ZSE40/ISE40

ON YES Unit selection Hysteresis mode OFF P-1 P-2 High pressure (for positive pressure/compound pressure) High vacuum (for vacuum pressure) [P] ZSE ISE H H H (Fixed hysteresis) = 3 digits ON PSE Window comparator mode OFF NO P-1 P-2 High pressure (for positive pressure/compound pressure) High vacuum (for vacuum pressure) Z I SE3 Set the unit by either button or button. : kPa or MPa

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

(port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP

PSE530/200

Specifications Model PSE530-M5 PSE531-M5 101 to 101 kPa PSE532-M5 PSE533-M5 Rated pressure range 0 to 1 MPa 0 to 101 kPa 0 to 101 kPa Proof pressure 1.5 MPa 500kPa Air/Non-corrosive gas Fluid 12 to 24 VDC (Ripple 10% or less) Power supply voltage Current consumption 15 mA or less Output specification Analog output (1 to 5 V, Output impedance: Approx. 1 k) Accuracy 2% F .S. or less (Within

VCC

.: XT13-406-X200) Note) Applicable to special manifold, too. 644 Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve) VCC Series VCC Series I N D E X P.646 How to Order P.648 Specifications/Weight P.650 Dimensions Single valve unit P.651 Manifold P.652 SUS316L Stainless steel fittings P.654 Special Tools VNA VNB Disassembly/Assembly/ Maintenance Procedure P.656 SGC

JA/JAH/JB/JS

A R Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com JS20, 32, 40, 63 Center of sphere M M U U D J F H B E G P R A Max. thread depth P Model Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) (mm) M A B C D E F G H J JS10-4

JA/JAH/JB/JS

A R JS20, 32, 40, 63 Center of sphere M M U U D J F H B E G P R A Max. thread depth P Model Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) (mm) M A B C D E F G H J JS10-4-070 JS16-5-080 0.5 0.5 0.5 0.5 0.75 1 4.7 5.8 7.3 8.5 11.6 14.3 M4 x 0.7 M5 x 0.8 26 34.5 8.5 12 15.5 17.5 18.5 23 9.5 13.5 12 16 21 24 31 41 1.5 2 4.5 5 5 7 4 6 7 8 11 14 4

AS-FG/ASD-FG

P-77.5 (YG)

Table of Contents

Action D Double acting Standard stroke (mm) Port thread type 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 40, 50 Type M5 x 0.8 Rc1/8 NPT1/8 G1/8 Bore size 6, 10, 16, 20, 25 32 32 32 Symbol Nil TN TF Applicable Auto Switches/Refer to page P.68 to 72 for further information on auto switches.

Cylinder

-__-I___ _ P :.

F/ISE

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

Series AK1000

Refer to gauge guide (P.94,95).

MLGC

B76 B73 I.C. 5V P P P P P P P P P P P P P P P P P 3 wire (Equiv.

VEX1

Refer to p.5.3-1 for details. 5.1-36

Angle Seat Valve /

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

MB

Thread size M2.5 x 0.45 x 25 l M3 x 0.5 x 30 l M5 x 0.8 x 40 l Bore size (mm) 32 40, 50, 63 80, 100 Stroke (mm) 2 3 3 Pulling force 4.9 N 10 N 24.5 N C76 C85 e Release lock when mounting or adjusting the cylinder. Remove bolt under normal operations. It may cause malfunction of locking and release. If mounting is done with lock engaged, lock mechanism may be damaged.

Dedicated Controller

Dedicated Controller/LC1 P.73 Controller setup software P.80 Dedicated teaching box P.82 Options P.85 Dedicated Regenerative Absorption Unit/LC7R P.86 Non-standard Motor Compatible Drivers P.89 73 2 Series LC1 Controller Single Axis Type Built-in AC Servo Driver Series LTF: Standard Motor Compatible How to Order 2V LC1 F 1 H 1 L 3 Number of axes Mounting bracket 1 3 5 1 axis M3

2–4

-RA Both ends tapped (CQMA) (mm) Without auto switch With auto switch Stroke range (mm) Bore size (mm) P P EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33 7.5 10.5 45 43 34.4 Rc1/8 NPT1/8 NPT1/8 G1/8 7.5 10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/8 NPT1/8 G1/8 8 11 G1/8 56.5 39.5 8 11 52 50 41.4 Rc1/8 NPT1

3-Position Rotary Table

Figure 2 Meter-out Meter-out C port Meter-in P A port Meter-in C port A port P B port D port Meter-in D port B port Meter-in P Meter-out Meter-out The table return position under the power-off state changes depending on the solenoid valve type. Please refer to page 299 for details. 3) Figure 3 shows the rotation range and Table 1 shows the active speed controller.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

CL

x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40 50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20