Rated Flow Range: 60 to 6000 l/min, Thread Type: NPT, Port Size: 1 1/2, Output Specifications: Out: NPN; Func: Analog Current Output <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 60 to 6000 l/min, Thread Type: NPT, Port Size: 1 1/2, Output Specifications: Out: PNP; Func: Analog Current Output <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: SI Unit Only, Calibration Certificate: Made to Order

Rated Flow Range: 60 to 6000 l/min, Thread Type: F [G (ISO 1179-1 Compliant)], Port Size: 1 1/2, Output Specifications: Out: PNP; Func: Analog Voltage Ouput <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: SI Unit Only, Calibration Certificate: Made to Order

Rated Flow Range: 60 to 6000 l/min, Thread Type: NPT, Port Size: 1 1/2, Output Specifications: Out: PNP; Func: Analog Current Output <-> External Input, Lead Wire: w/o Lead Wire and M12 Connector, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 60 to 6000 l/min, Thread Type: F [G (ISO 1179-1 Compliant)], Port Size: 1 1/2, Output Specifications: Out: PNP; Func: Analog Current Output <-> External Input, Lead Wire: w/o Lead Wire and M12 Connector, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 60 to 6000 l/min, Thread Type: F [G (ISO 1179-1 Compliant)], Port Size: 1 1/2, Output Specifications: Out: PNP; Func: Analog Current Output <-> External Input, Lead Wire: w/o Lead Wire and M12 Connector, Unit Specification: SI Unit Only, Calibration Certificate: Made to Order

DIGITAL FLOW SWITCH. O24. 1.28000 lb. SENSOR, DIGITAL AIR FLOW.

Rated Flow Range: 06 (60 to 6000 l/min), Thread Type: N (NPT), Port Size: 14 (1 1/2), Output Specifications: DS (Out: NPN; Func: Analog Current Output <-> External Input), Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: M (SI Unit Only), Calibration Certificate: A (Made to Order)

Rated Flow Range: 60 to 6000 l/min, Thread Type: NPT, Port Size: 1 1/2, Output Specification: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Lead Wire: w/o Lead Wire and M12 Connector, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 60 to 6000 l/min, Thread Type: NPT, Port Size: 1 1/2, Output Specification: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Lead Wire: Lead Wire and M12-M12 Connector, 3m, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 06 (60 to 6000 l/min), Thread Type: N (NPT), Port Size: 14 (1 1/2), Output Specification: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Lead Wire: N (w/o Lead Wire and M12 Connector), Unit Specification: M (SI Unit Only)

Rated Flow Range: 06 (60 to 6000 l/min), Thread Type: N (NPT), Port Size: 14 (1 1/2), Output Specification: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Lead Wire: Q (Lead Wire and M12-M12 Connector, 3m), Unit Specification: M (SI Unit Only)

Rated Flow Range: 06 (60 to 6000 l/min), Thread Type: N (NPT), Port Size: 14 (1 1/2), Output Specification: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series], Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: M (SI Unit Only)

AU

Refer to pages 14-21-3 and 14-214 for Safety Instructions and Common Precautions. Piping Warning Port size 1. When making drain exhaust piping, use piping with bore size 8 or larger than 8. Length should be shorter than 5 m. Do NOT pipe upwards.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Note 2) 2 x 3.5 through M5 x 0.8 32 0.5 15.5 25 6 Rod end nut 9 Flat washer 5 9.2 10.5 4 4 10 15.5 27 + Stroke 14 25 8 4 41 + Stroke 16 17.5 5 Note 2) 2 x 2 x 6.5 counterbore 2 x 2 x M4 x 0.7 effective depth 7 2 x M5 x 0.8 (Piping port) M5 x 0.8 (Relief port) 5.5 2 x 3.5 through 38 M6 x 1.0 0.5 20 29 8 Rod end nut 10 Flat washer 11.5 6 12 4

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 11-/22-MXP6-5 W AA H 7 4 depth 2.5 2.5 11.2 2.3 3.5 1 3 4 x M3 x 0.5 depth 3 +0.030 0 D B 0.05 9.5 1 3.5 20 14 13 18 C 6 +0.030 0 depth 2.5 2.5 Width across flats 6 E 5 6 5 Prepared hole diameter 3.3 2 x M4 x 0.7 Piping port 2 x M3 x 0.5 (Plug: M-3P) F QL 6 13.5 17 Stroke: S M 2 0.05 M4 x 0.7 Mounting base side B D 7 5 2 x M3 x 0.5 Piping

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators J 12 Maximum 14.5 (With stroke adjuster at retraction end) I 7.5 8 15 15 14 14 12 6.5 6.5 Vacuum suction port Rc, G, NPT1/8 12 25 6.5 K NA x M6 x 1 thread depth 6.5 25 KA Stroke adjuster at extension end Stroke adjuster at retraction end 6 18 46.5 (With stroke adjuster at extension end) N x M5 x 0.8 thread depth 10 (Insert) 6 x M5 x 0.8 thread

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

P (Rc, NPT, G) H2 Width across flats B2 2 x NN G Relief port M5 x 0.8 G H1 Width across flats B1 Standard port I Relief port 2 x Eh8 D MM AL A F K NA N N H S + Stroke F ZZ + Stroke (mm) ZZ S P N I E D A 12.5 11 10 10 13 F Bore size Stroke range AL K MM NA NN G H2 41 32 32 26 B2 H H1 22 17 17 13 B1 0 6 6 5 8 8 8 50 45 45 41 200 to 1000 150 to 1000 150 to 700 150 to 700 21 19.5 19.5 15.5 14

Coolant Valve

3 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Symbol A: Non-locking push type A (projecting) N.C. 0.5 MPa N.O. 1 MPa N.C. 1 MPa 4 1 6A 8A 10A 10A 15A 20A 25A 32A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz 7 Valve size 1 5 6 24 VDC 12 VDC B: Slotted locking type B (tool required) 7 240 VAC 50/60 Hz 15 (11) 2 Semi-standard For other rated voltages, please consult with SMC. 20 (14

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

(Normally open) B Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 Electrical entry 04 CE-compliant 06 10 12 14 20 TL D T G Grommet Conduit terminal DIN terminal Conduit terminal with indicator light SYJ (32A) 1 4 1 (40A) 1 2 1 VQZ TS (50A) 2 Symbol Internal pilot Conduit terminal with surge voltage suppressor TZ Conduit terminal