10

For Saturated Steam (664)(183) Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] (663)(179) 0.8 (662)(174) (661)(170) Subsonic Critical pressure 0.9 0.6 (660)(164) 0.7 0.8 (658)(158) Sonic 0.4 0.6 (656)(151) 0.5 (654)(143) 0.4 (650)(133) 0.2 0.3 0.2 (646)(120) 0 0.1 2 5 10 15 25 20 3 10 15 20 25 45 40 35 30 4 20 10 30 40 50 60 5 30 40 50 60 70 80 20 7 20 30

Cylinder with Lock Series CNS

M14 x 1.5 15 31 25 to 1000 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 16 180 28 30 30 M14 x 1.5 15 31 30 to 1000 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 18.5 215 35 35 35 M16 x 1.5 17 36 35 to 1200 (mm) Bore size (mm) M MA MM N P Q R R1 S T TDe8 TT TX TY TZ V VA H Z ZZ 125 140 160 19 M12 x 1.75 M30 x 1.5 35 1/2 85.5 25 1 303 87.5 32 50 170 164 234 20 23 110 364 432 0.050 0.089

MQQ

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Load Weight Allowable Moment MY3A, MY3B/M1 MY3A, MY3B/m1 MY3A, MY3B/M2 MY3A, MY3B/M3 30 20 50 40 30 200 100 50 100 20 40 30 10 MY3A 3B63 MY3A 3B63 50 40 30 10 20 5 4 3 2 MY3A 3B63 10 5 4 3 MY3A 3B63 20 MY3A 3B40 MY3A 3B40 MY3A 3B40 Load weight kg 5 4 3 Moment Nm Moment Nm Moment Nm 1 2 10 MY3A 3B40 0.5 0.4 0.3 0.2 1 2 MY3A 3B25 MY3A 3B25 5 4 3 MY3A 3B25 MY3A 3B25 0.5 0.4 0.3 1

HRX-OM-W058

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 30 Heat radiation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 MODE Explanation Control the temperature so that the discharge temperature of the circulating fluid is circulating fluid set temperature + offset temperature.

HRX-OM-X027

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 30 Heat radiation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 MODE Explanation Control the temperature so that the discharge temperature of the circulating fluid is circulating fluid set temperature + offset temperature.

HRX-OM-W060

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 31 Circulating fluid display temperature 30 Heat radiation Circulating fluid set 1 temperature 30 Offset temperature 30 1 5.4 Description of Screen HRL Series 5-30 HRX-OM-W060 Chapter 5 Display and Setting of Various Functions Pump operation mode 4. Pump operation mode can be set up.

A_HEC-OM-J017

) 01 32 02 36 30 31 35 30 03 33 30 0D 2 Set at +1.50 deg.C 06 32 0D 37 Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set at 25.0 deg.C 38 Offset setting (with writing EEPROM) F 01 3F 02 38 30 31 35 30 03 33 3F 0D 06 3F 0D Set at +1.50 deg.C HEC 6-1

Air cylinder

side) 65 70 75 55 D-M9AV 55+30(n2)/2 n=4, 8, 12, 16 Other qty. 65+30(n2)/2 n=4, 8, 12, 16 70+30(n2)/2 n=4, 8, 12, 16 75+30(n2)/2 n=4, 8, 12, 16 65 95 2 switches (Different side) 60 75 80 85 2 switches (Same side) 90 100 105 110 D-A3 D-G39 D-K39 65+30(n2) n=2, 4, 6, 8 Other qty.

21

25 10 19 10 26 13 10.5 6 34 6 33.4 Width across flats 8 length 3.5 17.5 15 17 9 30 25 10 19 12 26 13 10.5 8 34 6 37.4 Width across flats 10 length 3.5 23.5 20.5 22 10 38 41.2 15 30 14 32 16 13.5 8 42 8 46.4 Width across flats 12 length 3.5 L 30 MM M8 x 1.25 NA 24 NN M20 x 1.5 P M5 x 0.8 RR 9 S 55 U 14 Z 116 ZZ 125 Bore size 20 25 32 40 30 M10 x 1.25 30 M26 x 1.5 M5 x 0.8 9 56 14 120 129

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

IN side, OUT side 4 10 20 30 50 75 75 Prevents vacuum equipment trouble due to airborne contaminants. Mass (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 6 6 8 8 10 Metric size Unrestricted 360 piping tube mounting.

Large Size Vacuum Module: Series ZR

80 80 80 80 Vacuum pressure Vacuum pressure Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Air consumption 70 70 70 70 60 60 60 60 50 50 50 50 40 40 40 40 Suction flow 30 30 30 30 Suction flow 20 20 20 20 10 10 10 10 Supply pressure (MPa) Suction flow (l /min (ANR)) Supply pressure (MPa) Suction flow (l/min (ANR)) ZR1-W15S1 Exhaust characteristics

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Series 20 Port size Symbol 10 30 M5 01 02 M5 1/8 (6A) 1/4 (8A) Electrical entry G Grommet Orifice size Orifice size mm 1 1.6 1.6 2.3 3.2 2 3 4 Series Symbol 1 2 1 2 3 2 3 4 10 20 30 3 Compact Direct Operated Series VDW10/20/30 2 Port Solenoid Valve for Water and Air Standard Specifications Valve construction Direct operated poppet Fluid Note 2) Water (except waste water or agricultural

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

CNS

Graph (1) 30 20 10 2.

HRX-OM-M005

This system Your system Communication data TEMP PV 30 TEMP PV TEMP PV 30 TEMP SP 30 External communication 30 Discharge temp: OFFSET 1 31 Heat dissipation: 1 Circulating fluid temp. in your system: 30 Figure 8-6 When MODE3 is selected 8.4 Offset Function HRZD Series 8-16 HRX-OM-M005 Chapter 8 Appendix 8.5 BAND/READY Function Sets BAND to TEMP SP value, and notifies TEMP PV value reaches within

VM

Straight plunger Roller plunger Cross roller plunger 1.5 0.7 0.7 0.3 0.4 0.7 30 45 30 Roller lever VZM500 VZM400 VFM300 VFM200 One way roller lever 45 30 Straight plunger Roller plunger Flat button Groove 0.5 0.2 0.2 0.1 0.2 30 45 30 Roller lever Protrusion VM800 Adjustable roller lever 45 Adjustable rod lever Recessed portion Fastening ring Avoid abrupt angles on limit switch actuator.

Thermo-chiller

If the voltage increase ratio (dV/dt) at the zero cross should exceed 40 V/200 sec., it may result in malfunction. 4 min 6 min 10 min 14 min 20 min 30 min 2 min 1 min Max.

Metal Seal/Rubber Seal Series VQ Body Ported

AXT661-12A AXT661-14AN AXT661-14AN-6 AXT661-14AN-10 AXT661-14AN-20 AXT661-14AN-30 AXT661-13AN AXT661-13AN-6 AXT661-13AN-10 AXT661-13AN-20 AXT661-13AN-30 AXT661-13A AXT661-13A-6 AXT661-13A-10 AXT661-13A-20 AXT661-13A-30 Note 1) 100/110 VAC for single: AXT661-31A-; for double: AXT661-32A200/220 VAC for single: AXT661-34A-; for double: AXT661-35Aare in accordance with the above table.

Slide Unit Series CX2/CXWM/CXWL

30 15 17.5 15 17.5 15 11.5 17.5 14 17 11.5 Note 2) For only 25 strokes, two magnets for auto switches are installed to the magnet mounting block.