V100

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 1 2 Flow characteristics 2 3 V100 Valve model C[dm3/(sbar)] 0.037 0.076 0.054 0.099 C[dm3/(sbar)] 0.054 0.099 0.037 0.076 b 0.11 0.070 0.35 0.23 b 0.35 0.23 0.11 0.070 Cv 0.0080 0.016 0.015 0.024

Speed Controller with One-touch Fittings Series AS In-line Type 1

M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D. Metric size Inch size P . 15-11-3 3.2 With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Use 1/8" tube. 23 04 06 08 10 12 01 03 05 07 09 11 13 4 6 8 10 12 Flow Direction Symbols on Body JIS Symbol Symbol 15-9-10

XSA Series

13 XSA-OMS0001-A 4.

PSxx-OMM0006CN

) NPT1/8 (M5 ) C3602() O HNBR 45 g 46 g -62No.PS-OMM0006CN-E (M8(3 )71 ) 01/N01 5 4 M5/C4/C6 M5 5 -63No.PS-OMM0006CN-E W1/WF1 4 ( ISO228-1) -64No.PS-OMM0006CN-E A 01/N01 W1/WF1 -65No.PS-OMM0006CN-E B W1/WF1 -66No.PS-OMM0006CN-E D 01/N01 W1/WF1 -67No.PS-OMM0006CN-E 01/N01 W1/WF1/M5/C4/C6 -68No.PS-OMM0006CN-E + 01/N01 W1/WF1/M5/C4/C6 -69No.PS-OMM0006CN-E 36n +4n -1 -70No.PS-OMM0006CN-E

AMPSeries

37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

AMP

37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2, 3/4 3 Series AMP Model Selection Selection Caution Caution 1.

VPA4

3/8 1/2 Symbol 1 2 M3: 0.6 Nm M4: 1.4 Nm M5: 2.9 Nm 5-3-26 3 Dimensions VPA4150-Bottom ported SA VA SA 4-Rc 1/8 pilot port (5-Rc 3/8, 1/2) 4-9 mounting hole (11) VA (Rc 3/4, 1) VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR VH VHS 5-Rc 3/8, 1/2 (Rc 3/4, 1)

Add to Cart SMC AXT100-DR-12 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $14.38 + Add to Quote Add To Cart Add to Cart SMC AXT100-DR-13

SYJ3000

For manifold type 31, S31, 32, S32 Body option 5 port 3: Common exhaust type for main and pilot valve 0: Pilot valve individual exhaust for the pilot valve (With gasket and screws) D: Push-turn locking slotted type M5: With M5 port sub-plate For sub-plate, manifold type 41, S41, 46, S46 R port P, E port R port P, E port Electrical entry 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC 24, 12, 6,

Exhaust Cleaner for Clean Rooms AMP Series

37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Add to Cart SMC AXT100-DR-12 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $14.38 + Add to Quote Add To Cart Add to Cart SMC AXT100-DR-13

Add to Cart SMC AXT100-DR-12 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $14.38 + Add to Quote Add To Cart Add to Cart SMC AXT100-DR-13

Add to Cart SMC AXT100-DR-12 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $14.38 + Add to Quote Add To Cart Add to Cart SMC AXT100-DR-13

DOC1018150

Tubing size Nylon tube Soft nylon Polyurethane tube tube length If the fluid temperature is 5 or less, the 4,5/32 56or more 44or more 26or more 20or more moisture in the circuit could freeze, causing damage to the seals or leading to equipment malfunction.

Low Profile Slide Table Series MXF

) N 2 ( 1) x 60 28 Possible to use as operating port 2 x M5 x 0.8 Note) N x M5 x 0.8 thread depth 9.5 60 (Insert) 5H9 +0.030 0 depth 5 A 12 8.5 6 78 9 64 15 22 30 33.5 25 51.5 37 5H9 depth 5 +0.030 0 92 NN x 4.2 NN x 8 26 11.5 8.5 H 2 x M5 x 0.8 thread depth 12 5.5 NN x M5 x 0.8 NN 2 ( 1) x H 13 G Section AA A M 12 Operating port 2 x M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number

ø32, ø40, ø50, ø63 Series CVQM Compact Cylinder with Solenoid Valve/ Guide Rod Type

Compact Cylinder with Solenoid Valve/ Guide Rod Type 32, 40, 50, 63 Series CVQM How to Order CVQM 32 30 M9BW 5 M Port thread type 32 40 M5 x 0.8 Bore size 32 40 50 63 Nil 32 mm 40 mm 50 mm 63 mm Rc G NPT 50 63 F N Piping Nil P Standard Axial Cylinder stroke (mm) Refer to the next page for Standard Stroke and Intermediate Stroke.

KFx-OMY0034

Applicable tubing FEP, PFA, Modified PTFE, 2-layer soft fluoropolymer, Nylon, Soft nylon, Polyurethane, Soft polyurethane, Polyolefin, Soft polyolefin, Tubing material Note1) Note2) Antistatic soft nylon, Antistatic polyurethane, Hard polyurethane 4x2.5, 4x3, 6x4, 8x6, 10x7.5 10x8, 12x9, 12x10, 16x13 Tubing size 1/8"x0.086", 5/32"x0.098", 1/4"x5/32" 5/16"x0.236", 3/8"x1/4", 1/2"x3/8" Note1

High Vacuum L Type Valve

M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0019 6.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

WB WA View E GC GA Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface GB Piping port M5 x 0.8 D LY LB LH LZ LX Head cover port location Axial direction (R) NB LT H NA A 2 x LC Mounting hole Y X The overall cylinder length does not change.

3 Port Solenoid Valve Metal Seal Series VZ200 1

Note VZ2000-37A-2 For VZ22 AN120-M5 Noise reduction: 18 dB or more (8 x 17l ) AN110-01 Noise reduction: 21 dB or more (13 x 38l ) Description M5 R 1/8 (2) Silencer Note 1) For body ported type Note 2) For sub-plate mounted type 4-15-1 2 Series VZ200 How to Order Option M5 1 2 VZ2 G 1 Foot bracket F Silencer U Foot bracket + Silencer K Series VZ200 Only body ported type Type of actuation