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port (P port) Note 4) (M3 x 0.5, piping not required) (68.4) (M5 x 0.8) Vacuum port (V port) Note 4) 57.3 PE 29.4 (M5 x 0.8) 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-K2 L-F.

ZQ1053M-K1Y5L-D31C 4 pcs. (Stations 1 to 4) ZQ1103M-K1Y5L-D31C 4 pcs. (Stations 5 to 8) ZY Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) ZQ 20 -80 -80 The stations are sequentially numbered.

Refer to pages 4-5-4 to 4-5-9 for external dimensions in mounting.

It may cause injury. 4-1 After pressing , the slide table will move to intermediate position, and the indicator lamp of MIDDLE will light up. 4-2 By push of over 1s at least again during lighting of MIDDLE indicator lamp, setting mode for intermediate position is achieved. 4-3 Confirm the MIDDLE indicator lamp is blinking. 4-4 Set the intermediate position by direct teaching or JOG teaching

30.7 44 - 113 [5m ] A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 S 4 B-1 5 A-1 1 B-3 2 A-3 (8) 14.2 B1 A1 17.7 2 1 14 18 6 A6 B6 5 10.2 B1 A1 2 1 B3 A3 (5.7) 15 16 11 30.7 114 [820m] A B-1 2 A A-1 1 L B B-2 6 B A-2 5 8 8m COM-A/COM B-3 3 COM-B/ A-3 4 A

EX12-SDN1-X26/-X77: Set is available in SW mode. 3-4. Instance common service Service code Description 0Eh Get_Attribute_Single 10h Set_Attribute_Single 3-5. Specific service Service code Description 4Bh Allocate_Master/Slave_Connection_set 4Ch Release_Group_2_Identifier_Set 4. Assembly Object (Class ID: 04 h) 4-1. Class attribute ID Access rule Description Value 4-2.

10 40 V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 2%F.S.

Fittings & Tubing Air Cylinders Rotary Actuators B LH 15 LT W 2 x LC (Knock pin position) Y X M W X Y 4 x LD LX Z LS + Stroke LZ ZZ + Stroke (mm) 7 7 6 6 LD 3 3 3 3 LT 4 4 4 4 LC 51 (60) 53 (61) 53 (61) 53 (61) LS Z 30 25 22 20 LH 135 (144) 125.5 (133.5) 123.5 (131.5) 118 (126) ZZ B 54 44 36 32 LX 4 3.5 3.5 3 M 16.5 16 15 15 X 8.5 8 7 7 Y 71 58 49 44 LZ 10 10 10 10 W Bore size 54.5 45 38.5

4 !1 !3 !2 i e @ A @ C @ B Boss-cut Clevis integrated Note No.

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4n-Rc 1/2, 3/4 Port size (Rc 3/4, 1) ( ) for VVPA460 Individual EXH: VVPA450Station 2Port size VVPA460Station 2Port size 2-Rc 3/4 Port size (Rc 1) 2-Rc 1/8 2-Rc 1/8 Pilot port Pilot port Mounting hole Rc 1/8 Pilot port 4n-Rc 1/2, 3/4 2n-Rc 3/4 Port size (Rc 1) Port size (Rc 3/4, 1) L Dimension

Fittings & Tubing Air Cylinders Rotary Actuators Lead wire length 300 mm 1(P), 3(R) port 4-Rc1/8 Indicator light 7 2-4.5 (Mounting hole) 57 5.3 5.3 50.5 52 0.6 P 1 R 3 4 4 4 4 4 R 3 P 1 30 17 6.5 15 2 2 2 2 2 8 0.5 0.5 P=11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 4 L2 35 L1 38 42 M plug connector (M) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

It may cause injury. 4-1 After pressing , the slide table will move to intermediate position, and the indicator lamp of MIDDLE will light up. 4-2 By push of over 1s at least again during lighting of MIDDLE indicator lamp, setting mode for intermediate position is achieved. 4-3 Confirm the MIDDLE indicator lamp is blinking. 4-4 Set the intermediate position by direct teaching or JOG teaching