How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Piston area (mm2) Operating direction 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 MGC Made to Order Specifications (For details

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

Facility water system Electrical system Facility water temperature +27F (15C) Circulating fluid temperature Conditions 50 to 95F (10 to 35C) Facility water temperature 7.9 gpm (30 L/min) 1.1 gpm (4 L/min) 10.6 gpm (40 L/min) 10.6 gpm (40 L/min) Circulating fluid rated flow 5.3 gpm (20 L/min) 2.6 gpm (10 L/min) 10.6 gpm (40 L/min) 6.6 gpm (25 L/min) Facility water required flow rate Temperature

Electro-Pneumatic Valve NVEP/NVEF Series

Mounting Amplifier Single mounting Ho.izontally Q r A vertica,,y F Multiple mounting + -f -t] + -ti n n n h n t t t l t t l t I i u ! L l !

Digital Pressure Switch

Piping/weight specifications Product No. 02(L) N02(L) F02(L) C01(L) A2(L) B2(L) Port size R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 fluid contact Materials in part Pressure-sensing part Pressure sensor: SUS630, Fitting: SUS304 Body (Rear piping) 51 g 51 g 48 g 47 g 54 g 46 g Weight Body (Bottom piping) 77 g 78 g 74 g 65 g 81 g 72 g Lead wire with connector +39 g Leakage 1 x 10-5Pa m3/s 1 x 10

Series HAW Water Cooled Aftercooler 1

HA Accessory (Option) AT HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 Applicable model Screw flange (With companion flange) HAWF-141 HAWF-142 HAWF-200 HAWF-200 ID Auto-drain AD402-04 AD600-06 AD600-10 AMG Model Selection (Flow Capacity l/min (ANR)) AFF HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 Model 1000 70C 100C 180C 50C 2000 6000 12000 15000 22000 30 Inlet air temperature

Electrostatic Sensor Monitor

Mounting by bracket Fix the bracket to the controller with the set screws M3x5 L (2 pcs.) as attached. The tightening torque of the set screws must be 0.5 to 0.7 Nm. Mounting by panel mount adapter Fix the panel mount adapter to the controller with the set screws M38 L (2 pcs.) as attached.

ITV0000

Repetition Pressure characteristics Flow characteristics 0 1 10kPa 20kPa -20 Output deviation factor % F.S. 0.5 40kPa -40 Set pressure kPa Out 60kPa -60 0 Return 80kPa -80 -0.5 100kPa -100 -120 -100 -80 -60 -40 -1 0 1 1.5 0.5 2 2.5 3 3.5 -120 -20 4 Flow rate l/min (ANR) Supply pressure MPa 5 Compact Electro-pneumatic Regulator Series ITV0 Dimensions Single unit 4-6 2-6 PWR L bracket (optional

Compact Electro-pneumatic Regulator Series ITV0000

Repetition Pressure characteristics Flow characteristics 0 1 10kPa 20kPa -20 Output deviation factor % F.S. 0.5 40kPa -40 Set pressure kPa Out 60kPa -60 0 Return 80kPa -80 -0.5 100kPa -100 -120 -100 -80 -60 -40 -1 0 1 1.5 0.5 2 2.5 3 3.5 -120 -20 4 Flow rate l/min (ANR) Supply pressure MPa 5 Compact Electro-pneumatic Regulator Series ITV0 Dimensions Single unit 4-6 2-6 PWR L bracket (optional

AR Series Modular Type Regulator

G46-10-l01-L 0.02 to 0.2 MPa setting G36-4-l01-L G46-4-l01-L AR -A -B Note 1) Assembly of a bracket and set nuts Note 2) l in round pressure gauge part numbers indicates a pipe thread type.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

81.5 93.5 CB 2 2 2 3 3 3 5 5 5 H 19 26 32 39 44 55 67 85 97 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 Model 12-CY3R6 12-CY3R10 12-CY3R15 12-CY3R20 12-CY3R25 12-CY3R32 12-CY3R40 12-CY3R50 12-CY3R63 L 34 38 53 62 70 76 90 110 118 W 20 20 25 40 40 50 60 60 70 X 10 15 18 22 28 35 40 50 60 LD 3.5 3.5 4.3 5.4 5.4 7 7 8.6 8.6 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79 93 113 121

SI unit for EtherNet/IP TM

Device information Product type : 12 (communication adapter) Product code : 107 -27No.EX-OMK0004-B I/O mapping Input area mapping Input data MSB LSB MSB LSB Offset (word) 15 8 7 0 Sensor input area 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 2 L L L L SP DI L L L L L L L L L L L: Fixed to Low Status input area Diagnostic (Status input area) Item

Series H, DL, L, LL Self-align Fittings

L-04 L-06 N-04 N-06 LL-04 LL-06 S-04 S-06 4 6 L-08 8 L-10 10 L-12 12 4 6 N-08 8 N-10 10 N-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 4 6 S-08 8 S-10 10 S-12 12 0.7 1.1 1.4 1.7 2.0 Precautions Be sure to read before handling. Refer to Air Fittings & Tubing Precautions for other details. Installation Caution Cut the tube to the required length.

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

AIR GRIPPER

H H H Gripping point Gripping point L L Gripping point L "L" and "H" are appropriate "L" is too long "H" is too long 2. Attachments should be designed to be as light and short as possible (1) A long or heavy attachment increases the inertia force required to open or close the fingers.

Servo Motor Controller (24 VDC)

CN5: Parallel l/O Connector 6.1 Parallel I/O specifications * Input specifications * Output specifications No. Item Specification No.

NVEPA|VEFseies

Mounting Amplifier Single mounting Ho.izontally Q r A vertica,,y F Multiple mounting + -f -t] + -ti n n n h n t t t l t t l t I i u ! L l !

Large Type Vacuum Unit Series ZR

Refer to CAT.E824A "Pressure Switch" Series ZR How to Order Ejector Systems ZR1 20 S 25 M Z 1 5 K1 D1 Ejector unit nozzle size 1.0mm 10 Digital vacuum switch specifications (D1, D2, D3) 1.3mm 13 Symbol Lead wire length 1.5mm 15 Applicable switch Output specifications 25 (L) Lead wire length 0.6 (3.0) m 1.8mm NPN output 18 D1 D2 26 (L) Lead wire length 0.6 (3.0) m Analog output 2.0mm 20 65

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

MDHR2-10,15 1122MDHR2-20,30 1122H H L L When auto switch D-M9N, D-M9P, D-M9B is used When auto switch D-M9NV, D-M9PV, D-M9BV is used When auto switch D-M9NV, D-M9PV, D-M9BV is used (mm) Max. protrusion of auto switch from edge of body: H Max. protrusion of auto switch from edge of body: L, H (mm) Auto switch model Auto switch model D-M9V Air gripper model D-M9V D-M9 6.8 6.8 MDHR2-20 MDHR2

Membrane Air Dryer

oC Inlet air flow rate L/min(ANR) 360 586 329 550 93 135 Outlet air flow rate L/min(ANR) 300 500 300 500 75 110 Purge air flow rate L/min(ANR) 60 86 29 50 18 25 Inlet air pressure MPa Inlet air temperature oC Inlet air saturation temperature oC Ambient temperature oC *Note 1 *Note 1 -20 -15 -40 *Note 2 Standard performance conditions *Note 3 0.7 25 25 25 Dew point indicator purge air flow

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

ASS AS1001FG AS2001FG AS2051FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa ASR ASQ Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations AS3001FG AS4001FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle