FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

FMW-4200-.5 0.05 0.5 15 0.05 0.15 3A FMW-4200-2-10 0.2 2 30 0.1 0.3 10A FMW-4200-2 0.5 2 30 0.1 0.3 15A FMW-4200-5 0.5 5 30 0.4 0.8 15A FMW-4200-15 0.5 15 45

D-F6N/D-F6P/D-F6B

Electrical entry direction In-line Wiring type 2-wire 3-wire NPN PNP Output type Applicable load IC circuit, relay, and PLC 24 VDC relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 24 VDC (10 to 28 VDC) 28 VDC or less Load current 2.5 to 40 mA 40 mA or less Internal voltage drop 4 V or less 0.8 V or less at 10 mA (2V or less at

ML1

Model PP SS VV OO Gasket QQ RR TT UU ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 16.5 C11.2 18 46 30 12 32 22 8 17 23.5 12.5 10 C14 53 40 34 26 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 X 0.8 M6 X 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120 53.5 28 40 242 36.5

range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less, Ambient and fluid temperature: -10

range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less, Ambient and fluid temperature: -10

range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less, Ambient and fluid temperature: -10

Compact Electric Actuator Series LG1

thread depth 10 20 0.02 8H10 depth 10 Encoder signal line Motor power line 8H10 depth 8 85 130 A (Table movement range) 77.3 (77) 107 10 95 Work mounting reference plane 55 Body mounting reference plane 52.5 D 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 95 C 100 95 8(4)-6.2 (160) () () 110 95 20 95 B (140) () () Dimensions A Stroke Model B C D Note) LG1H202100-F LG1H202200-

Speed Controller with

15.2 18.5 20.9 18.5 21.7 3.2 5 6 25.4 36 37 39.5 40.7 42.5 53.2 57.2 59 65 70.8 76 76.9 81.3 3.4 4.4 5.1 6.1 5.2 6.3 6.7 8 7.4 8.2 9.8 10.9 10.3 11.3 7.9 11.1 11.8 12.8 12.3 13.4 16.3 17.6 19.3 20.1 21.7 22.8 22.7 23.7 20.9 23.8 24.5 25.5 28.9 30 33.2 34.5 38.6 39.4 41 42.1 51.6 52.6 11 9.8 5 6.7 9.8 10.1 12.3 11.5 12.3 15.7 16.1 8.8 2 3.2 4 6 4 6 6 8 6 8 10 12 10 12 12.7 3.3 5.5 9.1 11

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

50 18.6 7.5 27.6 35 15 42 30 52.8 29 9.5 32 20 0.02 0.02 0.05 MHZ2-25D 102.7 63 33.6 52 63.6 11 25 10 12 22 36.5 36 30 40 22 21.8 10 20 0.02 0.02 0.05 U V W X Y Z AA AB AC AD AE AF AG AH AJ AK Model 1122+0.043 0 +0.043 0 +0.052 0 +0.052 0 +0.025 0 +0.025 0 +0.030 0 +0.030 0 MHZ2-10D 12.4H9 M2.5 x 0.45 12 19.5 28.2 5.5 M3 x 0.5 6 M3 x 0.5 5.5 2.6 2H9 3 1.5 M3 x 0.5 6 112211221122MHZ2-16D

PFA/PFW

Note 2) Window comparator mode Since hysteresis is 3 digits, separate P1 and P2 by 7 digits or more. 1 digit is the minimum setting unit (refer to the table above). 4 Digital Flow Switch for Air Series PFA How to Order How to Order Display Unit Sensor Unit PFA 30 PFA5 10 02 0 A 0 Mounting Flow rate range Panel mount DIN rail, wall mount A B 1 to 10l/min 5 to 50l/min 10 50 Wiring specifications

VXD21/22/23

Add 10 g for conduit type, 30 g for DIN terminal type, 60 g for conduit terminal type respectively.

MHS

0.5MPa MHSH3 / MHSH3-32DA MHSH3-40DA MHSH3-50DA MHSH3-63DA MHSH3-80DA mm 12 20 25 32 40 MPa 0.20.6 0.10.6 -1060 c.p.m. 60 30 mm 5 5 10 10 15 N 1 45 130 204 335 524 g 530 770 1,330 2,300 4,000 1) 0.5MPa MHSH3-32DB MHSH3-40DB MHSH3-50 DB MHSH3-63 DB MHSH3-80 DB mm 5 5 10 10 15 N 6~10 11~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3-D 430 600 1,020 1,710

Ejector Valve Unit, Series ZYY/ZYX

30 -60 -60 -60 -60 20 20 -40 -40 -40 -40 Suction flow rate Suction flow rate 10 10 -20 -20 -20 -20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) ZY -10S Max. vacuum pressure: 84KPa {630mmHg} Y3 X3 ZY -10L Max. vacuum pressure: 53KPa{400mmHg} Y3 X3

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Recommended flow rate Note) (l/min (ANR)) Internal capacity (cm3) 1.7 Mass (g) ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 1.7 4.3 ZR Metric size Easy installation