E-MY2_E_D

positions Names and Functions of Controller 11 Example of Internal Circuit and Wiring 12 Setting 15 Operation Characteristics 20 Specifications 21 10 Names and Functions of Controller (3 positions) Controller detail General 3 positions 5 positions General A 1 2 5 7 State of indicator light D B C E 8 3 4 6 Switch No.

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

RSQ

3 Stopper Cylinder: Fixed Mounting Height Series RSQ 12, 16, 20, 32, 40, 50 How to Order RE A B Without auto switch B RSQ 20 15 D REC CX J79W 20 15 RSDQ With auto switch B D CY Number of auto swiches Auto switch Built-in magnet MQQ M Nil Without auto switch Nil S 2 pcs. 1 pc. Mounting style For the applicable auto switch model, refer to the table below.

F/ISE

15 4.5 6.5 1.6 20 41.5 ZS-24-A Bracket A View A Bracket D A 30 20 20 45 55 4.2 4.5 40 11.5 15 7.2 7.5 1.6 41.5 35 22 ZS-24-D Bracket D View A Cutting dimensions for panel mounting 43 or more Panel mount 0 +0.5 36 42.4 7.8 25.4 0 +0.5 36 70 or more 47.4 Front protection cover The thickness of the panel is to 3.2mm. 8 For General Fluids High Precision Digital Pressure Switch Series ZSE60F/

Soft Start-up Valve AV2000/3000/4000/5000

D + + MADE IN JAPAN MADE IN JAPAN Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38

Soft Start-up Valve AV2000/3000/4000/5000 1

D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4

MNB

8 Cylinder with Lock Double Acting, Single Rod Series MNB 32, 40, 50, 63, 80, 100 How to Order Without auto switch MNBL 50 100 D With auto switch MDNB L 50 100 D Y7BW Built-in magnet Number of auto switch 2 pcs. Nil Mounting bracket 1 pc.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

15 4.5 6.5 1.6 20 41.5 ZS-24-A Bracket A View A Bracket D A 30 20 20 45 55 4.2 4.5 40 11.5 15 7.2 7.5 1.6 41.5 35 22 ZS-24-D Bracket D View A Cutting dimensions for panel mounting 43 or more Panel mount 0 +0.5 36 42.4 7.8 25.4 0 +0.5 36 70 or more 47.4 Front protection cover The thickness of the panel is to 3.2mm. 8 For General Fluids High Precision Digital Pressure Switch Series ZSE60F

CEx-OMQ0011

c. d. - 3. 3. 3. 3. 1. 1. 1. 1. a.560 b.2585%RH c. d. e.

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

Dimensions/40 to 100 Basic/CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10

3 Port Solenoid Valve Rubber Seal Series SY100 1

VK Electrical circuit (With energy-saving circuit) How to Order Red (+) VZ Diode Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M3 T L Z 1 Coil SY1 3 5 LED Timer circuit Body ported VT 4 5 T M Z 1 Black () SY1 1 2 VP Base mounted 1: Starting current, 2: Holding current

3 Port Solenoid Valve Rubber Seal Series SY100

VK Electrical circuit (With energy-saving circuit) How to Order Red (+) VZ Diode M3 T L Z 1 Coil SY1 3 5 LED Timer circuit Body ported VT 4 5 T M Z 1 Black () SY1 1 2 VP Base mounted 1: Starting current, 2: Holding current VG Type of actuation VP Applied voltage 1 2 Normally closed Normally open 24 V S070 Entry is the same as

Pin Cylinder: Double Acting, Single Rod Series CJP2 ø4, ø6, ø10, ø16

Option Bore size (mm) Description 6 Bore size (mm) Bracket 6 Symbol Specifications 10 16 10 16 XA Change of rod end style XB6 Heat resistant cylinder (150C) Auto switch D-A9(V), D-M9(V), D-M9W(V) Flange CP-F006A CP-F010A CP-F016A XB7 Cold resistant cylinder Foot Single knuckle joint CP-L006A CP-L010A CP-L016A I-P006A I-P010A I-P016A XC22 Fluororubber seals Trunnion (with pin) CP-T006A CP-T010A

VQ20/30

VDW Option Enter together in order, counting from station 1 on the D side. 20 20 stations None DIN rail mounting DIN rail mounting (Without DIN rail) Nil D DO VQ VX2 U side D side Stations321 VX VX3 VXA A port VN P1 LVC How to Order Valves (For Manifold) LVA VQ M C6 2 1 1 1 G LVH Series/ Orifice size LVD Port size Symbol 2 3 Series VQ20 VQ30 LVQ VQ20 VQ30 Symbol C6 C8 C10 C12 Port size

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

, 50, 80, 100 200 10 400 12 10, 25, 40, 50, 80, 100, 125, 160, 200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101 to 111 for cylinders with auto switches.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

CH

Compact Hydraulic Cylinder Double Acting/Single Rod CHQB Series 20, 32, 40, 50, 63, 80, 100 3.5 MPa How to Order CHQB 50 30 D CHDQB 50 30 M9BW D With Auto Switch With auto switch (built-in magnet) Made to order specifications For details, refer to page 243.

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

Dimensions/20 to 40 Basic/CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G Width across flats B1 I 2-Eh8 D MM AL A F F NA 1.5 1.5 N N K H S + Stroke ZZ + Stroke Boss-cut ZZ + Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8 13 8 41 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 62 116 20

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X 32, 40, 50, 63, 80, 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder. How to Order B 40 30 D CQ2X Without auto switch With auto switch CDQ2X A73 B 40 30 D Number of auto switches With auto switch (with built-in magnet) Auto switch type 2 pcs. 1 pc. "n" pcs.