Multistage Ejector Series ZL112.212

20 50 25 ZR 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.1 0.2 0.3 0.4 0.5 0.6 ZM Supply pressure (MPa) Supply pressure (MPa) ZMA Flow Characteristics Flow Characteristics Supply pressure: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 ZH 70 70 60 60 ZU 50 50 40 40 30 30 ZL 20 20 10 10 ZY 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140

3 Port Solenoid Valve SYJ300/500/700 Series

, Non-gloss nickel plating Applicable base sub-plate SS3YJ5-40 SS3YJ5-41 SS3YJ5-40R SS3YJ5-41R Applicable base SS3YJ5-21R Manifold base Applicable base SS3YJ5-20 Manifold base Blank plate SYJ500-10-1 Manifold base Gasket DXT170-29-1 Applicable base SS3YJ5-20 15 Valve Specifications Series SYJ700 3 Port Solenoid Valve Model Weight g Note) Type of actuation Port size Effective area mm2(Cv)

Sine Rodless Cylinder Series REA

200 300 300 200 Usable range 100 100 Usable range 20 30 40 50 50 40 30 20 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Note: 1N = 0.2248lbf 1kg = 2.2046lb 1in = 25.4mm 1in = 2.54cm 100 80 REA63 REA50 50 40 30 REA40 REA32

P

(mm) ZX Pad diameter (mm) Lock ring 1 2 10 to 16 20 to 32 02 04 2 4 -X19 With lock ring Without lock ring (10 or larger) ZR 3 40, 50 06 6 08 8 ZM Material 10 10 N S NBR Silicon rubber 13 13 ZH 16 16 U Urethane rubber Pad style 20 20 ZU F Fluorine rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 GSConductive silicon rubber (2 to 16) 40 40 D Deep ZL 50 50 B Bellows 20

Low Differential Pressure Sensor

DC() IN (1 to 5 V) Analog output or auto shift input Gray 2 DC(-) Blue 1 20 2 m 20 With bracket A 30 20 46 4.2 10 15 40 31.5 26.5 1.6 7.2 22 35 41 A View ZS-28-B Bracket With panel mount adapter With panel mount adapter + Front protective cover 42.4 34.5 24 7 34.5 24 11 Panel thickness 0.5 to 6 ZS-27-D Panel mount adapter + Front protective cover 8.75 ZS-27-C Panel mount adapter 6 Series

Digital Flow Switch

to 1000 L/mim 20 to 2000 L/mim Instantaneous flow 5 to 525 L/mim 10 to 1050 L/mim 20 to 2100 L/mim Set flow rate range Accumulated flow 0 to 999,999,990 L Instantaneous flow 1 L/min Flow Minimum setting unit Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.) 1 L/pulse 10 L/pulse Accumulated value hold 2 Every 2 minutes or every 5 minutes Rated pressure range 0 to

XM, XY

-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

Series VCS

1 5 1 0 25 20 1 5 30 25 25 2.

AME

30 40 30 10 15 15 16 20 24 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 9 11 13 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AME550 AME650 AME850 1 2 1 2 1 2 1 Please refer to page 14-20-57 for Made to Order Specifications. 14-20-41

IR1000/2000/3000

kPa) IRV2000 IRV2000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0

2-Color Display

(Reduce power consumption by up to 20%.)

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

20 stations 8 Accessories Series VQ100 Blanking Plate Ass'y Plug Ass'y VVQ100-12A1 2 3 VVQ100-10A-1 Finishing O.D.7.8 For VV3Q11 12 3 Cover color : Ivory 1 4 17 10 5 Blank plate with gasket and screws. 11 16 17 20 L 52 30 10 1 Plug 2 Female contact VVQ100-10A-2 For VV3Q12 Vinyl multi-core cable VVRF 0.2mm2 20-core 3 Cable Length Model

VK3000

VV5K3-20-06 VV5K3-40-06-M5 Common SUP/Common EXH VK Type 20: Body ported (A, B port top ported) Applicable solenoid valve VK3120M5 VK312001 VK332M5 VK33201 How to Order A port: Rc 1/8, M5 x 0.8 VZ VV5K3 20 05 A, B port Rc 1/8, M5 x 0.8 VK3120 Thread type VF VK332 Valve stations Nil 00F 00N 00T Rc 01 1 station Applicable blanking plate assembly VK3000-7-1A VFR G NPT 20 20 stations R port:

JXCx-OMY0006

Outlines of Product 7 2.1 Features 7 2.2 How to Order 8 2.3 Product configuration 9 2.4 Start up procedure 10 (1) Checking the contents of the package 10 (2) Mounting the controller 10 (3) Controller Setting 10 (4) PLC set up 10 (5) Wiring and Connection 10 (6) Supply of power 11 (7) Setting parameters 11 (8) Setup of the operation parameters 12 (9) Test run 12 3.

PEEK

LVM205R Universal 3 Features 3 Series LVM Power consumption (C) (W) Flow characteristics Fluid temperature Volume of valve chamber Weight (g) Page Water Av Cv Air C b P.1 to 3 0.43 x 106 0.018 0.06 0.2 18 20 2 2.5 at inrush P.4 to 8 0.04 0.13 0.22 11 30 0.96 x 106 1 at holding 0.03 0.1 0.2 20 34 0.72 x 106 1.5 P.4 to 10 0 to 50 (with no condensation) 0.72 x 106 0.03 0.1 0.2 20 34 1.5 5.5

ZSE F/ISE

ZSE50F / ISE50 1 x 10 -5 Pam3/s ZSE60F / ISE60 1 x 10 -10 Pam3/s IP65 Enclosure Panel mount With bracket Option Panel mount + Front side protection cover To confirm working pressure of hydraulic cylinder Application examples To confirm adsorption of workpieces containing water To confirm primary pressure of cleaning line 16-2-26 3 High precision and high resolution 1/2000 (0.1 kPa) Positive

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

40 80 50 50 20 20 Load mass m (kg) Load mass m (kg) Load mass m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Peltier-type Chiller Thermo-con/ Compact Type

20 30 40 50 60 70 Circulating fluid temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the cooling capacity decreases by approx. 20 W.

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

12 10 16 10 Vacuum suction type M3 x 0.5 11221122185 (180) 24 25 14 22 8 15 Double acting Non-lube 11221122400 (390) 780 (760) MHR2-20 MDHR2-20 MHR2-30 MDHR2-30 33 34 16 28 12 20 M5 x 0.8 1122112230 58 59 19 37 18 Note 1) Refer to the Best Pneumatics No. 4 for details of gripping force at each gripping point.

4/5 Port Air Operated Valve SYJA3000 Series

0.5 (Pilot port) A B 11 1.5 17.5 (For mounting) 2 x 3.2 equivalent (18.5) A B Manual override 14 36 (18.5) (21) Manual override 41.6 13.5 15 41.6 28.5 21 R2 P R1 13 R P R (11) (0.5) 10 5 5 2 x 1 (Bleed port) 10 10 7 7 2 x 1 (Bleed port) M3 x 0.5 (Piping port) 28 M5 x 0.8 (Piping port) 3 position closed center/exhaust center/pressure center SYJA3 20-M3(-F) 3 position closed center/exhaust