Stations: 3 Stations, Piping: U Side: Closed; D Side: Open, Thread Type: G, Supply Unit Components: w/Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 0.5 to 4 L/min, Return Unit Components: w/o Flow Adj.

Stations: 3 Stations, Supply/Return Unit Layout: U Side: Open; D Side: Open, Thread Type: NPT, Supply Unit Components: w/Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 5 to 40 L/min, Return Unit Components: w/Flow Adj.

Stations: 3 Stations, Supply/Return Unit Layout: U Side: Open; D Side: Open, Thread Type: G, Supply Unit Components: w/Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 5 to 40 L/min, Return Unit Components: w/o Flow Adj.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

PF-OMN0009_C

1. 2. 3. 4

AMPSeries

8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

PF2D

Note 3) The system accuracy when combined with PF2D5.

AMF

Description AFF SGP-E: SS400 Filter case w Cover q Element SS400 AM Replacement Parts Misc. Model AMF800 AMF801 AMF900 AMF901 AMF1000 No. Description Material NBR 63271 63271 63271 3 pcs. 63271 3 pcs. 63271 5 pcs. Element r Packing e 63148 63148 63148 3 pcs. 63148 3 pcs. 63148 5 pcs. Drain NBR O.D. 112 x I.D.90 x T3 1 pc. O.D.112 x I.D.90 O.D.112 x I.D.90 x T3 3 pcs.

AMR3000 to 6000

211 277 321 B 260 298 366 432 T 9 9 11 11 S 8 7 10 15 R 78 97 98 115 P 50 35 45 46.5 AL 1 4, 3 8 1 4, 3 8 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 103 121 131 161 10 10 70 70 264 302 370 436 100 120 130 160 180 210 246 290 AMR3000 AMR4000 AMR5000 AMR6000 1 4, 3 8, 1 2 1 4, 3 8, 1 2 1 2, 3 4 1 2, 3 4 3 4, 1 3 4, 1 Adapter

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Note 2) For the type set to 0.2 MPa only, repeatability will be within 3 kPa. Note 3) Mass shown is for product without any options.

AMD

Description SGP-E, SS400 Filter case w Cover q AFF SS400 Replacement Parts AM Model AMD800 AMD801 AMD900 AMD901 AMD1000 No. Description Material Misc. Element NBR 63174 63174 63174 3 pcs. 63174 3 pcs. 63174 5 pcs. Element r Packing e 63148 63148 63148 3 pcs. 63148 3 pcs. 63148 5 pcs. x T3 O.D.112 x I.D.90 O.D.112 x I.D.90 NBR O.D112 x I.D90 x T3 3 pcs.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Note 2) For the type set to 0.2 MPa only, repeatability will be within 3 kPa. Note 3) Mass shown is for product without any options.

Pneumatic Purification

60 2-1/2 NPT 174 R134a 680 3 1/2 PDE180-S 654 5.7 6.2 23.6 78.7 55.1 19.7 19.7 460/3/60 2-1/2 NPT 174 R134a 790 3 1/2 PDE200-S 742 6.2 7.0 23.6 78.7 55.1 19.7 19.7 460/3/60 FLANGE 3 150 174 R134a 890 3 3/4 PDE260-S 1007 7.5 8.5 23.6 78.7 55.1 19.7 19.7 460/3/60 FLANGE 3 150 174 R134a 990 5 PDE310-S 1200 7.8 8.8 23.6 78.7 55.1 19.7 19.7 460/3/60 FLANGE 3 150 174 R134a 1060 5 PDE410-S 1483

Slide Tables MX Series

Recommended pneumatic circuit Air slide table W 2.Be sure to use meter-out speed control valves. 3.To release end lock manually (be sure that air pressure is released), push down the lock piston pin with a screw driver, and slide the table in the release direction.

Refrigerated Air dryer Series IDU/IDF

Note 3) Option "T" is not available for IDU6D, 8D-4 and -6.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2

VXF

LVN TI/ TIL VXF 2150 1 G 00 PA Electrical option Model Port size Nil S L Z 3 4 3 3 ' 4 PAX 2150 2160 2280 5', ! ! !'+ PB Rated voltage Electrical entry !!" # $ %&"'(" )* +"" # $ %&"'(" )* 1 2 3 4 5 6 7 8 9 !"" # $ %&"'(" )* !

AFF

-3) Model AFF75A No.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !

EX510-GMJ1.eng

DA DB DG SLD FG Yellow White Shield Blue Drawing 3 (3) The terminal resistor to connecct differs depending on a cable to use at CC-Link system. Refer to table below.