Stations: 03 (3 Stations), Piping: U (U Side: Open; D Side: Closed), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 03 (3 Stations), Piping: U (U Side: Open; D Side: Closed), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 01 (1 Station), Supply/Return Unit Layout: U (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 04 (4 Stations), Piping: U (U Side: Open; D Side: Closed), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 40 (5 to 40 L/min), Return Unit Components: P (w/o Flow Adj.

High Speed Pilot Operated

D-G

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Pressure Switch/Reed Switch Type

D-KS

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Applicable tubing O.D. d AK ASS ASR ASF L4 A Note) M1 Weight (g) 4 6 6 8 6 8 8 10 10 12 Applicable tubing O.D. d T L3 L2 H D1 D2 L1 Model Max.

S

E R (N)VM800 V A LV E APPLICATIONS (N)VM830 01 3 3 Ports N O O F P O R T S T H R E A D A C T U AT O R PT N NPT * Remove (N) when ordering 00 Basic Type 01 Roller Lever 13 Adjustable Roller Lever 14 Adjustable Rod Lever H O W T O O R D E R NVM800 A C T U AT O R O N LY Roller lever VM-01F Adjustable roller lever VM-13F Adjustable rod lever VM14F FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT

IZSE_X101

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 Piping adapter ZS-46-N1 NPT1/8 Piping adapter ZS-46-N2 9

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/ Rod Type Dust-tight/Water-jet-proof (IP65 Equivalent) LEY-X5 (Made to Order) Series LEY25, 32

How to Order 6N 1 1 D B 25 50 LEY X5 R o Made to Order: Dust-tight/ Water-jet-proof q w e r t y u i !0 !1 !2 !

ZSE20(F)_ISE20

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 7

DOC1020530

(d) Output signal (DO) forced output Output signals can be switched on/off forcibly independently of the servo status. Use this function for output signal wiring check, etc.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.

NVKF

or less (Standard) 95"F or less (Low power cons!

Air Cylinder Short Type Standard: Double Acting, Single Rod Series CM3 ø20, ø25, ø32, ø40 How to Order CM3 L 40 150 With auto switch CDM3 M9BW L 150 40 With auto switch (Built-in magnet) Number of auto switches Rod end thread Nil Mounting 2 pcs. Bo

Bore size Male thread Female thread Long male rod end Nil F G T E BZ FZ UZ 20 25 32 40 B L F G C D U Head trunnion Integral clevis Boss-cut/Basic Boss-cut/Rod flange Boss-cut/Rod trunnion Basic Foot Rod flange Head flange Single clevis Double clevis Rod trunnion 20 mm 25 mm 32 mm 40 mm G: Same rod end dimensions (A, AL, H) as CM2 series.

Air Cylinder: Standard Type Double Acting, Single Rod Series CM2 ø20, ø25, ø32, ø40 How to Order Mounting style Cylinder stroke (mm) T B Basic style (Refer to “Standard Stroke” on page 129.) Head side trunnion style Clevis integrated style Axial foot styl

T E BZ B L F G C D U Basic style Head side trunnion style Clevis integrated style Axial foot style Bore size Cushion Boss-cut basic style Rod side flange style Nil A 20 25 32 40 Rubber bumper 20 mm Head side flange style Boss-cut rod side flange style Air cushion 25 mm FZ Single clevis style Air-hydro cylinder: Rubber bumber only 32 mm Double clevis style Boss-cut rod side trunnion style

Sensor Monitor

0 Units selection function 27 F 1 Setting of OUT1 30 F 2 Setting of OUT2 33 F 3 Digital filter setting 35 F 4 Auto-preset function 36 F 6 Fine adjustment of display value 38 F10 Sub display setting 39 F11 Display resolution setting 45 F80 Power saving mode 46 F81 Security code 47 F82 Input of line name 49 F90 Setting of all functions 50 F98 Output check 52 F99 Reset to default settings 54

High-precision Digital Pressure Switch ( compatible)

0 Display units, switch output specifications and diagnostic information selection function 28 F 1 Setting of OUT1 30 F 2 Setting of OUT2 33 F 3 Digital filter setting 35 F 4 Auto-preset function 36 F 6 Fine adjustment of display value 38 F10 Sub display setting 39 F11 Display resolution setting 45 F14 Zero cut-off setting 46 F80 Power saving mode 47 F81 Security code 48 F90 Setting of all

High-precision Digital Pressure Switch

0 Display units and switch output specifications function 26 F 1 Setting of OUT1 27 F 2 Setting of OUT2 30 F 3 Digital filter setting 32 F 4 Auto-preset function 33 F 6 Fine adjustment of display value 35 F10 Sub display setting 36 F11 Display resolution setting 42 F14 Zero cut-off setting 43 F80 Power saving mode 44 F81 Security code 45 F90 Setting of all functions 47 F96 Number of pressurizing