EXxx-OMY0006CN

SI No. 1 COM M OUT 1 COM 0V 2 3 P OUT 1 Zone 1 4 SOL 0 0 Zone 1 ON Zone 1 11 SOL 7 7 Zone 1 ON 12 P OUT 2 Zone 2 13 SOL 8 8 Zone 2 ON Zone 2 20 SOL 15 15 Zone 2 ON 21 P OUT 3 Zone 3 22 SOL 16 16 Zone 3 ON Zone 3 29 SOL 23 23 Zone 3 ON 30 N. C. N.

High Vacuum L Type Valve

Refer to Chapter 3, Product Specific Precautions 3 (P. 7 to 8) and Chapter 5, Construction and Dimensions (P. 11) for maintenance parts. Parts with the indication of "Maintenance part" can be replaced. 4. SMC specified parts should be used for service. Refer to the Construction / Maintenance parts table. 5.

CJ2Q

Bore d C B H NTJ-015A 10 16 8.1 9.2 7 8 3.2 4 M4 X 0.7 NTJ-010A M5 X 0.8 * Refer to p.1.3-12 for details of the mounting nut. (mm) ND NN Bore 10 16 A B C D F GA GB H MM NA NB S Z 0 0.022 0 0.022 15 12 14 4 8 8 5 28 M4 X 0.7 12.5 9.5 M8 X 1.0 46 74 75 8 15 18 20 5 8 8 5 28 M5 X 0.8 12.5 9.5 M10 X 1.0 47 10 Refer to p.1.3-8 to 1.3-10 for dimensions of each mounting bracket.

Compact Cylinder Series NCQ8

Consult with your P/A sales representative. Note 3) Stroke will be reduced by 0.06" for rubber bumper type. *Combination of body options (CM) is available. Note 1) With switch is available on strokes 025(1/4") and greater.

l

A44 PLC Terminal conduit 12V 100V, 200V Relay, PLC DIN terminal P P P P P P A59W F59 F5P J51 J59 Diagnostic indication (2 color) Grommet p p p p 3 wire (NPN) 5V, 12V 24V IC 3 wire (PNP) Grommet P P P P 100V, 200V 2 wire 12V P P G39 K39 5V, 12V 3 wire (NPN) IC Terminal conduit 12V 2 wire P P P P P P P P P P F59W F5PW J59W F5BA F5NT F59F Relay, PLC p p p p p p 3 wire (NPN) 5V, 12V IC Diagnostic

Intrinsically Safe Valve

(A)4 2(B) (A)4 2(B) Locked position Number of solenoids Single 1 (P) (EA)5 3(EB) 1 (P) (EA)5 3(EB) LOCK 2(B) (A)4 2(B) (A)4 Double PUSH (EA)5 1 (P) 3(EB) (EA)5 1 (P) 3(EB) Caution How to Use Plug Connector When operating the locking type D with a screwdriver, turn it gently using a watchmakers screwdriver. [Torque: Less than 0.074 lbfft (0.1 Nm)] Caution 1.

CQM

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (KB) D-A7/A8 Auto switch KA A + Stroke B + Stroke W L S EA EB EC M J 2 x 2-OA 2 x 2-RA Both ends tapped style (CQMA) (mm) Without auto switch With auto switch Stroke range (mm) Bore size (mm) P P EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33

VVX31/32/33

G <& C D, T G, C S L, Z S L, Z 8 8 8 8 8 8 8 8 8 8 8 8 T 9 '01 !" % % :"; % %%& !" % % :; S Note) 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) How to Order Manifold Arrangement of solenoid 9= Write both the base part number and the solenoid valve to be mounted or blanking plate part number. !"

Slider Type Ball Screw Drive/11-LEFS Series

LECSB2-S 200 to 230 V V V C1 LECSC1-S 100 to 120 V V C2 LECSC2-S 200 to 230 V V V S1 LECSS1-S 100 to 120 V V S2 LECSS2-S 200 to 230 V V V Note 1) The motor and encoder cables are included.

CXS

piping (6, 10) Nil Nil TN TF Standard piping Axial piping Thread type Nil Port location 6 to 25 M thread Rc 1/8 NPT 1/8 G 1/8 P Port location 32 CXS P 6 M 50 F9BW J S Number of auto switches Compact type Nil S n 2 pcs. 1 pc. n pcs.

CXS

Axial piping Thread type Nil Port location 6 to 25 M thread Rc 1/8 NPT 1/8 G 1/8 P Port location 32 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CXS P 6 M 50 F9BW J S Number of auto switches Compact type Nil S n 2 pcs. 1 pc. n pcs.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

0 Driver type*6 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 11LEJS 11LEJS 25Au Vacuum port

CC

Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) MI W S CEP1 CE1 CE2 No load No load Load ratio Load ratio ML2B C J G5-S Bore size (mm) Bore size (mm) Bore size (mm) CCVL10/11/12/13 4.

MQQ

to 1000 mm/s (Refer to page 10-5-7.) (3) Piston speed H (High speed/High frequency type) 5 mm/s to 3000 mm/s (Refer to page 10-5-7.)

MQQ

to 1000 mm/s (Refer to page 10-5-7.) (3) Piston speed H (High speed/High frequency type) 5 mm/s to 3000 mm/s (Refer to page 10-5-7.)

Air-hydro Unit

Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load No load No load Load ratio Load ratio Load ratio Load ratio Bore size (mm) Bore size (mm) Bore size (mm) CCVS30/31/32/33 CCVL20/21/22/23 CCVL02 Piping bore Piping bore Piping bore Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load

LG1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Lead screw type Ground ball screw Rolled ball screw Slide screw P N S Motor output 100W 2 Power supply voltage 100/110VAC (50/60Hz) 100/115VAC (50/60Hz) 200/220VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor 1 The tables above show the definition for each symbol only and cannot be used for actual model selection. 2 0

Fluoropolymer Piping Equipment

Drain 861 Needle Valve /Bore Through Connector /High Purity Fluoropolymer Tubing LVN/LQHB Series/ / / TL TIL TD TID TH TIH Needle Valve P.938 Tubing O.D. Metric Size Inch Size 6 4 Size Series Appearance 8 10 12 1/8" 3/16" 3/8" 1/2" 1/4" 2 Needle valve LVN 3 LVC 4 LVA Note) Basic size With reducer LVH Bore Through Connector P.941 LVD Tubing O.D.

3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

VQ

Refer to p.2.9-15 for How to Order for DIN rail.