ZP3

L N S U F GN GS 02 13 5.5 2 KQ2H02-M3G Width across flats K ZP3 T 015 02 035 U J K 3 6 1.2 04 14.5 8 4 KQ2H04-M3G J Dimensions Per Vacuum Inlet: Barb Fitting Model J K Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Made to Order

Through-hole/Both ends tapped (Standard): MK2TB MK2T-XC89 Lube-retainer Coil scraper 2 x P Cylinder port M A C G thread length H L N C A KA I KK 2 x J 4 x J K D 0.07 0.15 4 x F counterbore C S T AB AA MM KB Q R 2 x E through 2 x FF counterbore (mm) MM KB KK FF AB AA I N M L K J H G F E D C A KA Bore size 32 40 50 63 0.07 0.15 14 50 9 depth 11 9 depth 7 M10 x 1.5 8 4 46 45 34 6 M6 x 1.0 21

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT N Needle Valve/Flow Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

3 Port Solenoid Valve Metal Seal Series VZ200 1

(Normally open) 2 01 Body ported Rc 1/8 Without sub-plate Rc 1/8 Base mounted 01 Nil Light/Surge voltage suppressor V100 Body type Nil None Rc 1/4 02 SY Z With light/surge voltage suppressor (Indicator light is not available for grommet type.)

SMC Electronic Switch Series Variations

ZSE1-01-15CN1 pc. ZS-20-5A-501 pc.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

K K K J K, T K K XA51 K K J J J K K J J J K K K J J J J XA52 MSZ XA53 J J J J J J J XA55 CRQ2X MSQX J XA57 J Reversed shaft, Change of double shaft length A combination of up to two XAs are available.

Battery-less

With motor cover: LEYG16DmE -mC A B C H Dimensions (Size 16) U 35 Motor cover direction H D1 42.3 D2 42.3 D3 55.1 D4 47 A + Stroke Y X2 Cable length 250 With lock/motor cover: LEYG16DmE -mW A B C Motor Cover Direction Cable length 350 D1 D2 J J J J J J J J 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 30.3 22.2 J 30.3 22.2 J 30.3 22.2 J 22.2 30.3 J 22.2

PSxx-OMR0001CN

-2No.PS-OMR0001CN-J 1 / 1 1.5 *3) *3)1 1 -3No.PS-OMR0001CN-J 1 SMC 100 1 -4No.PS-OMR0001CN-J 1 / (5 m ) CE 50 N 30m DC(-)() () IP67IP65 -5No.PS-OMR0001CN-J 1 41 LCD VX2 (2 )AR20 () -6No.PS-OMR0001CN-J 2 (0.01 mm0.03 mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMR0001CN-J 2 2 9 0.010.03mm 0.020.15mm 0.050.30mm DIN F G H 7 10 B Rc1/8 4

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

-23SD 12 18.3 23.1 13.5 1/4" 3.2 8.4 20 12.7 AS221F-N01-01SD AS221F-01-04SD 1/8" 8.4 27.5 20.4 4 9.3 20 5/32" 9.3 20.4 27.5 12.7 21 13.4 AS221F-N01-03SD AS221F-01-06SD R 1/8 12 14.2 7.2 1.2 31.6 13.5 6 11.6 34.7 21 AS221F-N01-05SD AS221F-01-08SD NPT 1/8 12.7 14.2 7.2 1.2 31.6 3/16" 13.2 24 31.1 16.5 32.4 18.5 25.3 8 15.2 23 13.4 34.7 AS221F-N01-07SD AS221F-01-10SD 1/4" 13.2 23.9 31 17 21

Rubber seal 5 Port Solenoid Valve Series SYJ5000

connector (L): SYJ5140-L-01 M plug connector (M): SYJ5140-M-01 DIN terminal (D): SYJ5140-D-01 M8 connector (W0): SYJ5140-W0-01 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 82.6 Max. 10 75.4 50.1 [57.1] 64.1 34.7 54.6 M8 x 1 49 37.1 61.2 [68.2] Approx. 300 (Lead wire length) 6 Pg7 6 6 6 73.5 [75.7] 63.7 [65.9] 83.5 65.2 72.6 58.7 0.5 45.5 45.5 45.5 45.5 17 17 17 17 17

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

-23ST 12 13.5 1/4" 3.2 8.4 12.7 AS221F-N01-01ST AS221F-01-04ST 1/8" 8.4 4 20.4 27.5 9.3 5/32" 9.3 20.4 27.5 12.7 14.3 AS221F-N01-03ST AS221F-01-06ST 13.5 12 R 1/8 14.2 7 35.6 1.5 31.6 6 11.6 3/16" 11.4 23.1 30.2 14.3 16.5 AS221F-N01-05ST AS221F-01-08ST NPT 1/8 12.7 14.2 7 35.6 1.5 31.6 18.5 25.3 32.4 8 15.2 AS221F-N01-07ST AS221F-01-10ST 1/4" 13.2 23.9 31 18.5 15 21 33.1 40.2 10 18.5 AS221F-N01

7

I F C e d Grommet (with surge voltage suppressor) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet Grommet (with surge voltage suppressor) DIN terminal C T U T T U U V 10,

Electric Actuators

LJ1 LG1 LC1 LX LC6D/LC6C Switches 76 46 38 2-M2.5 x 0.45 thread depth 4 5H9 +0.030 0 10 3 depth5 J 27 J x K 25 8 Motor unit Refer to "Applicable Motor List" below for dimensions. (This drawing shows a Tamagawa Seiki, Co., Ltd. motor.)

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS2201FE-01, AS2211FE-01 AS2301FE-01, AS2311FE-01 AS2201FE-02, AS2211FE-02 AS2301FE-02, AS2311FE-02 AS3201FE, AS3211FE AS3301FE, AS3311FE Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-F Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) TMH ASD AS AS-FE AS-FE Number of needle rotations Number of needle rotations Number of needle rotations

Precision Regulator

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020/2120 IR3000 IR3010 IR3020/3120 P362030-201 Bracket P36201023 P36202028 Pressure gauge234 G33-2-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-4-01 G43-10-01 G33-4-01 G43-4-01 1 A bracket and two mounting screws (M5 x 35) To mount the bracket, remove two body screws (M5 x 30) on the name plate on the opposite side and replace the attached

NCA1

None Nylon Neoprene Nil J K MT4 T MP4 C Standard stroke Inches MP1 MS2 MT1 MT2 Air cushion Nil Without auto switch Auto switch X S U J Stroke Both ends None Head end Rod end Nil N H R Hundredths of an inch For the applicable auto switch model, refer to the table on page 6-15-7. Auto switches are shipped together, (but not assembled.) Mounting Bracket Part No. Part no.

2 Phase Stepper Motor/Without Motor Brake Series LXS

Proximity switch (optional) depth 5 10 7.5 15 pin plug 5H9 +0.030 0 E-M5 x 0.8 thread depth10 Home position switch (optional) 6 Refer to page 100 for connection cables. 76 46 38 2-M2.5 x 0.45 thread depth 4 5H9 +0.030 0 10 3 depth5 J 27 J x K 25 8 Motor unit Refer to "Applicable Motor List" below for dimensions. (This drawing shows a Tamagawa Seiki, Co., Ltd. motor.)

NCA1

None Nylon Neoprene Nil J K MT4 T MP4 C Standard stroke Inches MP1 MS2 MT1 MT2 Air cushion Nil Without auto switch Auto switch X S U J Stroke Both ends None Head end Rod end Nil N H R Hundredths of an inch For the applicable auto switch model, refer to the table on page 6-15-7. Auto switches are shipped together, (but not assembled.) Mounting Bracket Part No. Part no.

High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT