VCC M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm J D side G1/4 port part Tightening torque: 10 1 Nm K G e w q Note) H r q w e Note) e w q Note) F q w E C A U side B D M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm Block Assembly C: 2 port valve manifold block assembly Manifold block assembly for gate valve D: 3 port valve manifold block assembly
: Rc1/8 737 Series ZSE80/ISE80 Dimensions With bracket (Rear ported) ZS-24-A A 30 20 1.6 20 43.2 11.5 55 4.5 40 15 4.5 6.5 20 39.7 View A With bracket (Rear ported) ZS-24-D 30 20 1.6 20 43.2 55 4.5 40 11.5 15 4.2 7.2 7.5 22 39.7 With bracket (Bottom ported) 50 40 30 4 x 4.5 49 43 20 30 20 10 60.5 3.5 2 47 25.2 35.5 16.3 40.3 1.5 738 Series ZSE80/ISE80 2-Color Display Digital Pressure Switch
g) Bore size Stroke 8 12 20 25 32 8 mm 3 110 6 8 MIW8-8D 12 mm 20 mm 5 240 10 12 MIW12-12D 25 mm 650 10 30 20 MIW20-20D MIW 32 mm 1550 20 30 25 MIW25-25D For MIW, same stroke as bore size 2650 35 100 32 MIW32-32D Single finger type/MIS (mm) 62 10 MIS8-10D Bore size Stroke 2 3 80 20 MIS8-20D 8 12 20 25 32 10, 20 mm 10, 20, 30 mm 130 10 MIS12-10D 10, 20, 30 mm 3 5 160 20 MIS12-20D 30, 50 mm
Note) A: Non-locking push type A (projecting) 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 Note 2)4 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Valve size 1 to 4 10 5 Note) Note 2)6 B: Slotted locking type B (tool required) Note 2)7 2 15 Note 2)9 3 20 Note 1) CE compliant: For D or DZ only Note 2) Semi-standard 25 4 1 1 1 2 32 5 1 4 1 2 Nil: Non-locking push type
Caution: Connection of any output to another voltage supply will bridge the safe output switch and cause an undetected error. 20 No.EX##-OMY0004 4.
When the deformed check valve does not return to flat, replace the check valve with a new one. (20) -78No.
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
Table 10-1 specifications EX245-FPS1 EX245-FPS2 EX245-FPS3 (W x L x H) mm 85 x 148.5 x 136 1,100 g 1,200 g 8 128 () 64 (US1) 350 mA 300 mA (US1/US2) XD1/XD2 16 A (US1/US2) 10 A (US1/US2) 24 VDC +20%/-15% <20.4 VDC US1 >21.6 VDC < 17 VDC 6 A 24 VDC +20%/-15% <21.6 VDC : >22.8 VDC US2 / <17 VDC 4 A () 1.2 V US1 US2 4 8 US1 UT1/UT2 24 VDC +20%/-15% 2 A( UT1) 1 A (
Over current protection Output type 3 Voltage output: 1 to 5 V, Extended analogue output range: 0.6 to 1 V Voltage output Analogue output Output impedance Approx. 1 k Output type 3 Current output: 4 to 20 mA, Extended analogue output range: 2.4 to 4 mA Current output Max. load impedance: 300 (at power supply voltage of 12 VDC) 600 (at power supply voltage of 24 VDC) Load impedance Min.
No.EX-OMU0028-D PRODUCT NAME SMC Wireless System EtherNet/IP compatible MODEL / Series / Product Number EX600-WEN# (Base) EX600-WSV# (Remote) Contents Safety Instructions 2 SMC Wireless System Features 10 SMC Wireless System Outline 11 Outline 11 System configuration 12 Base 13 Remote 14 Definition and terminology 15 Assembly 17 Mounting and Installation 20 Installation 20 Model Indication
No.EX-OMW0006-D PRODUCT NAME SMC Wireless System PROFINET compatible MODEL / Series / Product Number EX600-WPN# (Base) EX600-WSV# (Remote) Contents Safety Instructions 2 SMC Wireless System Features 10 SMC Wireless System Outline 11 Outline 11 System configuration 12 Base 13 Remote 14 Definition and terminology 15 Assembly 17 Mounting and Installation 20 Installation 20 Model Indication and
When the deformed check valve does not return to flat, replace the check valve with a new one. (20) -69No.
Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 25, 50, 100, 150, 200 Intermediate strokes are available as a special order. Refer to pages 10 and 11 for cylinders with auto switches.
Refer to pages 20 and 21 for the D-P3DW type.
140 160 180 Timemin. 30 Ambient temperature25 Recirculating fluidGALDEN HT200 Recirculating fluid level180 (At recirculating fluid temp. 25) Cooling water flow rate3L/min Shut out from outside with a lid (styrofoam) Recirculating fluid temperature 25 R 20 15 10 5 Cooling water 25 Cooling water 35 0 -5 -10 Cooling water 10 -15 -20 0 20 40 60 80 100 120 140 160 180 Timemin.
For ISA3-G type, the range is up to 280, with a hysteresis of 20.
Rod and Porting Combinations Combination Bore Size Metric Rod / PT Ports 20 to 100mm Actuated position . Red LED lights up Optimum operating position Green LED lights up Indicator light Metric Rod / NPT Ports (TN Option Only) 20 to 100mm Inch Rod / NPT Ports (TN & X165US Option) 20 to 63mm Use caution during operation as residue may collect on auto switches.
Air Cylinder: Standard Type Double Acting, Single Rod CG1 Series 20, 25, 32, 40, 50, 63, 80, 100 RoHS How to Order 100 CG1 20 N B Z N B 20 Z Bore size 100 CDG1 M9BW With auto switch With auto switch (Built-in magnet) Pivot bracket Made to Order Mounting Nil None For details, refer to page 293. 20 20 mm 25 25 mm 32 32 mm 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm N Pivot bracket is shipped
For ISA3-G type, the range is up to 280, with a hysteresis of 20.
hole NB A BB FX FZ NA F FT S + Stroke Z + Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18 18 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis type (D)/CJ5DS CDH9 +0.030 0 Cdd9 0.030 0.060 NB GA GB Piping port 2-M5 x