SMC Corporation of America
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(Values at the initial period) Note 3) At rated voltage Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT317 VT317V (Vacuum spec. type) VT317E (Continuous duty type) 0.29 kg 2.4 0.26 0.62 2.6 0.34 0.67 2.8 0.25 0.67 2.5 0.37 0.66

(mm) Connection thread M3 x 0.5 M5 x 0.8 Weight (g) Connection thread H A B C D E F M Applicable tubing Model M q w e M-3AU-2 M-5AU-2 4.5 7 9 10 3 4 5 7.7 0.9 0.7 1.5 4 2 / 1 .2 4 2.5 Component Parts No. 1 2 3 Description Sleeve Barb fitting Gasket Material C3604 C3604 Note Electroless nickel plated Electroless nickel plated E D F NBR, Stainless steel 304 B C Width across flats H A Barb

AL-OMQ0006-C PRODUCT NAME LUBRICATOR MODEL / Series / Product Number AL10-M5(-2,3,6,R,Z)-A AL20-(F,N)01(F,N)02(B)(-2,3,6,C,R,Z)-A AL30-(F,N)02(F,N)03(B)(-2,3,6,8,R,3W,Z)-A AL40-(F,N)02(F,N)04(B)(-2,3,6,8,R,3W,Z)-A AL40-(F,N)06(B)(-2,3,6,8,R,3W,Z)-A AL50-(F,N)06(F,N)10(B)(-2,3,6,8,R,3W,Z)-A AL60-(F,N)10(B)(-2,3,6,8,R,3W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3.

Specifications Series PSE200A PSE533 PSE543 PSE563 PSE573 PSE530 PSE540 PSE560 PSE570 Applicable SMC pressure sensor PSE550 PSE531 PSE541 PSE561 PSE532 PSE564 PSE574 PSE575 PSE576 PSE577 Rated pressure range 0 to 2 kPa 0 to 101 kPa 100 to 100 kPa 0 to 100 kPa 0 to 500 kPa 0 to 1 MPa 0 to 2 MPa 0 to 5 MPa 0 to 10 MPa Display/Set pressure range 0.2 to 2.1 kPa 10 to 105 kPa 105 to 105 kPa 10

B 19.5 25 29.5 C 6.5 7 14.5 A 8 8 8 8 10 10 Model MGQ32 MGQ40 MGQ50 MGQ63 MGQ80 MGQ100 Detailed figure of a section Detailed figure of b section a a a b MGQ32 to 50 MGQ63 to 100 8-20-10 11 Compact Guide Cylinder Series MGQ Proper Auto Switch Mounting Position (Detection at stroke end) Minimum Stroke for Auto Switch D-Z7/Z80 D-Y5/Y6/Y7(V) D-Y7W(V) 1 pc. 2 pcs. 5 10 5 5 10 15 Auto switch D-Z7

Free Free E Free Pitch dimensions (without magnet) (mm) Bore Size E 4 6 8 10 10 13 13 13.5 Free Easy seal replacement With front boss (h9) Seals can be replaced easily by removing rod cover. Centering can be done easily. Rod cover Tolerance h9 Clean room series Series 10-, 11-CUJ Two auto switches can be installed even for 4mm strokes.

Ambienr rempeErure 10-60"C(14'-140'F) . Proleclion slruclure IEC spec 1P67, WaleFPrcof(Jlscog2o) x fi 114ln lead wire is r6quned, L is pd at rhe end of model number. (Example) D-r7A1L o (.)

. 8-1 8.1 Specifications. 8-1 8.2 Precautions for installation and handling . 8-1 Chapter 9 Option M. 9-1 9.1 Safety instructions for use . 9-1 9.2 Specifications. 9-2 9.3 Installation of Motor type Auto Drain . 9-3 9.4 Electrical circuit diagram . 9-3 Chapter 10 Option R . 10-1 10.1 Safety instructions for use . 10-1 10.2 Specifications. 10-1 10.3 Connection of power supply . 10-2 10.4 Handling

Ambienr rempeErure 10-60"C(14'-140'F) . Proleclion slruclure IEC spec 1P67, WaleFPrcof(Jlscog2o) x fi 114ln lead wire is r6quned, L is pd at rhe end of model number. (Example) D-r7A1L o (.)

K ( across flats) H (With locking) 80 9 6.5 10 18 50 YB-03 32, 40 120 11 6.5 12 22 60 YB-05 50, 63 d2 d1 L UT C UA (mm) UA C d1 d2 H k L UT Weight (g) 25 Part No.

Note 3) This data is considered typical but not guaranteed. 10-9 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w

Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Port size Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT307 VT307V (Vacuum spec. type) VT307E (Continuous duty type) VT307Y (Energy-saving type) VT307W (Energy-saving, Vacuum spec. type) VT307 VT307V (Vacuum spec. type) VT307E

Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.

Table 1 Display Real-time flow rate l/min Accumulated flow l, m, m x 10 ft, ft x 10, ft x 10 CFM Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min, or l, m or m x 10)]. 14 For Air Digital Flow Switch Series PFA 4. Output Specification Selection Mode For For Flow rate setting SET SET Press the SET button.

Assembly of Optional parts (P19) for mounting the bracket assembly. -10- 6. Bowl assembly specifications 1) Bowl assembly / auto drain for AM20 Option symbol Semi-standard symbol 6 C 6C Semi-standard: "C" Standard Port thread type Part No. Semi-standard: "-" Standard Port thread Part No. type Rc C2SF-C-D G Rc C2SF-D G NPT C2SF-C(Z)-D NPT C2SF(-Z)-D Appearance and part No.

Dimensions C D L1 L2 Fd Fc C Fn (Fc) (KF Flange) (K Flange) (CF Flange) K B J H A G A Unit: mm Model A B C D Fn Fd Fc G H J KK P.C.D.

(Equivalent lead (8)Cable length * [m] (7)Cable type (9)Driver type Power supply Without cable Nil Without cable Nil Compatible drivers voltage [V] Standard cable 3 3 S R Nil Without driver Robotic cable (Flexible cable) 5 5 200 to 230 200 to 230 M2 LECYM2-V A 10 U2 LECYU2-V C 20 * The length of the motor and encoder cables are the same.

C + D = 3.5 + 24 = 27.5 /min CRQ B C Rotary part MRQ A D MSQ Linear part MSUB 0 1 2 Operating time (S) 1.5-7 Rotary Cylinder Series MRQ Size: 32, 40 How to Order SO MRQ B S 32 50 C A A73 No. of auto switches mounted Mounting style F: Flange on the rod side B: Basic style Rotation 2 1 0 Linear motion 0 1 2 OS SS 2S O2 S2 SO 2O Without auto switch Auto switch/Rail mounting Refer to the table

140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator