48

Metric size*1 Inch size*1 Type 02 2*3 23 3.2*2 04 4 06 6 01 1/8" 03 5/32" 2 Elbow Control type*1 0 Meter-out 1 Meter-in *1 Metric size: Light gray Inch size: Orange *1 Meter-out and meter-in types can be visually identified by the color of the knob. Meter-out: Gray Meter-in: Light blue *2 Use 1/8" tubing. *3 Only polyurethane tubing is applicable for 2.

AR20-B to AR60-B

Example) AR30K-03BE-1NR-B w e V q Body size 20 25 30 40 50 60 Symbol Description V w With backflow function Nil Without backflow function K Note 1) With backflow function + V e Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 V r Port size + a Mounting Nil Without mounting option B Note 3) With bracket H With set nut (for panel mount) + Nil Without pressure

ChemicalThermo-con

2.6 (65) 1.06 (27) 3.9 (100) 5.1 (130) Circulating fluid outlet (1.2 )30)) 12.6 (320) 0.8 (20) 0.8 (21) Terminal block Display panel 6.7 (170) 5.6 (143) 4.7 (120) AL SI 8.5 (215) OUT FG B B A FG + EXT.SENSOR REMOTE ON/OFF 3.8 (97) 3.1 (79) ALARM PURGE OUT PURGE IN SIGNAL Purge inlet (M5) Fluid leak sensor CHEMICAL 3.0 (75) 2.1 (53) POWER COMMUNICATION IN WATER I N O N WATER OUT DC 1.6 (41

Series 10-, 21- AF-A Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size a Mounting Nil Without mounting option B Note 3) With bracket + Option r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

High Pressure Coolant Valve

Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 217 (219) 246.5 (248.5) 282 (284) 301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41

Smooth Vent Valve

Model Valve type Piping size Orifice (mm) Internal External Fitting P.523 For VCR 1.3 x 10-11 XVD2-02V 50 0.2 MPa (G) to 1 x 10-6 5 x 10-9 1.3 x 10-11 Single acting (N.C.) 1/4 3 Main air supply: 4.6 Initial air supply: 0.2 to 4.6 Values at normal temperature, excluding gas permeation to For Swagelok 1.3 x 10-10 P.526 XVD2-02S 522 Smooth Vent Valve (Supply Line) XVD Series RoHS How to Order 02

Piping: 1 (Bottom Direction), Body Color: W (Urban White), Piping Type: Rc, Connection Size: 02 [Screw-in (Port Size 1/4)], Nozzle: 41 (Copper Extension Nozzle 100mm Length, VMG1-08-250-100)

Piping: 1 (Bottom Direction), Body Color: BU (Dark Blue), Piping Type: N (NPT), Connection Size: 02 [Screw-in (Port Size 1/4)], Nozzle: 41 (Copper Extension Nozzle 100mm Length, VMG1-08-250-100)

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 2 Stations

Piping: 20 (Body Ported/Common SUP Common EXH), Stations: 2 Stations

Piping: Base Mounted Common SUP Common EXH, Stations: 2 Stations, A B Port Size: -

Piping: Body Ported/Common SUP Common EXH, Stations: 2 Stations, A B Port Size: -

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 11 Stations, A B Port Size: 01T (NPTF 1/8)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 15 Stations, A B Port Size: 01T (NPTF 1/8)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 16 Stations, A B Port Size: 01T (NPTF 1/8)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 18 Stations, A B Port Size: 01T (NPTF 1/8)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 3 Stations, A B Port Size: 01T (NPTF 1/8)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 4 Stations, A B Port Size: 01T (NPTF 1/8)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: 01T (NPTF 1/8)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 6 Stations, A B Port Size: 01T (NPTF 1/8)