MXU

7 Piston rod Miniature linear guide Table Bumper A Bumper B Bushing Steel ball A Steel ball B Type C snap ring for hole Round head Phillips screw Magnet holder Auto switch Piston gasket Rod seal Piston seal Gasket r t y u i o !0 !1 !2 !3 !8 !

MXU

7 Piston rod Miniature linear guide Table Bumper A Bumper B Bushing Steel ball A Steel ball B Type C snap ring for hole Round head Phillips screw Magnet holder Auto switch Piston gasket Rod seal Piston seal Gasket r t y u i o !0 !1 !2 !3 !8 !

Flow sensor

M Type Tube dimension mm Port size Model 4 M-5AN-4 Barb fittings for nylon tubing M5 x 0.8 6 M-5AN-6 -16No.

Series: 25A-PFMB7, Flow Rate Range: 501 (5 to 500 L/min), Thread Type: Rc, Port Size: 04 (1/2), Out Specification: C (Out 1: NPN, Out 2: Analog 1 to 5 V), Lead Wire: W (Lead Wire w/Connector 2 m, Rubber Cover for Connector, Silicone Rubber), Unit Specifications: M (SI Unit Only), Bracket: R (w/Bracket)

Series: 25A-PFMB7, Flow Rate Range: 102 (10 to 1000 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Out Specification: A (Out 1: NPN, Out 2: NPN), Lead Wire: W (Lead Wire w/Connector 2 m, Rubber Cover for Connector, Silicone Rubber), Unit Specifications: M (SI Unit Only), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate)

Series: 25A-PFM7, Flow Rate Range: 10 [0.2 to 10 (5) L/min], Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: A (2 NPN Outputs), Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (Bracket

Series: 25A-PFM7, Flow Rate Range: 50 [1 to 50 (25) L/min], Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: A (2 NPN Outputs), Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (Bracket for w/o Flow Adjustment

: °C), Bracket: R (w/Bracket)

: °C), Bracket: R (w/Bracket)

: °C), Bracket: R (w/Bracket)

Series: 25A-PFM7, Flow Rate Range: 50 [1 to 50 (25) L/min], Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: A (2 NPN Outputs), Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (Bracket

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: C8 [ø8 (5/16") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: A (2 NPN Outputs), Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: 02 (Rc1/4), Piping Entry Direction: Straight, Output Specification: A (2 NPN Outputs), Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (Bracket for w/o Flow

(in) D (D1): 1, Connection Screw Type M (M1): R, Connection Screw Nominal M (M1): 1B(25A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 6

(in) D (D1): 1, Connection Screw Type M (M1): R, Connection Screw Nominal M (M1): 1B(25A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 6

Compact Direct Operated 2 Port Solenoid Valve for Water and Air SeriesVDW10/20/30 VX2 How to Order Valves (Single Unit) VXD VD W 2 1 1 G 2 01 VXZ For Water, Air, Vacuum VXE Made to Order (Refer to page 244.) Series VXP 1 10 Valve type Option 2 20 VXR

Model Av x 106 m2 C [dm3/(sbar)] N.C. 0.96 Cv 0.40 b 0.14 Cv converted 0.04 1 0.04 VDW10 M5 1.6 0.07 0.07 1.7 0.25 0.30 1.6 0.09 0.08 1.9 0.45 0.31 M5 1/8 (6A) VDW20 2.3 0.18 0.18 4.3 0.45 0.58 3.2 0.33 0.30 7.2 0.38 1.2 2 0.16 0.16 3.8 0.52 0.52 1/8 (6A) 1/4 (8A) VDW30 3 0.30 0.28 6.7 0.52 1.0 4 0.46 0.44 11 0.49 1.5 244

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

GA342

G NPT NPTF R External pilot F N T Ambient and fluid temperature 10 to 50C (No freezing.

IZx-OMR0035

Installation of Ionizer 1) Installation with bracket When installing the Ionizer with a bracket, secure it with M5 screws using the mounting holes on the bottom of the bracket (The screws need to be prepared by the user). Refer to "6. Dimensions" for details. The angle adjustment range of the bracket is 45 degrees in direction A, and 90 degrees in direction B.

CC

**Valve opens when solenoid valve stops conducting electricity. voltage 110V, 220V AC/6, 12, 48, 100V DC 50Hz: 14VA 60Hz: 13VA Inrush AC Apparent power 50Hz: 9VA 60Hz: 8VA Holding DC 6.5W MK/MK2 Electrical entry Grommet (Standard), Conduit, DIN terminal RSQ/RSG RSH CE1 CE2 ML2B ML1C REA REC RHC MTS CC (mm) Model Oil port size (Rc(PT)) A B CA* CL* GB GL KA KB KL L QA M NB NL QB QL R T GA F