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4 y q u i !5 !8 r w o e !6 !3 !9 !2 t Component Parts Component Parts Description Material Note Description Material Note No. No.

ZQ-OM01301

ZQ-OM01301-A Vacuum pump system Model of a single unit ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3)(4) (5) (6) (7) (8)(9)(10) (1) Body type (6) Vacuum pressure switch unit specifications U For single unit Nil Note 4) With unit selection function M For manifold M Fixed SI unit (kPa) P Note 4) With unit selection function (2) Solenoid valve combination (Initial value: psi) K1 Supply valve (N.C

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Use after putting the unit label other than l/min, l. r Unit display/Orange e OUT1 CH r t y u Displays the selected channel. Channel display/Red t u UP button ( button) Use to change the mode or to increase the set value.

Compact Cylinder with Lock Series CLQ

U Q P Front cylinder port P Rear cylinder port H effective thread depth C F V I D M E 22 11 Z T Minimum lead wire bending radius 10 Auto switch D-A7, A8 Dust cover (manual unlocking unit) 4-OA counter bore N 4-OB counter bore BP unlocking port (unlocks when pressurized) K Flat washer 4 pcs.

Cylinder with Lock Series MNB

0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

Series AS-FM/AS-M/ASD-FM

Material 1 2 3 4 5 6 7 8 9 10 NBR Body A U-seal PBT NBR Elbow body U-seal PBT Black POM, Stainless Note 3) Handle Cassette PBT Note 1) Electroless nickel plated NBR Body B Seal Brass Electroless nickel plated NBR Body B O-ring Brass Electroless nickel plated NBR Needle O-ring Brass Electroless nickel plated NBR Seat ring O-ring Brass Electroless nickel plated NBR Needle guide O-ring Brass

Air Cylinder CLA Series Fine Lock Model

Static Load) Pressure Lock-u O The above listed kinetic energy corresponds to a load lactor of 5070 at 5 kgf/cm, and piston speed ol 3oomm/sec from viewpoint of practical application of load.

Air Pilot Operated Series NVSA

DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

Digital Flow Switches, Series PF2A, Series PF2W

Number of pins Connector size Manufacturer Applicable series UP Button ( Button) Output (OUT1) Indicator: Green U P Use this button to increase a set value. Correns Corporation VA-4D Lights up when OUT1 is ON. Blinks when an overcurrent error occurs on OUT1.

Compact Cylinder with Air Cushion and Lock Series RLQ

TH Rear cylinder Port TP w e r t q u i y w e r t q u i y Approx. Max. T1 Approx. Max. T1 Approx. Max. T2 Approx. Max. T2 Approx. T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.

5 Port Solenoid Valve Series SV

To find the ending cylinder speed (u), follow arrow from your stroke length ("L") to the dotted line representing the load ratio (d%) then down to the ending cylinder speed (u).

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

3 220VAC50/60Hz [230VAC50/60Hz] "U" type is only available for 24VDC and 12VDC.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

(mm) 10 10 A8 M8 x 1 10 to 16 13 13 A10 M10 x 1 20 to 32 16 16 A14 M14 x 1 40, 50 20 20 25 25 Vacuum entry 32 32 40 B5 40 M5 x 0.8 50 50 Pad material N NBR Pad type S Silicon rubber F Ball joint U Urethane rubber F Fluoro rubber GN Conductive NBR GS Conductive silicon rubber 20 and larger are manufactured upon receipt of order.

Rotary Cylinder Series MRQ

i gl m n u a m 0 nt a e M dj m us t 19 ax e im gl u an m t ad en ju m st Friction fittings Note) Can be adjusted 5 at the rotating ends.

Precautions 1

ZZ Z U S RR QY Q NN Bore size (mm) 20 25 32 40 142 133 14 62 9 14 19.8 M20 x 1.5 146 137 14 62 9 14 22 M26 x 1.5 148 139 14 64 9 16 25.8 M26 x 1.5 188 177 18 88 11 16 29.8 M32 x 2 Rod Side Trunnion Style (U) CVM5U Bore size Stroke CV MVGQ Max. 21 Min. 18 Manual override Width across flats B2 Width across flats NA Width across flats B1 S + Stroke ZZ + Stroke (mm) MM K I HX H1 H F Q D Eh8 B2

90

t OUT IN i o Basic type (Knob): IR30l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR30l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 800 Precision Regulator IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR10l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole for hexagon panel nut 42 25 Bracket (Option) ARX

0.5

Red flashes if the CPU is abnormal. q w e r t y u Green lights up when emitters require cleaning.

1

25 JCmM25 (Rod end male thread type) 32 JCmM32 (Rod end male thread type) JT40 40 JCmM40 (Rod end male thread type) Operating range Center of sphere *1 Make sure to use a cylinder with a built-in cushion mechanism. e 2 g n a r U U g Center of axis in at r 2 e p O Operating conditions How to Order Operating pressure Pneumatic cylinder: 0.7 MPa or less Mounting Basic JT 20 Operating temperature

Integrated Controller

Dimensions [mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S S2 T T2 U CV V X2 Y Without lock With lock 25 15 to 100 136.2 121.7 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 58.1 115 113.6 1 66.3 57.8 144 184 32.2 101 to 400 161.2 146.7 32 20 to 100 153.6 135.1 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1 10 60 70.8 142 140.3 2 83.5 69.8 144 189 39.1 101 to 500 183.6 165.1

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

10-/21-AR20-B30-B: Max. 3.5 10-/21-AW40-B: Max. 5 AR50-B/60-B 10212 x P1 (Port size) A BB Pressure gauge (Option) C H K IN OUT B Q AA Applicable tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount P1 P2 A B Note 1) C D Q R S T U V W Y Z F J K AA BB H