Dedicated Controller I PORTOPORTLOOP SEC mm2/s LABEL PRO Main modes ALM mm/s L C RUN Directs a program operation. Operation mode ACTUATOR & CONSTRUCTION SYSTEM CONTROLLER POWER ALARM STOP JOG Executes a JOG operation. JOG operation mode HOLD /BS UP L R MON Monitors operating condition. Monitor mode DOWN MODE ENT /ESC Directs alarm code display and clear.
Flow velocity (m/s) Calculating the Flow Velocity v = 21.2 x Q/d2 (Symbol) v: flow velocity (m/s) Q: flow rate (L/min) d: piping inner diameter (mm) 626
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.
Basic inertia moment 2 r m I = m : Weight of load (kg) r : Load center of gravity and distance of rotation axis. (m) r m Fig. (12) Inertia moment This shows inertia moment of m (weight) at r from the rotation axis. Calculation of inertia moment depends on the shape of the object.
Internal circuit and wiring example Z/ISE80Output specification -N NPN open collector output type Max. 28 V, 80 mA Residual voltage 1 V or less -P PNP open collector output type Max. 80 mA Residual voltage 1 V or less -S/-R (Analogue output mode) Switch output NPN open collector output type 2 output Max. 28 V, 8 mA Residual voltage 1 V or less R: Analogue output 1 to 5 V Output impedance
R 1/ 4NPT 1/4G 1/ 4 (with M5 male thread) URJ 1/4TSJ 1/ 4 Port size Leak rate 1 x 10 -5Pa. m 3/ s 1 x 10 -10Pam3/s 100kPa 1MPa 100kPa 1MPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Output voltage 1 to 5V Analog output Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive
R Lead wire length 0.5 (2.9) m NPN output Analog output PNP output 27 26 67 Lead wire length 0.5 (2.9) m Lead wire length 0.5 (2.9) m Not required for Nil, vacuum adapter (GN) and vacuum pressure gauge (G).
Foot MounVOlevis Mount . 8 5 Auto Switch Mounting Position Circuit Diagram T r u n n i o n . . . . . . .
~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".
XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.
VX B 1 2 1 2 VX3 A VXA B NL R VN R LED B NL: Neon light R: Resistor LED: Light emitting diode R: Resistor LVC Caution LVA Valve Mounting After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque (0.2 to 0.23 Nm).
Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.
114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B { 28 1C FS 60 3C < 92 5C \ 124 7C | 29 1D GS 61 3D = 93 5D ] 125 7D }
200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/s) V(mm/s) 10 - Step motor (servo 24VDC) Ball screw drive LEFS40 Model 150 to 1200 Stroke [
4 r e !0 !1 q i !2 o !3 y Component Parts No.
0 r e t Polyurethane 10 Steel ball High carbon chrome bearing steel 11 Electroless nickel plated Plug Brass, Stainless steel, NBR Replacement Parts/ Grease Pack 12 O-ring NBR 13 Grease pack part no. Applied unit Piston seal NBR GR-S-005 (5g) Replacement Parts/Seal Kit GR-S-010 (10g) Guide unit GR-S-020 (20g) Bore size (mm) Kit no. Contents GR-S-050 (50g) 6 2 pieces of no. !2 and !
Time [s] ta td tc Acceleration time: ta = Vc / Aa [s] Deceleration time: td = Vc / Ad [s] Acceleration distance: Sa = 0.5 x Aa x ta2 [mm] Deceleration distance: Sd = 0.5 x Ad x ta2 [mm] Distance with constant velocity: Sc = S Sa Sd [mm] Time with constant velocity: tc = Sc / Vc [s] Positioning time: tp = ta + tc + td [s] tp 0 3.5 7.0 10.6 14.1 17.6 oz 70,000 Maximum acceleration/deceleration
) 3 (R) 5 (R) 1 (P) 3 (R) Note 1) Impact resistance: No malfunction resulted from the impact test using a drop impact tester.
92 125 139 11/4 3/4 7 20 2 46 185 0 29 93 60 183 180 144 185 202.5 L dimension 600 700 800 Effective oil level stroke (mm) 50 100 200 300 400 500 CCT63-l 228.5 278.5 378.5 503.5 603.5 728.5 s s s CCT100-l 286 386 511 611 736 836 s s s CCT160-l 399 524 624 749 849 949 1049 s s * Hexagon socket head cap screw is used for mounting.
CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.