asilltr

1 .30 1.42 1.54 250 1 . 1 2 1 . 1 6 '1.18 1 . 2 1 1.24 1 . 2 7 1.30 1 .33 '1.40 1.46 1.53 1 .59 '1.72 1.84 2.O9 2.22 300 1 .58 1.63 1 .66 1 . 7 0 1 . 7 4 1 .78 1.82 1.86 r.95 2.03 2 . 1 2 2.2\ 2.38 2.55 2.84 3.01 400 3.10 3.16 3.20 3.26 3.32 3.44 3.50 \r.o I 3.73 3.97 4.20 4.44 4.67 5 . 1 9 Weight sw Dtype {rbs) 056 0.099 0.104 0 . 1 1 0 0.1 17 0.1230.1300.1340.141 0.154 0 . 1 6 3o.172 0.185

Process Pump

(Inch) 1/8" x 0.086" 1/8" 1/8" x 1/16" 3/16" 3/16" x 1/8" 1/2" 1/2" x 3/8" 3/8" 3/8" x 1/4" 1/4" 1/4" x 5/32" Refer to Best Pneumatics No. 7 for further details. 13 Series PB Applicable Fluids Material and Fluid Compatibility Check List for Process Pumps The data below is prepared based on data provided by the material manufacturers.

80

110 VAC 1.6 D 200 VAC K L M N P Q R S T U V W 1.6 E 230 VAC 2.3 M5 Z Other voltages 3.2 Brass 1.6 2.3 1/8 For other special options, refer to page 462.

EXxx-OMV0017-D

software again. 1.

EXxx-OMN0035CN

EX600-DX B M12 (5 )4 8 C M8 (3 )8 8 P PNP C1 M8 (3 )8 8 N NPN D M12 (5 )8 16 E D-sub (25 ) 16 F (32 ) 16 M12 (4 ) EX600-DXB No. 1 LED 2 () 3 4 5 () -17No.EX-OMN0035CN-A EX600-DXC No. 1 LED 2 () 3 4 5 () EX600-DXD No. 1 LED 2 () 3 4 5 () -18No.EX-OMN0035CN-A EX600-DXE No. 1 LED 2 () 3 4 D-sub (No.4-40 UNC) 5 6 () EX600-DXF No. 1 LED

Clean Regulator/Fluororesin Type

Body size 1 3 5 Nil X401 Standard Rotating the mounting hole 90 Pilot port thread type Integrated fittings (LQ2) Nil N Rc 1/8 NPT 1/8 Applicable tubing size (O.D. x I.D.)

Process Valve

2.5 2.6 1 4 1 5.7 5.8 32 Symbol Valve type Type 4.1 4.2 1 2 1 N.C.

Power Valve: Economy Valve Series VEX5

N Port 2 (A),1 (P) Port size A Model E F G H I J L M P R T U B C D K N O Q S Port 3 (R) VEX5510 VEX5511 160 50 25 10 7 25 173 80 60 98 Center 1 2 3 4 , , 1 1 2 3 4 60 150 79 70 53 13 18 100 2 x M6 Thread depth 9 116.5 , ,1 25 VEX5710 VEX5711 177.5 167.5 84.5 90 60 30 15 7 190.5 54.5 100 60 13 105.5 103.5 18 4 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1,1 1 c Bracket mounting dimensions g Grommet

ZSE F/ISE

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when workpiece is vacuumed. Min.B: Maximum pressure value when workpiece is not vacuumed.

IR1000/2000/3000

IRM 10 3 G Copper-free Specifications 2 Set pressure and quantity External and internal copper parts are changed to stainless steel or aluminum. 0.2MPa setting 1 to n pcs. 0.4MPa setting 1 to n pcs. 0.8MPa setting 1 to n pcs. 0 1 2 Standard part number 20 Note) Contact SMC if equipped with pressure gauge.

1

6 1/8 1/4 3/8 Internal External Female thread (Rc, NPT) XSA1 1 x 106 1.3 x 109 1.3 x 1011 XSA2 XSA3 Face seal fitting Compression fitting Female thread (Rc, NPT) 1 Normal Close High Vacuum Solenoid Valve XSA Series *1 *1 Excluding grommet/AC How to Order Face seal fitting Compression fitting XSA 2 1 1 2 S 5 G Face seal fitting Compression fitting 1 1 1 P 5 G XSA 2 Female thread type Female

3

1 !2 q w e r t y !1 !0 o i u Component Parts No.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASN M5 Nil U10/32 01 02 03 04 AQ N ASV AK Needle Valve/Flow Characteristics Note) The flow characteristics are representative values.

PFxx-OMS0001CN

PFMC 7 7 A*8 8 501 5~500L/min 2 102 10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06 3/4 OUT1 OU2 *5 A NPN NPN M SI*6 B PNP PNP 5 C NPN (1~5V) SI D NPN (4~20mA) 6:L/min:L E*2 PNP (1~5V) F*2 PNP (4~20mA) 1 G*2 NPN *3 M8(3m)*4 H*2 PNP *3 2 3 N M8 *4 / ZS-40-A M8 3 m ZS-42-A PFMC7501/7102 (M352 ) ZS-42-B PFMC7202 (M352 ) -10No.PF-OMS0001CN-A M8 1

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

P . 15-11-3 15-9-2 2 Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS How to Order 2 2 0 01 06 S AS 1F Nil Option Body size 1 2 3 4 M3, M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard None With seal Hexagonal lock nut Electroless nickel plated S K N If more than one option is required, write option part numbers in the order of S, K, N.

48

Metric size*1 Inch size*1 Type 02 2*3 23 3.2*2 04 4 06 6 01 1/8" 03 5/32" 2 Elbow Control type*1 0 Meter-out 1 Meter-in *1 Metric size: Light gray Inch size: Orange *1 Meter-out and meter-in types can be visually identified by the color of the knob. Meter-out: Gray Meter-in: Light blue *2 Use 1/8" tubing. *3 Only polyurethane tubing is applicable for 2.

VNB

on page 17-1-15.

Compact Guide Cylinder

n n Plate material A Aluminum alloy F Carbon steel Auto switch Nil Without auto switch (Built-in magnet) Bearing type M Slide bearing L1 Ball bushing For applicable auto switches, refer to the table below. 1 For bore sizes 16 and 32 only Piping port location Nil Top/Side ported P1 Top ported Bore size 12 12 mm 32 32 mm 16 16 mm 40 40 mm 20 20 mm 50 50 mm 25 25 mm 1 For bore sizes 12 and

A

type) Body size 1/4 3/8 1/2 3/4, 1 20 30 40 50 Thread type Indicator light/Surge voltage suppressor Rc G NPT Nil F N None With surge voltage suppressor (grommet type only) With indicator light/surge voltage suppressor (not possible with grommet type) Nil S Z Port size Electrical entry 1/4 (AV2000 only) 3/8 (AV3000 only) 1/2 (AV4000 only) 3/4 (AV5000 only) 1 (AV5000 only) 02 03 04 06 10 G:

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

How to Order VHS 4 5 1 0 01 Paint color Nil X1 Standard color Handle, body: Red With locking holes Pressure relief 3 port valve Optional specifications Body size Flow direction: Right Left R 4 5 1/2 1 JIS Symbol (A) 2 Port size Double action 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Thread type 3 (R) 1 (P) Nil F N Rc G NPT OSHA standard (Occupational Safety and Health Administration Department of