Transfer

9 !8 !7 !1 r #5 @3 @8 #6 y u t !5 #7 #8 @6 w !6 e &0 q &0 #4 #3 $8 $0 %9 ^0 #9 $6 $7 %9 !2 #1 !3 $9 %0 %1 !0 @2 @1 #2 ^2 ^5 $5 %2 @5 ^8 $4 ^1 @4 %4 %5 ^7 $3 #0 $2 %6 @7 ^4 o %7 ^9 ^6 @9 %8 ML2BS $1 %3 ^3 !

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

37 28 CRQ2 MSQ MRQ Angle adjustment bolt D202-M3 x 0.5 (Port location: Side ported type only) 24 1 A port B port 18.5 2 60 (69) 29 D-97/93A 15 30 11-5-9 9 Series MSUA These drawings indicate the condition when the B port is pressurized.

SI unit for DeviceNet TM

Instance attribute ID Access rule Description Value 1 Get/Set 1 MAC ID 0-63 2 Get/Set 1 Baud Rate 0-2 3 Get/Set BOI 0-1 4 Get/Set Bus-off Counter 0-255 5 Get Allocation Information 6 Get MAC ID Switch Changed 0-1 7 Get Baud Rate Switch Changed 0-1 8 Get MAC ID Switch Value 0-63 9 Get Baud Rate Switch Value 0-2 10 Set Quick Connect 0-1 1: Set is available in SW mode. -16No.EX-OMO0004-D 3-4

SYJ Series

Note 1 Body Aluminum die-casted White 7 Sub-plate note SYJ700-9-1(-Q) 1/8 Aluminum die-casted SYJ700-9-2(-Q) 1/4 2 Piston plate Resin White 3 End cover Aluminum die-casted White 8 Pilot valve V111(T)4 Piston Resin Bracket Assy SYJ700-19-1A 5 Spool valve assembly Note) Add suffix -Q for the CE-compliant product. 6 Spool spring Stainless steel Mix Installation of the SYJ700 and the SYJ7000

SI Unit

Model No. : EX9-AWTS (M12 connector for socket 10 pieces) Fig. 7-1 EX9-AWTS Note : Tighten the seal caps to the tightening torque specified (0.2Nm). 33 No.EX##-OMY0011-A 8. Dimensions The following figure shows the dimensions of EX260-FPS1. 34 No.EX##-OMY0011-A 9. Troubleshooting 9.1. Troubleshooting Table 9-1 Troubleshooting for network communication No.

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

/code: 1-051 is generated.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

Alarm for Step data Setting condition for step ALM1/code:1-048 is data is not correct. / Refer to the JXC controller generated < Correct set condition > operation manual. (1)Area 1 < Area 2 Input the RESET signal.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

4 1/4 1/4 to 1000 to 1000 to 1000 3 Non-rotating Double Power Cylinder Series MGZ Dimensions with Mounting Brackets Transaxial foot type (L) 4-LD through LY LH LT X/2 X X LS + Stroke Y LX ZZ + Stroke LZ (mm) Stroke range Bore size (mm) LS ZZ X LD Y LH LT LX LY LZ 40 50 63 138 148 165 190 210 236 9 11 13 34 40 47 19 22 24 80 96 110 100 120 140 0 1 3 24 32 36 63.5 75.5 88 to 1000 to 1000 to

MHF2

Note 2) Excluding the auto switch weight 12-3-9 10 Series MHF2 Construction MHF2-8D, MHF2-8D1 q w u !0 !3 !1 !2 !8 !4 @0 @1 o r t !5 y !9 e !7 MHF2-8D2 i !6 Component Parts Note Note No. Description Material No. Description Material Aluminium alloy Hard anodized Urethane rubber q !1 Body Head damper Stainless steel Stainless steel wire w !

MHF2

9 Parallel pin o Cap B Aluminium alloy Clear anodized NBR @0 Piston seal !0 Cap C Urethane rubber NBR @1 Gasket !1 Head damper Stainless steel Nit riding NBR @2 Gasket !2 Rack Replacement Parts Bolts for Body Through-hole Mounting Description Kit no.

Compact Cylinder

M10 x 1.5 74 6.5 16 8 46 5.5 1/8 13 63.5 15 63 10 to 50 41.5 33.5 46.5 38.5 15 18 70 10 M10 x 1.5 88 6.5 16 8 56 5.5 1/8 14 76.5 15 80 10 to 50 49 40 55 46 21 22 89 12 M14 x 2.0 113 9 19 9 70 9 1/4 14 98 19 100 10 to 50 56 46 62 52 21 26 109 12 105.5 M16 x 2.0 134 12.5 22 10 85 9 1/4 19 118 19 7 JCQ Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke end

3

AB B MK MK Basic (mm) MK2T A B C D E F Yh9 G 45 52 64 77 H 16 16 20 20 I 9 9 11 14 J 7 7 8 10.5 K M6 x 1.0 M6 x 1.0 M8 x 1.25 M10 x 1.5 L 10 10 14 18 S 31.5 29 34 34.5 T 10.5 9 11.5 10.5 W 14 15 19 19 X 3 3 3.5 3.5 Z 6.5 6.5 7.5 7.5 AA 4.5 5 7 7 AB 1 1 1 1.4 AC 5.5 5.5 6.6 9 AE 1/8 1/8 1/4 1/4 Model 30 30 37 48 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 0 0.062 0 0.062 0 0.062 0 0.062 49.5 57 71 84

VT317

type Max. number of stations Applicable solenoid valve B mount 20 stations (1) VO317(3) Port location (Direction)/Port size A Exhaust port Symbol Type R P Base (Side) Base (Side) Base (Side) ( ) 1 4 3 8 1 Common (2) ( ) 1 4 3 8 1 4 Base (Side) Base (Side) Base (Side) VV317-02-053-02 3 Individual 1 4 1 4 1 4 Individual exhaust Note 1) For more than 3 stations, supply air both sides of P port

Air Cylinder

38 6 M5 x 0.8 5.5 8 8 M10 x 1.25 18 1/8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to 400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 63 Up to 400

Electro-Pneumatic Positioner Series IP8000/8100

Within 1%F.S. Within 2%F.S. Within 0.75%F.S. Within 1%F.S. Within 0.5%F.S.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

4 3 8 , 1 2 Port size 1 8 1 4 , 1 4 3 8 , Normally Open (N.O.)

A

4 3 3/8 5 3/4 6 1 8 1 1/2 9 2 02 1/4 03 3/8 04 1/2 06 3/4 10 1 14 1 1/2 20 2 T H R E A D T H R E A D 1 Male 2 Female (Only NAMC220, 320, 520 Special Order Only) R(PT)* Remove (N) when ordering N NPT Courtesy of Steven Engineering, Inc. !

3

Wetted parts material Note 5) Non-grease Note 5) Refer to Wetted Parts Piping port size 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 705 g 840 g 1 1/4, 1 1/2 Construction on page 6 for details.

Air cooled Thermo-con (Compact type)

Symbol Terminating resistance FG FG FG Connector Connector Connector shell shell shell 2201/2W + + + 1 1 1 2 2 2 9 9 9 5 SG 5 SG 5 SG Figure1-1 Communication Connection (RS-485) Host Computer Thermo-con RS-232C RS-232C Symbol Pin No.

Fieldbus system PROFINET compatible SI Unit

0 There is an error in unit 8. 1 There is an error in unit 9. 2 Reserved 3 Reserved 3 4 Reserved 5 Reserved 6 Reserved 7 Reserved : The data of diagnostic content: 0 means No error and 1 means Error. -70No.EX-OMY0027 Channel diagnostic information The following is the procedure to confirm on-line diagnostics using the Siemens TIA PORTAL. (1) Select the EX600-SPN [EX600-SPN3/SPN4] from Project