Model: 31 (4.4 m³/min), Input/Output: P (PNP, Input, Output), Power Supply Cable, AC Adapter: Z (w/Power Supply Cable, 10m)

Model: 31 (4400 l/min [ANR]), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 0 (Current Style 4~20mADC), Monitor Output: 3 (Switch Output PNP), Thread: N (NPT), Port Size: 4 [1/2 (3100)], Bracket: None, Cable Connector: N (w/o Cable Connector), Pressure Display Unit: 4 (PSI)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector), End Lock: N (None)

Model: 31, Orifice: 3 (3mm), Style: 0 (N.C., Single Unit), Option: B (C37, Seals: EPDM, Class B), Suffix: Standard, Port Size: 02 (1/4), Thread: T (NPTF), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Non, Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ5000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 10 port sizes available 4/5 PORT SOLENOID VALVE. SYJ 5 port valve manifold. 100.00000 lb. VVD.

Auto switches are integrated as standard.Magnetically coupled rodless cylinder, Low profile guide type, Overall length reduced by 31%, Bore sizes *: 10, 15, 25, Auto switches available RODLESS CYLINDER. CY1F CYLINDER. 6.16900 lb. 585.

Model: 31, Orifice: 1 (1.5mm), Style: 2 (N.O., Single Unit), Option: G (Stainless Steel, Seals: NBR, Class B), Suffix: Standard, Port Size: 02 (1/4), Thread: Rc, Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Surge Suppressor: Non, Rectifier: None (for DC or AC Class H Coil)

Model: 31 (4400 l/min [ANR]), Pressure Range: 1 (0.005~0.1MPa), Power Voltage: 0 (24VDC), Input Signal: 3 (Voltage Style 0~10VDC), Monitor Output: 3 (Switch Output PNP), Thread: N (NPT), Port Size: 4 [1/2 (3100)], Bracket: None, Cable Connector: S (Straight Style 3m), Pressure Display Unit: 4 (PSI)

Model: 31 (4400 l/min [ANR]), Pressure Range: 1 (0.005~0.1MPa), Power Voltage: 0 (24VDC), Input Signal: 3 (Voltage Style 0~10VDC), Monitor Output: 3 (Switch Output PNP), Thread: N (NPT), Port Size: 4 [1/2 (3100)], Bracket: None, Cable Connector: N (w/o Cable Connector), Pressure Display Unit: 4 (PSI)

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

preparation equipment HB HT HC X N A W K 2-Plug H HA CB 2-P (Piping port) Y HP Counter bore depth C 4-counter bore B T T 4-J x E 0 -0.1 L Cylinder tube outer circumference: TC Hard chrome plated + special treatment WP X F GW GP 4-LD D QW PW 2 x 4-MM thread depth M W K G G Q + Stroke Z + Stroke (mm) Model B C CB D F G GP GW H HA HC HP HB HT K J x E A 10.5 181. 16.6 181. 5 33 31.5 32 30 171. 31

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When re assembling, tighten the cover through an extra 2--3+ from the 155,9 OUT 31 ,2 187,0 93,5 :,24.7 original assembled position. 20 63 140,2 IN 28,0 84,1 112.1 168.2 .

Power Clamp Cylinder

size (mm) 50 63 80 XC PA PB PC PD R RA RB RR S V VA VB VC VD VE VF W XA XB 50 45 10 55 45 68 45 48 11 8 30 32 63.5 71.5 12 3.5 78.4 141.8 137.3 92.8 50 45 10 55 52 78 50 54 11 8 30 32 63.5 71.5 12 3.5 78 154.4 150.4 105.3 70 75 15 65 70 108 68 76 15 8 50 50 90 96.5 12 3.5 113.7 197.3 192.8 148.3 199 Series CKZT Dimensions (Clamp Arm: Offset 15) 40 How to Order Right type CKZT40 A015 C S 31

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

B Counterbore depth C T Y 0 -0.1 L Cylinder tube outer circumference: TC WP Hard chrome plated + special treatment X F GW 4 x LD GP D QW PW 2 x P (Piping port) 4 x 3.2 2 x 4 x MM Thread depth M W K Z + Stroke Q + Stroke WP G G 4 x 6.5 12-CY3R6 (mm) A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 K 7 9 14 11 15

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

closed J 4 4 x M4 x 0.7 thread depth 8 (Mounting thread) K cross view (Closed) +0.025 3H9 0 depth 3 +0.043 18H9 0 depth 1.5 44 M5 x 0.8 (Finger opening port) Auto switch mounting groove (4 locations) Width across flats 8 (4 locations) 18.2 M5 x 0.8 (Finger closing port) 4 x M5 x 0.8 (Piston rod thread and rack thread) 5.5 2 x M5 x 0.8 Vacuum port H 7 8.4 16.8 0.5 7 9 7 12.5 8 6 6 O S 15 31

Rotary Actuator

20 Guide tube fitting Aluminum alloy Chromated 21 Pipe Stainless steel 22 Hexagon socket head cap screw Alloy steel Zinc chromated 23 Hexagon socket head cap screw Alloy steel Zinc chromated 24 Spring washer Alloy steel Zinc chromated 25 O-ring NBR 26 O-ring NBR 27 M5 plug 28 Metering valve with silencer ASN2-l 29 Solenoid valve 30 Sub-plate (Left cover side) Aluminum alloy Chromated 31

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Compact type CXSJ 2122CXSJ/ 1112Dimensions / 6 10 9+ST 4-M3 x 0.5 thread depth 3.5 8 2.7 6.7 2-M3 x 0.5 thread depth 3 (Piping port) Steel ball 4.5 15 M3 x 0.5 thread depth 3.5 Vacuum suction port 24.5 25 Note) 11-, 22: Vacuum suction port 12-, 21: Relief port ST 13.4 47+ST 11 1.2 37+ST 5.5 4.5 10+ST 3.8 3.8 11 2.75 M3 x 0.5 x 3L M8 x 1.25 x 8L (Bolt holder) (Hexagon socket head set screw) 31

Coolant Valve

, 20A, 25A K L Pg9 N P Applicable cable O.D. 6 to 8 F (Air operated) J (External pilot solenoid) Pilot port 12(P1) 2 x (Back side 10(P2)) 4 x M 8 1 Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) P1 D S Q E Bracket 15 H A R B C Main port 1(A) [Back side 2(B)] Port size: refer to table below A 63 63 80 90 B 42 42 50 60 K L 52 52 62 72 C 29 29 35 40 M 26 26 31

Steam Valve

(Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 TQ 80 90 50 60 35 44 17.5 22 85 101 93 109 5 6 62 72 31

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D G1/2 45 (42) (44) 31.5 Built-in full-wave rectifier type R C C R E J J E 2 x M depth 5 H 2 x M depth 5 B B1 H G A G A B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting a b d e f g h i j VXS23 1/4, 3/8 21 57 28.5 87.5 35 10.5 22 40 35 10 M5 56 75 2.3 30 6.5 10.5 31