01 G46 10 02 G36 4 01 G46 4 02 G36 P10 N01 G46 P10 N02 G36 P4 N01 G46 P4 N02 1348110A B Regulating pressure range Bracket 0.05 to 0.85MPa 0.05 to 0.30MPa 0 1 ARX20 Nil F ARX21 Nil F Thread type G Pressure gauge Rc NPT G Nil N F ARX20N ARX21N P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.

30

10 10 11 B C 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 JC20-8-100 JC20-8-125 JC32-10-100 JC30-10-125 JC25-10-150 JC40-12-125 JC40-12-150 JC40-12-175 JC40-14-150 JC50-16-150 JC63-16-200 JC63-18-150 DA00207 DA00169 DA00141 DA00142 DA00140 DA00145 DA00146 DA00143 DA00148 DA00151 DA00150 DA00153 13 13 17 17 17 19 19 19 22 24 24 27 Spare parts Rod end nut The basic type has one rod

•

zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

15 20 25 30 40 35 0 2 4 6 8 10 12 16 14 18 20 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) Construction PF2D504/520 Parts list Material Number Parts o !

Vacuum Saving Valve

generator used. 1 40 30 From the flow-rate characteristics of the vacuum generator (Chart 1), calculate the suction flow (Q1) of the vacuum generator from the required vacuum pressure. 20 10 e 00 10 20 30 40 50 60 70 80 90 100 110 Vacuum pressure 50 kPa (qwe) = Suction flow (Q1) 31 l/min (ANR).

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

4 !5 !6 !7 !

Polyurethane Tubing TU/TIUB Series

(mm) 2 4 6 8 10 12 16 3.18 4.76 6.35 9.53 12.7 KF Tubing I.D. (mm) 1.2 2.5 4 5 6.5 8 10 2 3.18 4.23 6.35 8.46 Max.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

PSxx-OMS0006CN

OUT1 OUT1 OFF n_1 () [F10 ] OUT1 OUT1 OUT1 n1H n1L 2 2 ( ) OUT1 OUT1 ( ) OUT1 () ( ) OUT1 () OUT1 OUT1 OFF -37No.PS-OMS0006CN-G RAnG -101.0 kPa 100 kPa 1 MPa Md1OUT1 / OFF 23 (3 2[-] 2 -38No.PS-OMS0006CN-G ON ON () ON OFF ) / OFF ("o") P_1(n_1)1/10 P1HP1L(n1Hn1L)1/4 -1/7 -1/4 OFF -1/7 -1/4 -39No.PS-OMS0006CN-G OFF () [F82] OFF -40No.PS-OMS0006CN-G [F11] <> [F11] 1000 100

3 Port Air Operated Valve

VZA Common EXH VFA 2(A) port 1/4 1(P) port 1/4 3(R) port 1/4 VFRA 2 to 20 stations VPA300 VV3PA3-42 VPA4 SYJA Individual EXH VZA 1(P) port 1/4 2(A) port 1/4 3(R) port 1/4 VTA VGA VV3PA5-41 VPA VPA VPA3 Common EXH Air operated valve Base mounted 1(P) port 3/8 3(R) port 3/8 2(A) port 3/8 2 to 20 stations VPA500 P. 1569 VV3PA5-42 Individual EXH 1(P) port 3/8 3(R) port 3/8 2(A) port 3/8 VV3PA7

ZSM1-115/121

Indicator light IS 3 2 Lead wire R 1/8 Port size ZSM 65 g Weight PF2 IF Electrical Specifications Data ZSM1-115 Supply voltage 4.5 to 28 VDC Output (Open collector) 30 V, Max. 100 mA Current consumption 10 mA or less (24 VDC) ZSM1-121 Supply voltage 100 VAC Operating current range 24 V or less: 50 mA, 48 V: 40 mA, 100 V: 20 mA Max. contact capacity AC 2 VA, 2 W DC How to Order ZSM1 1 15 Lead

Soft Start-up Valve AV2000/3000/4000/5000

M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000

Air Cylinder NCQ7 Series Compact Cylinder

(Applicable to all models) (Ex.)A731 D-A731 Ac ces s sorie sl Part s Li st 056 (e^6) 075 (3/4) 106 0n/16) 150 (1-1/2') 2OO (2') 25O (2-1t2',) 300 (3') 400 (4"' Jam Nd JM.O1 JM-02 JM-03 JM.O4 JM.O5 JM-05 JM-08 JM-10 Single Rod Clevis RCS-015 BCS-02 RCS-03 RCS-04 HCS-o5 RCS-05 RCS-08 RCS-10 Double Rod Clevis RDS-o15 RDS-02 RDS-03 RDS-04 RDS-05 RDS{5 RDS.08 RDS-10 w/ dn(l). rcteinino rin6{21

asilltr

(Applicable to all models) (Ex.)A731 D-A731 Ac ces s sorie sl Part s Li st 056 (e^6) 075 (3/4) 106 0n/16) 150 (1-1/2') 2OO (2') 25O (2-1t2',) 300 (3') 400 (4"' Jam Nd JM.O1 JM-02 JM-03 JM.O4 JM.O5 JM-05 JM-08 JM-10 Single Rod Clevis RCS-015 BCS-02 RCS-03 RCS-04 HCS-o5 RCS-05 RCS-08 RCS-10 Double Rod Clevis RDS-o15 RDS-02 RDS-03 RDS-04 RDS-05 RDS{5 RDS.08 RDS-10 w/ dn(l). rcteinino rin6{21

MPa(G): 0.5, Leakage Pa•m3/s: Internal: 1.3 x 10-9 External: 1.3 x 10-11 , Internal: 1.3 x 10-9, External: 1.3 x 10-11, Connection Size: VVMW-2: 1/8 Female NPT / Face Seal VVMW-3: 1/4 Female NPT / Face Seal VVMW-4: 3/8 Female NPT / Face Seal , VVMW-2: 1/8 Female NPT / Face Seal, VVMW-3: 1/4 Female NPT / Face Seal, VVMW-4: 3/8 Female NPT / Face Seal