Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

4 @1 w !8 w !8 w @1 !4 !3 @1 !4 !3 !8 q !6 !5 y e o r !0 !6 !5 y e o i r q !9 r u e y o i !0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

mA, 20 mA IC circuit, Relay, PLC No Reed auto switch D-A90 D-M9B, D-F8B D-M9N, D-F8N 2-wire 3-wire 24 VDC relay, PLC 24 VDC relay, PLC Solid state auto switch Yes 24 VDC (10 to 28 VDC) 24 VDC (4.5 to 28 VDC) Yes 2.5 to 40 mA 40 mA or less Refer to page 920 for the applicable auto switch list. 909 Rotary Table MSQ 1122Specifications Suction Flow Rate of Vacuum Suction Type (Reference values

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

1 u Material Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 Note CRJ Aluminum alloy Body A Light gray color Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !

HRX-OM-Y098

CH1 Independent pump operation CH1 pump operates independently w hile the button is pressed. (12) (13) CH2 Independent pump operation CH2 pump operates independently w hile the button is pressed.

76

Therefore, the amount of condensed water is as follows. 140 (60) 122 (50) 104 (40) 86 (30) Pressure dew point F (C) 68 (20) B A 50 (10) 218 psi (1.5 MPa) 189 psi (1.3 MPa) 160 psi (1.1 MPa) 131 psi (0.9 MPa) 102 psi (0.7 MPa) 73 psi (0.5 MPa) 44 psi (0.3 MPa) 15 psi (0.1 MPa) Atmospheric pressure 32 (0) 14 (10) 4 (20) 22 (30) 40 (40) 58 (50) C 76 (60) 76 (60) 58 (50) 40 (40) 22 (30) 4 (20

Refrigerated Air Dryer

(per 1 m3) The amount of water at the intersection C the amount of water at the intersection H = the amount of condensed water 18.2 3.0 = 15.2 g/m3 Dew Point Conversion Chart 60 50 40 30 20 Pressure dew point (C) B A 10 1.5 MPa 1.3 MPa 1.1 MPa 0.9 MPa 0.7 MPa 0.5 MPa 0.3 MPa 0.1 MPa Atmospheric pressure 0 -10 -20 -30 -40 -50 C -60 -50 -60 -20 -10 0 10 20 30 -40 -30 Atmospheric pressure

Fieldbus system (CC-Link compliant)

Valve series Power consumption SY3000/5000/7000/9000 Standard: 0.4 W (approx. 17 mA) With power saving circuit: 0.1 W (approx. 4 mA) SYJ3000/5000/7000 Standard: 0.4 W (approx. 17 mA) With power saving circuit: 0.1 W (approx. 4 mA) VQZ1000/2000/3000 Standard: 1.0 W (approx. 42 mA) Low wattage: 0.5 W (approx. 21 mA) Refer to "Wiring of the branch cable and connector for connecting load" on

NVEPA|VEFseies

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

Low Maintenance Filter Series FN1

135 180 4-11 225 (266) (60) AIR VENT G 1/4 q q A (43) OUT IN e e 150 r B t 120 327 188 (519) w w 84 OUT 2-R 1 r IN 53 DRAIN G 1/4 Note Parts list Dimensions (mm) A B No.

Servo Motor Controller (24 VDC)

The basic parameter is not correct for the following condition:(Assignable value range) (1) Stroke (-) < Stroke (+) (2) W-Area 1 < W-Area2 (* If both W-Area1 and W-Area2 is 0, the alarm will not be activated.) (3) Maximum pushing force < Maximum pushing force of actuator Parameter ALM (1-049) B RESET input Modify the basic parameter setting.

Process Gas Diaphragm Valve

OUTLET INLET Mounting hole Top view (Mounting hole on bottom) Porting Symbols OUTLET (Downstream) INLET (Upstream) 2PW 2PWA 2PWC q q q w 2 PORTS w w 3PWD 3PWE 3PWG 3 PORTS q q q e e e w w w 4PWM q e r 4 PORTS w 1114 A

Compact Cylinder with Lock Double Acting, Single Rod Series CLQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order CLQ B F D 30 40 30 40 M9BW CDLQ D F B With auto switch With auto switch (Built-in magnet) Made to Order Mounting style Refer to page 817

Compact Cylinder with Lock Double Acting, Single Rod Series CLQ 20, 25, 32, 40, 50, 63, 80, 100 How to Order CLQ B F D 30 40 M9BW 30 40 B CDLQ F D With auto switch With auto switch (Built-in magnet) Made to Order Refer to page 817 for details.

Compact Cylinder: Standard Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Cold resistant cylinder (40 to 70C) w/o auto switch only Low-speed cylinder (10 to 50 mm/s) Standard Strokes Intermediate stroke (Exclusive body type) Pneumatic type Intermediate stroke (Spacer-installed type) (mm) Bore size 12, 16 20, 25 32, 40 50 to 100 Standard stroke Long stroke (Air-hydro type only) 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35

HRX-OM-W060

CH1 Independent pump operation CH1 pump operates independently w hile the button is pressed. (11) (12) CH2 Independent pump operation CH2 pump operates independently w hile the button is pressed. To select a operatrion mode from the touch panel Button (13) Common Operatrion mode ( mode), contact input ( mode) or serial communication ( mode). (14) Common Run/Stop To run/stop the product.

PFA/PFW

DC (+) 1 OUT 2 2 DC () 3 OUT 1 4 Flow direction 14 Digital Flow Switch for Water Series PFW Dimensions (mm)/ Separate Type For water 1in = 25.4mm Scale:70% PFW3mm mm-A Display unit Panel mount 3 x 7.2 (= 21.6) 41.8 8-M3 40.3 40 6.4 4.3 1 2 3 4 SMC FLOW SWITCH 35.8 19.4 40 UNIT RESET SET 5 6 7 8 Panel cutout dimensions 36 + 0.5 0 + 0.5 0 36 PFW3mm mm-B Display unit DIN rail The applicable

PF2D

2 w y r !0 e New PFA q Body New PFA w Sensor Super PFA e Tube PPS r Housing A PPS t Housing B PPS y Housing C POM u Bushing PPS i Cap FKM o Gasket FKM !0 O-ring Stainless steel 304 !1 Thread PVC !2 Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Compact Proportional Solenoid Valve Series PVQ

) 24 VDC 12 VDC SRP PVQ30 (2.3) SRF 120 ARX20 P = 0.35 MPa 100 P = 0.25 MPa VCHR Flow rate (l/min) 80 P = 0.18 MPa ITV 60 P = 0.1 MPa 40 IC 20 PVQ 0 0 0 20 40 40 80 60 120 80 160 100 200 120 240 140 280 160 320 180 360 200 400 Current (mA) 24 VDC 12 VDC VEF VEP VER PVQ30 (4.0) VEA 120 100 P = 0.12 MPa VY2 Flow rate (l/min) P = 0.08 MPa 80 VBA VBAT P = 0.06 MPa 60 AP100 40 P = 0.04 MPa

CG5-X6011

1/4 0.75 7/16-20 0.75 0.63 5.75 63 (2.50") 0.75 0.50 1/4 0.75 7/16-20 0.75 0.63 5.88 80 (3.25") 1.13 0.75 3/8 1.25 3/4-16 1.25 0.94 7.50 100 (4.00") 1.13 0.75 1/2 1.25 3/4-16 1.25 0.94 7.50 4 Stainless Steel Air Cylinder Series CG5 NFPA Interchangeable Front Flange Mounting Type CG5F (MF1 Mounting Style) 2-EE NPT KK R E A W M 4FB WF TF ZB + STROKE UF BORE A E EE FB KK M R TF UF W WF ZB 40

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

VQ7-6/7-8

Air temperature (C) 20 10 0 10 30 40 50 60 Correction coefficient 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 40 Series VQ7-6/7-8 Specific Product Precautions 1 Be sure to read before handling. Refer to pages 37 through 40 for safety instructions and common precautions.