Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

8 22 8 15 80 18 M6 x 1 20 40 36 M26 x 1.5 124 13 10 70 41 41.6 3 16 11 29 10 16 92 23 M6 x 1 26 50 46 M32 x 2 150 13 TF TN Nil P (Piping port) ZZ X W TT Model 12-REA25 12-REA32 12-REA40 50 Rc1/8 30 NPT1/8 137 G1/8 17 50 Rc1/8 40 NPT1/8 156 G1/8 19 60 Rc1/4 40 NPT1/4 182 G1/4 22 12-REA50/63 0 L0.2 33 B 2 x 4 x V Effective thread depth 16 2 x P (Piping port) 14 14 8 (R) D X Q Q 14.5 22 I 2

S

Model End Plate Mounted Housing Mounted NCX2H15 * 0.2 ~ 2in/sec NCX2H25 0.2 ~ 1.6in/sec 0.2 ~ 4in/sec Deflection x 10-3 inch Stroke (Inch) Stroke Inch Model Load (lb) Model Load (lb) 2 4 6 8 4 8 NCX2N10 2 2.8 NCX2N10 0.5 2.4 11.8 NCX2N15 6 3.2 11 NCX2N15 1 3.5 8.7 14.7 39.4 NCX2N25 13 0.8 3.2 H O W T O O R D E R NCX2 S E R I E S S L I D E U N I T NCX2N25 2 12 3.5 6.3 9.8 Note) Values are

PROFINET Compatible Fieldbus System

Select SI unit MAC address for assigning IP address. -33No.EX-OMT0009 (6)[Edit Ethernet Node] will be displayed with GW unit MAC address.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Note 6) When the current output is selected.

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

80 85 90 95 100 105 60 65 70 75 80 85 73 78 83 88 93 98 16 to 25 Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2 x P through A1 H E 4 x T counterbore 0.5 B S Z (mm) S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0

IDUS/IDFS

Inlet air temperature 35C Outlet air pressure dew point 10C Ambient temperature 35C Inlet air pressure 0.5MPa Air flow 1200 l/min (ANR) Inlet air temperature 55C Outlet air pressure dew point 10C Ambient temperature 35C Inlet air pressure 0.7MPa Air flow 350 l/min (ANR) Condition Condition A = 0.75 based on conditions q, w and e 1 1 B = 0.95 based on conditions q, w and e C = 1.00 based on

Stainless Steel Heat

6 Series IDUS/IDFS Option Specification Refer to pages 1 and 5 for "How to Order" of options.

VNH

R S T U V VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 202.5 232 267 286.5 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 x 8 7 x 10 9 x 12 9 x 12 20 24 24 70 92 109 17-4-34 5 Series VNH High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Precautions

ZCUK

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Air Suction Filter With One-touch Fittings Series ZFB 1

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Recommended air flow Tubing size Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Unrestricted 360 piping tube mounting. The connector for the IN side is a universal joint type that enables a tube to be connected in any direction within 360.

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"i."}Jsr-ot "I r Rod Cross Section, Z + 2 X S T R O K E nod Cover Head Cover Spring Extend/Double Clevis Type (D) nc'rzxo I &:i6iFl-{st'irr.el r q @ f l * I trB Al Bod Cross uNrT rNcH (Mrvr) 010 (318") I Osilttr SERIES NCDJ2 Auto Switch Guide Applicable cylinder bore size (mm) 6 1 0 Mounting 1 6 Band mounted type Grommet Reed Switch P 4 7 -.lHlr Solid State Auto Switch D-H7A1, D-H7A2, D.H7B

NVZseies

I I ll-.Y (gmmm) * Lead wire ,.6> i?!

VZM400

6 !0 PE PE e !5 w !3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !

3 Position Cylinder Series RZQ

5.5 6 6.5 RHC 12 11 10 12 RZQ D-A79W 13 14 14 16 D-F7 (V) D-J79 (C) D-F7W (V) D-F7BA (V) D-F7NTL D-F79F 6 6 6 6.5 D-X D-P4DW 5 5 5 Individual -X Since the operating range is provided as a guideline including hysteresis, it cannot be guaranteed (assuming approximately 30% dispersion).

Turntable Cylinder Series MGT

0.05 0 6 WB Z WA XX section T groove dimensions QQ section detail drawing Notch spring force adjustment bolt 4-OA through L 4-MM depth ML QQ section 22.5 4-OB counter bore depth OL B-NN depth NL XX section Z WA Q 45 RA X0.02 RB RC T VB U X PW VA H NL HB HA: T groove for hex. bolt XAH7depth XL DB 2-P GB GA GC 6+0.05depth 6 o PB K J G (Plug) 30 S PA + Stroke C + Stroke FA FB SB SA FC B + Stroke

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

"i."}Jsr-ot "I r Rod Cross Section, Z + 2 X S T R O K E nod Cover Head Cover Spring Extend/Double Clevis Type (D) nc'rzxo I &:i6iFl-{st'irr.el r q @ f l * I trB Al Bod Cross uNrT rNcH (Mrvr) 010 (318") Osilttr I SERIES NCDJ2 Auto Switch Guide Applicable cylinder bore size (mm) 6 1 0 Mounting 1 6 Band mounted type Grommet Reed Switch P 4 7 -.lHlr Solid State Auto Switch D-H7A1, D-H7A2, D.H7B

3 Way,3 Port Solenoid Valve NVZ Series

I I ll-.Y (gmmm) * Lead wire ,.6> i?!

AS-FPQ/AS-FPG

Note 2) For AS121FP AS-FPG/Stainless steel 304 AQ Release button color: Light blue Flow Rate and Effective Area ASV AS121FP-M5 4 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model AK 4 6 4 6 8 6 8 10 10 12 Tubing O.D.

VER2000/4000

Subsonic flow at P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P (P2 + 0.1013) Sonic flow of P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area [mm2] P: Amount of pressure drop P1 P2 [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Cylinder stroke (st/mm) Applicable area Unapplicable area Outlet pressure (MPa) Outlet pressure

AP10PA

w q w q 1) Refer to gauge guide (P.1058) for gauge specifications.