Aluminum High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

Electric Actuator

Cable type 5, 6, 7 Cable length [m] 5, 8 Driver type 5 I/O connector Nil Nil Power supply voltage (V) Compatible drivers Nil Without connector Without cable Without cable H S R 2 5 With connector Nil Without driver Standard cable 2 m 5 m A1 A2 B1 B2 C1 C2 S1 S2 LECSA1-S; LECSA2-S; LECSB1-S; LECSB2-S; LECSC1-S; LECSC2-S; LECSS1-S; LECSS2-S; 100 to 120 200 to 230 100 to 120 200 to 230 100

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

0 Driver type*6 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 11LEJS 11LEJS 25Au Vacuum port

AC Servo Motor Driver

Setting retry flag M16 SET Retry counter Retry ABS transfer mode OFF wait timer C2 D7 Retry counter ABS transfer retry control M15 RST Setting ABS transfer retry start flag M16 T2 K1 Retry waiting timer (100ms) Retry flag set T2 Resetting retry flag M16 RST Retry waiting timer M9039 Saving received shift data D110 A0 DMOV PC RUN END 14 46 14.

CV/MVGQ

30 M26 x 1.5 62 20 8 25 135 55 15 M10 x 1.25 34.5 M26 x 1.5 64 20 8 25 137 55 15 42.5 M32 x 2 88 23 10 27 171 75 M14 x 1.5 21.5 Rod Side Flange Style (F) Bore size Stroke CVM5F Manual override Width across flats B2 Width across flats B1 Mounting hole Width across flats NA In the case of 40 Mounting hole S + Stroke ZZ + Stroke In the case of 20 to 32 Eh8 B1 FT FX FY FZ H H1 A AL B B2 C2

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

MXS MXQ Rear trunnion: CBM2T Bore size Stroke -H -R -W N L Bore size Stroke -H -R -W Front trunnion: CBM2U N L MXF TY TD 0.025 0.051 MXW MXP TT ZZ + Stroke Z TT TX MG TZ Z + Stroke ZZ + Stroke MGP (mm) Axial foot Trunnion Clevis Flange MGQ Bore (mm) Stroke range Stroke range Stroke range Stroke range Z ZZ Z CD CX CZ B LC LD LT LX LZ X Y Z ZZ FD FT FX FY FZ L U Z ZZ TD TT TX TY TZ LH LS B C2

LEKF-OMZ0035

Grease application (Seal band part) Motor option Nil With Nil Without option B With lock N Without (Roller specification) Driver type Cable type Size Compatible Power supply Nil Without cable drivers voltage [V] 25 32 40 S Standard cable Nil Without driver R Robotic cable A1 LECSA1-S 100 to 120 (Flexible cable) A2 LECSA2-S 200 to 230 Cable length[m] B2 LECSB2-T 200 to 240 Nil Without cable C2

Electric Slide Table / High Precision Type 《 AC servo motor 》

C2 LECSC2T S2 LECSS2T N2 LECSN2T 92 LECSN2T-9 E2 LECSN2T-E P2 LECSN2T-P -4- 1.1.2 Specification LESYH*(D,R,L)*S2/S3 Motor type S2/S3 Model LESYH16*S2 LESYH25R/LS3 LESYH25DS3 Parallel In-line Stroke[mm] 50,100 50,100,150 50,100,150 Horizontal 8 12 12 Max. work load [kg] Vertical 6 12 10 20 10 20 Force [N] (Set value: 15 to 30%) *1 65 to 131 127 to 255 79 to 157 154 to 308 98 to 197 192 to

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MVG CXW -H -R -W N L Bore size Stroke CXS Single clevis: CBM2C CXT MX MXU MXS -H -R -W N L Bore size Stroke Double clevis: CBM2D MXQ MXF MXW MXP MG Rear trunnion: CBM2T Bore size Stroke -H -R -W N L Bore size Stroke -H -R -W Front trunnion: CBM2U N L MGP MGQ MGG MGC MGF (mm) Clevis Flange Axial foot Trunnion Bore (mm) Stroke range Stroke range Stroke range Stroke range CY1 Z ZZ Z LH LS B C2

Vacuum Unit

Model (Sensor unit: Standard model number) ZK2-PS1-A (PSE541) ZK2-PS3-A (PSE543) Rated pressure range 0 to 101 kPa 100 to 100 kPa Proof pressure 500 kPa Output voltage 1 to 5 VDC Output impedance Approx. 1 k Power supply voltage 10 to 24 VDC 10%, Ripple (p-p) 10% or less Current consumption 15 mA or less Accuracy 2% F.S. (Ambient temperature at 25C) Linearity 0.4% F.S.

•

M5 Modol ~ M6 M8 M5 1M6 M8 M5 M6 M8 M4 IM5 M6 M8 ZPR10g 10 12 12 21 29.9 46 5 6 3 1.7 19 20 i''i: '')I {''::''j ,"i'i 1,;,,1 I 19 1 :P>~2 ZPRIl8 , 20 ZF!R13g 1 3 15 12 21 29.9 46 5 6 3 1.8 '2.~,1 ''2,H 23 22 ZPR13 -,ZPR16g 1 6 18 12.5 21.5 30.' 46.5' 5 6 3.5 1.2 ZPR10 23 22 23 22 22 Deep type (mm) I Model M ,.8 C D E F M:M5xO~J M:M6X1 y G ! G ZPR16 23 22 ZPR20' !

5

Applicable bore size B2 C2 d H2 SNJ-010C 10 11 12.7 M8 x 1.0 4 NTJ-010C 10 7 8.1 M4 x 0.7 3.2 Y-J016C 16 11 16.6 21 M5 x 0.8 SNJ-016C 16 14 16.2 M10 x 1.0 4 Part no. NDd9 NDH10 NX R1 U1 Y-J010C 3.30.030 0.060 3.3+0.048 0 3.2 8 10 NTJ-015C 16 8 9.2 M5 x 0.8 4 Y-J016C 50.030 0.060 5+0.048 0 6.5 12 10 * A knuckle pin and retaining rings are included.

CV/MVGQ

M26 x 1.5 M10 x 1.25 30 55 15 137 25 8 20 64 M26 x 1.5 M10 x 1.25 34.5 55 15 171 27 10 23 88 M32 x 2 42.5 75 21.5 M14 x 1.5 Rod Side Flange Style (F) Bore size Stroke CVM5F Manual override Width across flats B2 Width across flats B1 Mounting hole Width across flats NA In the case of 40 Mounting hole S + Stroke ZZ + Stroke In the case of 20 to 32 Eh8 H1 H FZ FY FX B1 FT B FD AL F A B2 C2

VS 8-2/VS 8-4

463 508 15 490 535 16 517 562 6 5 4 3 2 247 292 220 265 193 238 139 184 L1 L2 VV802 (Size 18 mm) S kit (Serial transmission kit: EX500) Rc, G (According to ISO1179-1), NPTF 1/8" Pilot port M4 x 7 earth thread 2 x Rc, G (According to ISO1179-1), NPTF 3/8" 3(R) port Rc, G (According to ISO1179-1), NPTF 1/8" Pilot exhaust port C1 (M12) 0 0 57.5 82 60 30 1 1 35.5 31.3 22 28.5 34.5 11.3 13.5 C2

Sensor Monitor

. -67No.PS-OMU0012-C Table for each pressure specification Applicable SMC pressure sensor Rated pressure range Display/set pressure range Display/min. setting unit PSE550 0 to 2 kPa -0.2 to to 2.1 kPa 0.001 kPa PSE531, PSE541, PSE561 0 to -101 kPa 10 to -105 kPa 0.1 kPa PSE533, PSE543, PSE563, PSE573 -100 to 100 kPa -105 to 105 kPa 0.1 kPa PSE532 0 to 100 kPa -10 to 105 kPa 0.1 kPa PSE564

Plug-in Unit

arrangement Socket connector pin arrangement Connections Connections 2-2-25 Base Mounted Series VQC VV5QC41 SA1 Kit (Serial transmission kit: EX500) 3(R) port 2-Rc 3/4 1(P) port 2-Rc 1/2 Communication connector C1 (M12 female thread) SMC SMC SMC SMC SMC SMC SMC 101 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 72 0 60 43.5 1 42.7 20.5 15.7 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A Communication connector C2

Sensor Monitor

Table for each pressure specification Applicable SMC pressure sensor Rated pressure range Display/set pressure range Display/min. setting unit PSE550 0 to 2 kPa -0.2 to to 2.1 kPa 0.001 kPa PSE531, PSE541, PSE561 0 to -101 kPa 10 to -105 kPa 0.1 kPa PSE533, PSE543, PSE563, PSE573 -100 to 100 kPa -105 to 105 kPa 0.1 kPa PSE532 0 to 100 kPa -10 to 105 kPa 0.1 kPa PSE564, PSE574 0 to 500 kPa

Multi-channel Digital Sensor Monitor

Cable specification Conductor area 0.15 mm2 (AWG26) Insulator Outside diameter 0.9 mm Sheath Finished outside diameter 4.8 Table for each pressure specification Applicable SMC pressure sensor Rated pressure range Display/set pressure range Display/min. setting unit PSE550 0 to 2 kPa -0.2 to to 2.1 kPa 0.001 kPa PSE531, PSE541, PSE561 0 to -101 kPa 10 to -105 kPa 0.1 kPa PSE533, PSE543, PSE563

Fluoropolymer Piping Equipment

B L1 W M2 B side Inch Size 6 4 Model A side B side B C1 C2 E1 E2 H1 H2 L1 L2 M1 M2 Min. port size W Applicable tubing O.D.

Slider Type Ball Screw Drive/11-LEFS Series

2) Nil Without cable 2 2 m 5 5 m A 10 m Nil Without cable H Without cable (Connector only) 1 1.5 Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Size 25 32 40 Nil Without driver V V V A1 LECSA1-S 100 to 120 V V A2 LECSA2-S 200 to 230 V V V B1 LECSB1-S 100 to 120 V V B2 LECSB2-S 200 to 230 V V V C1 LECSC1-S 100 to 120 V V C2