Compact Slide Series MXH

Mounting: Vertical Selection conditions Mounting: Horizontal Max. speed: 500 mm/s Load eccentricity: 50 mm Overhang: 30 mm Load mass: 0.1 kg Max. speed: 500 mm/s DOverhang: 40 mm Load mass: 0.1 kg -X Individual -X Refer to Graph (3) based on vertical mounting and a speed of 500 mm/s.

Compact Guide Cylinder Series MGQ

(Refer to page 338.) 348 Compact Guide Cylinder Series MGQ Bore Size 32 to 100: MGQM, MGQL 4 x YY depth YL X W + Stroke Z 4 x MM depth ML 4 x NN through 2 x P DB DA R H V T PW GB GA 2 L F C + Stroke G TB TA S Q K J B + Stroke E MGJ A + Stroke MGP MGQM, MGQL Common Dimensions (mm) P PW Bore size (mm) 32 40 50 63 80 100 Standard stroke (mm) B MGQ C DA F G GA GB H J K L MM ML NN Q R S TN TF

CUJ

auto switch Built-in magnet Basic style (Through type) Mounting style B Bore size Number of auto switches Nil S 6 8 10 2 pcs. 1 pc. 6 mm 8 mm 10 mm M9 includes one auto switch.

Series VCL

B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U

0.

VQZ100 VQZ100-S-01(R) (-Q)Note) Note) For AC voltage valves there is no S option. It is already built-in to the rectifier circuit. 01 02 VQZ200 VQZ200-S(-Q) Caution 02 03 VQZ300 VQZ300-S(-Q) Thread type Note) R indicates external pilot type. Except VQZ100, external pilot type and internal pilot type are common.

Air Fittings & Tubing

D1 Port B min. port size Weight (g) a b H (Hex.)

ZSM1-115/121

How to Calculate the Set Value A = Max. pressure value in auto preset mode B = Tentative min. pressure value in auto preset mode P1 = A (A B)/4 P2 = B + (A B)/4 Manual adjustment is possible after finishing in the auto preset mode. Ex.) When an error count (number of the failure predict) (EC) is set to be 3.

Vacuum Gripper

TQ1230001-OM102-B 2.

LV50-OMQ0002

(at 80 mA load current) Response time *5 *7 0.25 s/0.5 s/1 s/2 s/5 s Outputprotection Short circuit protection Output Mode Select from Hysteresis mode, Window comparator mode, Accumulated output mode or Accumulated pulse output mode Response time*6*7 0.25 s/0.5 s/1 s/2 s/5 s Analogue output Voltage output Output voltage: 1 to 5V (Output impedance approx. 1k) Current output Output current

RQ

Hs A B A B Proper Auto Switch Mounting Position Auto Switch Mounting Height D-A7H D-A80H D-F7 D-A7H, A80H D-A73C, A80C D-F7, F7V D-F79F, J79 D-J79C, F7W D-F7WV, J79W D-F7BAL, F7BAVL D-J79W D-F7BAL D-F79F D-F7NTL D-F7V D-A7 D-A80 D-A73C D-A80C D-J79C D-A79W D-F7WV Bore size (mm) D-A7, A80 D-A79W D-F7NTL Bore size (mm) D-J79 D-F7W D-F7BAVL Hs Hs Hs Hs Hs Hs 20 A B A B A B A B 25 20 32 25 31.5

Vacuum Filter AFJ Series

Note 2) The seal is for 40 m and 80 m elements. 784 Vacuum Filter AFJ20 to AFJ40 Series Dimensions AFJ20 N T J M D U Bracket (Option) S SP R ZCUK C B V Q IN OUT AMJ AFJ AFJ 2 x P (Port size) AMV ZH -X185 Related Products Clearance for maintenance G A AFJ30, AFJ40 N T J D M U Bracket (Option) S R C V Q IN OUT 2 x P (Port size) B Clearance for maintenance G A E Model Standard specifications

Vacuum Gripper

ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12 12 14 ZP25B ZP 32 B ZPG32B-7A-X2 14 15 15 18 ZP32B ZP 20 UT ZPG20UT-7A-X2 4 4 4 4 ZPT1-A6 ZP2-20UT ZP 16 J ZPG16J-7A-X2 8 8 8 9 ZPT2-7A-X2 ZP2-16J ZP B25 J ZPGB25J-7A-X2 14 15 15 18 ZP2-B25J ZPT3-7A-X2

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

Guide Cylinder Series MGG

Features 2 Guide Cylinder 20, 25, 32, 40, 50, 63, 80, 100 Series MGG How to Order MGG L B 32 100 C73 Guide cylinder Number of auto switches 2 pcs. 1 pc. "n" pcs. Nil S n Bearing type Slide bearing Ball bushing M L Auto switch type Mounting type Nil Without auto switch (built-in cylinder magnet) Basic Front mounting flange B F Refer to the table below for auto switch models.

LFE-OMY0008

0.5 s/1 s/2 s/5 s 6 7 0.25 s/0.5 s/1 s/2 s/5 s 15 V 1 k 420 mA 600 2 (4 7 2 /6 11 ) 5 / 12 DC24 V10 45 mA () 64 No.LFE*-OMY0008 LFE1 LFE2 LFE3 9 IP65 050 () 3585R.H.() CE RoHS PPSFKM 3/8(10 A) 1/2(15 A) 3/4(20 A) 1(25 A) () 8 340 g 400 g 520 g 680 g 166 [] 20L/min 3(69 []) 4OFF (2 5 ) 5 100 (24 5 100 500 9.5 ) 563% 663% 0.25s0.5s 0.05s 7(69 []) 8 9M12 10DC(-)/+ 65 No.LFE

Electro-Pneumatic Positioner

Cable connector (option) 63 (S type: 39) L1=101 (S type: 77) Part name Part number Suited cable outer diameter 7 to 9 Resin-made cable clamp unit (A) P368010-26 M8 x 1.25 9 to 11 Resin-made cable clamp unit (B) P368010-27 M8 x 1.25 Actuator main shaft Actuator main shaft Side mounting with the fork lever assembly M Side mounting with the fork lever assembly S Cable connector G1/2 Exploded

Title not found

Cylinder Bore Sizes (in inches) Valve Type Cv Type* 34 1 118 112 2 214 212 3 314 4 6 Micro-Line 0.11 SA F S S LTV 0.18 SA,DA F F F F M M M M S S Nova 1.00 SA,DA F F F F F F F M M Duramatic 0.18 SA,DA F F F F M M M M S S Duramatic 0.63 SA,DA F F F F F M M M M Capsula 0.75 SA,DA F F F F F F M M M Capsula 3.17 SA,DA F F F FT-1, FC-1 0.13 SA F F M S 4B-1, 4W-1 0.48 SA,DA F F F F M M M S FC51,

Title not found

Cylinder Bore Sizes (in inches) Valve Type Cv Type* 34 1 118 112 2 214 212 3 314 4 6 Micro-Line 0.11 SA F S S LTV 0.18 SA,DA F F F F M M M M S S Nova 1.00 SA,DA F F F F F F F M M Duramatic 0.18 SA,DA F F F F M M M M S S Duramatic 0.63 SA,DA F F F F F M M M M Capsula 0.75 SA,DA F F F F F F M M M Capsula 3.17 SA,DA F F F FT-1, FC-1 0.13 SA F F M S 4B-1, 4W-1 0.48 SA,DA F F F F M M M S FC51,

FSQ seies

olageis24VDCafdsdua s$krwtageB4t L@d slbge lhm $ith b 0N = Porer lo lage Blsiiul volS x 2p6 = 24V _ 4,4 r 2Fs Erairre Loan impEdai* s 3K) ad sn lch leaks& sreil b lnA Load vofrage whs sdibi s oFF = Lea GSe 0urflt r 2p.s x Load impelame = lfiiA x hcs r 3Nf, -6V Contact Protection Box lnte Inslallauto switch in the following manner Box InlernalCircuil "trl -i*f l # : r * , i f f : i " S:#__

Air Cylinder RSQ Series Stopper Cylinder

olageis24VDCafdsdua s$krwtageB4t L@d slbge lhm $ith b 0N = Porer lo lage Blsiiul volS x 2p6 = 24V _ 4,4 r 2Fs Erairre Loan impEdai* s 3K) ad sn lch leaks& sreil b lnA Load vofrage whs sdibi s oFF = Lea GSe 0urflt r 2p.s x Load impelame = lfiiA x hcs r 3Nf, -6V Contact Protection Box lnte Inslallauto switch in the following manner Box InlernalCircuil "trl -i*f l # : r * , i f f : i " S:#__