Plug-in/Plug Lead: Single Unit

Flow Characteristics Series Number of solenoids Weight (kg) Model Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Standard 1 W AC Low wattage 0.5 W b Cv b C[dm3/(s.bar)] C[dm3/(s.bar)] Cv 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 Single VQ51 0 12 35 or less 0.59 (0.67) 0.14 38 or less 2.9 38 or less 14 0.18 3.4 Metal seal 2 position 3 position VQ51 1 16 40 or less 0.58 (0.66) 0.33 43

AIR SLIDE TABLE

Model Thread size Tightening torque Nm MXQ6(A) M60.75 5 MXQ8(A,C) MXQ6B M60.75 5 MXQ12(A,C) MXQ8B M81 12.5 MXQ16(A) MXQ12B M101 25 MXQ20(A) MXQ16B M121 43 MXQ25(A) MXQ20B M141.5 69 Be careful not to hit the table with the wrench when adjusting the stroke adjuster.

Mechanically Jointed Rodless Cylinder Series MY2

4 #1@3@9 Section A-A A MY3A MY3B MY3M A $0 $1 #4 #5 #2 @1 $6 $3 Component Parts No. 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 55 56 57 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 16 17 18 19 20 21 23 24 25 26 27 28 Description Magnet Magnet Seal magnet Rail End spacer Square nut Square nut Spring pin Parallel pin Note Hard anodized Hard anodized Hard anodized Hard anodized Hard

13

ZR Maximum suction flow rate (/min (ANR)) Air consumption (/min (ANR)) Connection (One-touch/Screw-in) Max. vacuum pressure Model Nozzle diameter (mm) (kPa) Body type Weight (g) ZM ZH05B 0.5 Type S Type L Type S Type L Type S/Type L 5 8 13 12 20 23 6/Rc 6/Rc 24 34 46 40 70 78 8/Rc 10/Rc 5 8 13 12 20 23 24 34 46 40 70 78 55 75 95 65 110 150 85 135 185 SUP VAC EXH 28 28 33 66 11 12 16 27 43

Manually Operated Integral Fitting Type/Threaded Type Series LVH

Refer to front matters 42 and 43 for Safety Instructions. Warning Caution LVC 1. Confirm the specifications. Give careful consideration to operating conditions such as the application, fluid and environment, and use within the operating ranges specified in this catalog. 2.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Caution on Using End Lock Type Relation to Cushion Caution Operating Precautions Caution MXH 1. Do not use 3 position solenoid valves. Avoid use in combination with 3 position solenoid valves (especially closed center metal seal types).

Compact Slide Series MXH

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Mounting Caution 1. When tightening threads for compact slide, properly tighten within the specified torque. 2. When mounting a workpiece on the top of the table, do not screw a bolt in more deeper than the female thread (Below table l dimension).

Low Profile Air Gripper Series MHF2

thread) M5 x 0.8 Finger closing port 50 72 2 x M5 x 0.8 thread depth 5.5 (Mounting thread) 26 52 10.6 E 20 20 24 33 E 0 0.1 2 x 4.3 through (Mounting hole) 27 25 25 M5 x 0.8 2 x 7.5 1.2 1.2 Finger opening port E-E Close: 0 +0.1 0 Open: 161 4 x M5 x 0.8 thread depth 5.5 (Mounting thread) 36 8 x M4 x 0.7 thread depth 4 (Attachment mounting thread) Auto Switch Mounting Groove Dimensions 20 43

F/ISE

A CAT.ES100-43 A For General Fluids High Precision Digital Pressure Switch F/ISE ZSE 50 60 50 60 Series High precision/High resolution pressure switch. Applicable for pressure detection with a wide range of fluids, by using a stainless steel diaphragm. Pressure detection for a wide range of fluids.

Soft Start-up Valve AV2000/3000/4000/5000 1

48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 115 98 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77

ARM10/11

G Panel cutout dimensions PPA 23 28 SMC K P C U O S H L AL 28 26(Max.28) Plate thickness: Max.2.1 25 22 Through hole for M3 3.2 42 59.5 73.5 SMC 2 10.5 35 OUT IN 12 14-4-43 26 Series ARM10 Dimensions Panel cutout dimensions ARM10F1-06 08 28 4-R1 or less 28 to 28.5 IN OUT 37 58 34 23 20 Plate thickness: Max.2.1 22 5 15 34 14 31 SMC 62 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

63 VX3 (Max. 50) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112 17-5-55 14 Series LVD Fitting Assembly Procedure Assemble fittings following the procedure shown below.

VXP21/22/23

$%&' 2 0 17-3-43 2 The VX series will be revised shortly. Series VXP21/22/23 Normally Closed (N.C.)

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

P

D16 16 ZP16Dl 18 4 13 11.7 16 7 D25 25 ZP25Dl 28 4 15 15.5 20 10 D40 40 ZP40Dl 43 7 18 24.2 29 17 3.8-59 Series ZP Replacement Parts: Adaptor/Buffer (Series ZPR) The same symbol Construction Without Buffer Replacement of the symbol R ZP 16 A5 UN 04 [Pad model no.]

Series VCL

1/2 (15A) 1/4: 0.42 (0.93) 3/8: 0.40 (0.88) 1/2: 0.49 (1.08) 2.0 (290) 3 VCL3 0.5 (72) 5 (0.20) 14.4 (0.80) 0.2 (29) 7 (0.28) 24.8 (1.38) 0.1 (14) 10 (0.39) 37.8 (2.10) 2.0 (290) 3 (0.12) 6.3 (0.35) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1/4: 0.58 (1.28) 3/8: 0.55 (1.21) 1/2: 0.62 (1.37) 3/4: 0.78 (1.72) 1.1 (159) 4 (0.16) 10.8 (0.60) 2.0 (290) 0.7 (101) 5 (0.20) 4 15.3 (0.85) VCL4 0.3 (43

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZR Maximum suction flow rate (/min (ANR)) Air consumption (/min (ANR)) Connection (One-touch/Screw-in) Max. vacuum pressure Model Nozzle diameter (mm) (kPa) Body type Weight (g) ZM ZH05B 0.5 Type S Type L Type S Type L Type S/Type L 5 8 13 12 20 23 6/Rc 6/Rc 24 34 46 40 70 78 8/Rc 10/Rc 5 8 13 12 20 23 24 34 46 40 70 78 55 75 95 65 110 150 85 135 185 SUP VAC EXH 28 28 33 66 11 12 16 27 43

ZR

Bracket B part no.: P3270154 (Standard accessory) Spacer B part no.: P3270157 Type C2 ZR1-VC2 Type C4 ZR1-VC4 Circuit diagram Circuit diagram PS PE SOL.b SOL.a PE PS Air operated a Pilot air PV PD Release valve Supply valve PV PD V Release valve Supply valve V Manual override Pilot valve Dimensions not indicated are identical to type C1. 13-3-43 43 Series ZR Manifold Specifications/Vacuum

Direct Solenoid

(OptionsT& POnly) ParlNo, Portin9 No. of Ports "xx" sP01 'r 1 %,,NPTFSidE 5 4 1 sP0112 %"NPTFSidE 42 sPot 13 /s' NPTF SidLe (5); %" NPTF Ebtlom 1 0 43 sP0114 Ya" N PTF Bottom 5 44 sP0115 3,6" N PTF Side 5 45 MBA4010-02Y." NPTF Side 2 1 2 MBA40r r -02 %" NPTF Sid; 7." Bottom 1 4 MBA4210-02 %" NPTF Side (2); 7."

Series PF2W Digital Flow Switch For Water

to 24 VDC -1/2 Analog current output 2 x Port size 40 50 6 Sensor Monitor PF2W3 4 x 4.5 Switch output Black Output for PF2W3 4 8 3 7 U Brown DC(+) + 2 6 Blue DC() 1 5 (44.2) White Analog output 12 to 24 VDC Load -1 Analog voltage output Sensor Monitor PF2W2 A 12 to 24 VDC (mm) Black 1 A B + U Output specifications DC(+) Brown 4 2 Output for monitor unit only DC() Blue 42 62 3 2 x 3.4 43