Actuator Position Sensor

IO-Link mode Brown (No.1) L+ Black (No.4) C/Q Main circuit IO-Link White (No.2) master Blue (No.3) LAnalogue output (white) is disabled when the IO-Link mode is selected.

MGJ

Miniature Guide Rod Cylinder 6, 10 Series MGJ How to Order 6 10 F8N Miniature Guide Rod Cylinder MGJ Miniature Guide Rod Cylinder Number of auto switches 2 pcs. 1 pc. Nil S Bore size 6 10 6 mm 10 mm Auto switch type Nil Without auto switch (Built-in magnet) Cylinder stroke (mm) Refer to the following table q and w. Select the applicable auto switch from the table below.

21- AF-A 10- Series Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size Option a Mounting Nil Without mounting option B Note 3) With bracket + r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Series 12-REA Sine rodless cylinder

Caution 6. Special tools are necessary for disassembly. 6. Apply additional tightening when remounting the head cover after disassembly. When disassembling, hold the wrench flat section of one head cover with a vice, and remove the other cover using a spanner or adjustable angle wrench on its wrench flat section.

76

(For air ow capacity, refer to the Data E below.) 5 Options Refer to page 9. 6 Finalize the model number. Refer to page 2. 7 Select the optional accessories. Refer to page 10.

AMPSeries

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

AMP

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7

VND

Refer to page 17-6-3 for Safety Instructions and Solenoid Valve Precautions. External Pilot Adiabatic Space Caution Caution Piping of pilot port (P1, P2) P1 and P2 piping should be as follows according to the model. There is a space between body and cover (: approximate 1 mm) for adiabatic effect.

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Information

Note 4) q Ambient temperature: 25C, w Circulating fluid temperature: 20C, e Rated circulating fluid flow rate, r Circulating fluid: Clear water, t Facility water temperature: 25C Note 5) Use a 15% ethylene glycol aqueous solution if operating in a place where the circulating fluid temperature is 10C or less.

Compact Guide Cylinder End Lock Type SeriesMGP

M8 x 1.25 16 21 97 140 20 12.5 55.5 32 32 50 4 4.5 3 6 M8 x 1.25 16 22 97 102 140 20 6 11 49 40 40 66 5 6 4 8 M10 x 1.5 20 24 50 106.5 118 161 25 9.5 21 64 50 80 5 6 4 8 M10 x 1.5 20 24 63 106.5 118 161 25 4.5 16 59 63 End lock mechanism dimensions MGPL (ball bushing)/A, DB, E dimensions (mm) (mm) E A HN (Max.)

Miniature Regulator Series ARJ310

5 q u o Material Note Parts list !

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Note 6) For options: E1, E2, E3, E4. This product is for overseas use only according to the new Measurement Law. (The SI unit is provided for use in Japan.) Note 7) : For thread type, NPT only.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Note 6) For options: E1, E2, E3, E4. This product is for overseas use only according to the new Measurement Law. (The SI unit is provided for use in Japan.) Note 7) : For thread type, NPT only.

Vacuum Saving Valve

Pad side q u Description Component Parts Material Surface treatment No.

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Option: 2 (Manual Override), Lead Wire Length: 6 (600mm)

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Option: 2 (Manual Override), Lead Wire Length: 6 (600mm)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Option: 2 (Manual Override), Lead Wire Length: 6 (600mm)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Option: 2 (Manual Override), Lead Wire Length: 6 (600mm)

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Option: Manual Override, Lead Wire Length: 600mm, CE Compliant: -