AWG

AWG30 AWG40 40 179 91 52 45 47 40 35 48 65 5.4 10.4 65 2.3 1/8, 1/4 53 223.5 108.5 59 58 59 55 45 58.5 70 6.5 10.5 75 2.3 1/4, 3/8 70 261.5 114.5 75 70 70 80 50 70 77 8.5 12.5 85 2.3 1/4, 3/8, 1/2 Accessory specifications Optional specifications Panel mount With auto-drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model B S T U V W B B B B AWG20 AWG30 AWG40

Process Valve

2.5 2.6 1 4 1 5.7 5.8 32 Symbol Valve type Type 4.1 4.2 1 2 1 N.C.

Fieldbus system (PROFIBUS DP compliant)

1 point: 0.5 A or less (2) 1 unit: 1 A or less (3) Total current of OUT0 to 7: 1 A or less Meet the three following conditions: (1) 1 point: 0.5 A or less (2) 1 unit: 3 A or less (3) Total current of OUT0 to 7: 1.5 A or less Max. load current Total current of OUT8 to 15: 1 A or less Total current of OUT8 to 15: 1.5 A or less Enclosure Short circuit installed Current consumption 50 mA or

Sensor Monitor

Display MPa kPa Pa Kgf/cm2 bar mbar psi inHg mmHg mmH2O Fine differential pressure 2 kPa 0.002 0.001 1 0.01 0.001 0.1 Vacuum 101 kPa -0.1 0.001 0.1 0.001 0.001 0.01 0.1 1 Compound 100 kPa F0.1 0.001 0.1 0.001 0.001 0.02 0.1 1 Low pressure 100 kPa 0.1 0.001 0.1 0.001 0.001 0.01 500 kPa 0.5 0.001 1 0.01 0.01 0.1 Positive pressure 1 MPa 1 0.001 1 0.01 0.01 0.1 2 MPa 2 0.001 1 0.01 0.01 0.2

Compressed Air Preparation Filter

Unit: Nm Recommended Torque Connection thread 1/8 1/4 3/8 1/2 3/4 1 1 1/2 2 Torque 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 48 to 50 48 to 50 * After tightening by hand, use a tightening tool to tighten an additional 1/6 turn. 2. Select according to the maximum flow rate of the system. 2.

Digital Flow Switch (Integrated display type)

CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 flow Min. setting/display unit 0.1 ft3 x 10-1 0.1 ft3 x 10-1 1 ft3 x 10-1 1 ft3 x 10-1 Conversion of accumulated pulse 0.1 1 1 1 ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse : Flow rate in the specification is the value at standard

Vacuum Ejector Series ZM

1 y u i o ZR ZM t t e e ZMA V V ZQ r r ZH !1 Left side Right side ZU ZL ZY ZF Clamp rod part no. (1) ZP Manifold part no.

EX500-GPR1A.eng

Plug connector pin layout Wiring 3 4 2 1 Brown M12 5 Output connector No.0 Output connector No.1 Output connector No.0 Output connector No.1 Power supply ( DC24V ) Power supply ( DC24V ) NC NC 1 EX9-OET2/EX9-OEP2 EX9-OET1/EX9-OEP1 52 NPN output Pin No.

EtherNet/IP TM Compatible Fieldbus System

Input data Offset Meaning MSB LSB MSB LSB (INT) 15 8 7 0 D4 #D3 #D2 #D1 #C4 #C3 #C2 #C1 #B4 #B3 #B2 #B1 #A4 #A3 #A2 #A1 Slave 8 condition 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 Error code COM_D COM_C COM_B COM_A Port 9 diagnostic/ Error code 0 1 1 1 0 0 0 1 0 0 0 1 0 0 0 1 27 No.EX-OMS0014-A Configuration data map Configuration data Offset MSB LSB MSB LSB (INT) 15 8 7 0 0 QC Web COM_D COM_C COM_B

4/5 Port Air Operated Valve Series SYJA3000 1

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Air Filter

, 1/2 70 147.1 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 186.9 AF40-06-D 3/4 75 149.1 27 35.5 38.4 40 35.5 50 52 34 8.5 12.5 88 2.3 43 188.9 AF50-D 3/4, 1 90 220.1 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.9 AF60-D 1 95 234.1 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 273.9 Semi-standard specifications Metal bowl with PC/PA bowl Metal bowl level gauge With element Model With With

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc 1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc 1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9

Digital Flow Switch

and 1.)

Series VCS

Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Type 01 02 03 04 U10/32 N01 N02 N03 N04 Elbow Universal 2 3 Universal type Applicable tubing O.D.

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

MHZ2/MHZJ2

0.5 0.5 1 0.4 0.5 1 0.5 0.5 1 0.4 0.4 0.8 0.5 0.4 0.8 0.5 __ 0.5 0.4 0.8 1 0.5 0.5 1 0.4 0.8 0.5 Note) Auto switches are not applicable to blank sections in the table.

Coolant Valve

. 20 (14) 3 25 (16) 4 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F Nil: Non-locking push type 40A 1 1 2 Valve size 2 to 9 40 (28) 6 1 B 1 2 Flange 40F 2 50A 50 (33) 7 50F 2B Flange Semi-standard 2 B 1 2 Flange 65F 65 (45) 8 Electrical entry/With light/surge voltage suppressor 3B Valve size 1 Valve size 2 to 9 80F 80 (56) 9 Symbol Electrical entry Flange Values in parentheses are N.C. at 1 MPa.

Digital Flow Switch

[F 1] Setting of OUT1 completed.