NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

3 Position Cylinder Series RZQ

Model RZQ32 RZQ40/50 RZQ63 Applicable floating joint JB40-8-125 JB63-10-150 JB80-16-200 1218 3 Position Cylinder Series RZQ 32, 40, 50, 63 How to Order RZQ 32 200 100 A M9BW Number of auto switches Mounting bracket Nil A B L F G D Both ends tapped 2 pcs.

Vacuum gripper

152.9 ZP 13 C 152.9 ZP 16 C 153.4 ZP 20 C 154.9 ZP 25 C 154.9 ZP 32 C 155.4 ZP 10 B 156.9 ZP 13 B 159.4 ZP 16 B 160.9 ZP 20 B 164.4 ZP 25 B 164.9 ZP 32 B 169.9 ZP 20 UT 150.9 ZP 16 J 164.9 ZP B25 J 183.4 ZP B30 J 189.9 ZP3P 20 JT2 SF 169.1 ZP3P 20 JT2 SF M 169.1 ZP3P 32 JT2 SF 180.5 ZP3P 32 JT2 SF M 180.5 ZP3P 20 JT5 SF 182.6 ZP3P 25 JT5 SF 186.4 ZP3P 32 JT5 SF 200.9 0 0 Note

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings) With flow rate adjustment (Max

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

R threads after installation Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm D1 Model L1 TPH TPS A H (width across flats) (M5) Applicable tubing O.D. mm Connection threads R Note 1) Weight g D2 M L2 L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21

CRBU

59 -0.005 -0.014 -0.00 -0.043 47.5 50 13 22 17.5 M5 X 0.8 M5 X 0.8 8 5.5 12 M5 X 0.8 1 29 2 43 4.5 42 52 69 8 16 1.2-11 Series CDRBU Auto Switch Specifications Refer to p.2.11-1 for further information on auto switch single body.

E-MY2_E_D

Front view Mounting holes on the top Bottom view T slots on the bottom T slots on the bottom Mounting holes on the top Model Nominal of actuator Thread size Model Nominal of actuator Thread size Effective length 16 M3 16 M3 4 to 5mm E-MY2C E-MY2H E-MY2C E-MY2H 25 M5 25 M5 6 to 8mm 16 M5 16 M4 6 to 7mm E-MY2HT E-MY2HT 25 M8 25 M6 8 to 10mm If T slots on the bottom is used for installation,

3 Position Cylinder Series RZQ

RZQ mounting bolt C CR D 110 135 160 120 145 170 130 155 180 135 160 185 CH Model RZQB32-25RZQB32-50RZQB32-75RZQB40-25RZQB40-50RZQB40-75RZQB50-25RZQB50-50RZQB50-75RZQB63-25RZQB63-50RZQB63-75Mounting bolt M5 x 110l M5 x 135l M5 x 160l M5 x 120l M5 x 145l M5 x 170l M6 x 130l M6 x 155l M6 x 180l M8 x 135l M8 x 160l M8 x 185l 9.5 8 10 8.5 16.5 11.5 3 17.5 12.5 3.5 4 Series RZQ Model Selection

JXCx-OMU0026

Item Decimal Comm Format "Data-SINT" Input 16 [bytes] Output 16 [bytes] Configuration 0 [bytes] (4)(5) (1) 16 (2) 16 (3) -41No. JXC-OMU0026 6.

180

+ 0.052 depth 1.5 0 Positioning pin hole 50 MHZ 16 4 69 26 MHF 86 MHL Auto Switch Mounting Groove Dimensions M5 x 0.8 (Finger opening port) MHR MHK MHS 20 12 MHC M5 x 0.8 (Finger closing port) 32 8 3 4 3 MHT MHY MHY MHY2-20D2 Opening/Closing direction through-hole type MHW 4 x 4.5 through (Hole for mounting attachment) -X 10 -0.005 -0.025 MRHQ 5 9 18 MA (Limted area for mounting attachment

VQ5000

16 13 A 40 53 66 53 66 B A VQ5000 VQ0 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 VQ4 3-Rc 1/2 (P), 4 (A), 2 (B) port VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bottom ported drawing VQZ 16 M5 ground screw VQD SMC 4(A), 2(B)

ML1C

Range (mm) No. of auto switches mounted Applicable auto switch Bore size (mm) 25 6 4 D-M5, D-M5W, D-M5T D-E7A, D-E80A Auto switch model 40 6 4 D-M5, M5W, M5T D-E7A, E80A 32 6 4 10 15 5 10 1 pc. 2 pcs.

LJ1H

A: Stroke + 124 A: Stroke + 32 20 0.02 92 0.02 A 92 92 A Positioning hole 2 x 8H10 4 x T-slot Recommended dimension 8 (Refer to JIS B0952.) 67 Long positioning hole LJ1H30 M8 bolt M8 bolt 30 30 2 x T-slot Recommended dimension 8 (Refer to JIS B0952.)

Antistatic One-touch Fittings Series KA

M5, M6 M5, M6 Soft nylon Polyurethane KAY23-M5 15 9.6 28.5 15.5 M5 0.8 M6 1.0 8 8 8 15.5 19.5 33 3.4 2.9 9 3.2 1 8 KAY23-M6 KAY23-U01 10 17.5 10 KAY04-M5 M5 0.8 M6 1.0 15.5 KAY04-M6 16 18 18.5 8 29.5 4.6 4.6 6 8 10.4 16 4 1 8 KAY04-U01 20 1 4 KAY04-U02 22 34 34.5 15 6.4 6.4 9 14 10 10 18 KAY06-M5 M5 0.8 M6 1.0 16 KAY06-M6 16.5 20 20.5 32 8 4.6 4.6 8 8 17 1 8 KAY06-U01 3 8 KAY06-U03 24 23

ZX

x 0.8 OXY: M6 x 1.0 Vacuum supply port 2-3.3 mounting hole Vacuum pad connecting port OX: M5 x 0.8 OXY: M6 x 1.0 OX: M5 x 0.8 OXY: M6 x 1.0 OX: M5 x 0.8 OXY: M6 x 1.0 13-2-16 16 Vacuum Module: Ejector System Series ZX Vacuum Pressure Switch Unit/Adsorption Confirmation Switch: ZSP1S B Adsorption Confirmation Switch Specifications Small diameter nozzle/0.3 to 1.2 ZSP1-S ZSP1-B Air 20 kPa

modular-press-e

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

Modular F.R.L. Pressure Control Equipment

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

4 Port Solenoid Valve Series VQD1000

Base Mounted Conditions Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Base mounted Series CJ2 Series CM2 Series CM2 Pressure: 0.5 MPa Load ratio: 50% Stroke: 300 mm TU0425 x 1m VQD1151U AS1201F-M5-04 AS2201F-02-04 AN120-M5 Tube bore x Length Series Average speed (mm/s) Speed controller Silencer 6 10 16 20 25 32 40 400 450 500 Perpendicular, upward actuation Horizontal

MIW/MIS

Supply port 2-M5 x 0.8 FC FA FE FH GD GC GB FG FF EB EA D FB B MIS12-10 A C FD GA Model 72 92 112 86.5 106.5 126.5 33 43 53 38.5 48.5 58.5 48 38 28 165 135 105 18 185 155 125 MIS12-30 MIS12-20 19 9.5 6 (Effective depth 3) 4.5 8 -0.1 0 8 -0.1 0 10 M3 x 0.5 5 3.3 23 26 21 MIS20-30 MIS20-20 MIS20-10 52 42 32 11-0.1 0 11-0.1 0 29.5 35 25.5 13 12.5 10 (Effective depth 4) M5 x 0.8 6.5 28.5 7 5.1

Silencer Series AN

Construction/Parts/Dimensions AN05/10/20 AN15/30/40 No hexagonal part in AN05 and AN10 B Dimensions (mm) B Port size R, NPT A B D Model Sound absorbing material (Resin sintered body) AN05-M5 AN10-01 AN15-02 AN20-02 AN30-03 AN40-04 6.5 M5 x 0.8 15 Body (Resin) A 1/8 23 11 A 16 14 1/4 32 Hexagonal flats D 16.5 14 1/4 45 20 17 3/8 58.5 Port size 24 21 1/2 68 2 Silencer Compact Resin Type/One-touch