M Series

Brass + Electroless nickel plating Gasket M3 PVC M5 NBR, Stainless steel 304 Part name Part No.

PFxx-OMX0002

to 6000 L/min 120 to 12000 L/min Instantaneous flow 30 to 3150 L/min 60 to 6300 L/min 120 to 12600 L/min Set point range Accumulated flow 0 to 999,999,999,990 L 0 to 999,999,999,900 L Flow specifications Instantaneous flow 2 L/min 5 L/min 10 L/min Minimum resolution Accumulated flow 10 L 100 L Accumulated volume per pulse (Pulse width = 50 msec.)

3

Sensor Flow range 0.5 L/min 2 L/min 5 L/min 20 L/min 40 L/min 250 L/min 140 L/min 100 L/min 350 L/min 0.5 L/min 4 L/min PF3W704 PF3W504 0.35 L/min 5.5 L/min 5.5 L/min 0.35 L/min 2 L/min 16 L/min PF3W720 PF3W520 1.7 L/min 1.7 L/min 22 L/min 22 L/min 5 L/min 40 L/min PF3W740 PF3W540 3.5 L/min 3.5 L/min 55 L/min 55 L/min 10 L/min 100 L/min PF3W711 PF3W511 7 L/min 7 L/min 140 L/min 140 L/min

CA2

CX CZ U 9 f K A N F N S + Stroke H L h + l CJP C B ZZ + Stroke Z + l + Stroke Z + Stroke RR ZZ + l + Stroke CJ2 Double clevis and double knuckle joint types are packed with pins and snap rings.

Air Cylinder Series CA2

CJP CX CZ U K A N F N h + l S + Stroke H L C B Z + Stroke RR ZZ + l + Stroke CJ2 ZZ + Stroke Double clevis and double knuckle joint types are packed with pins and retaining rings.

Refrigerated Thermo-chiller

Note 10) Mass in the dry state without circulating fluids. 80 Thermo-chiller Series HRZ Cooling Capacity HRZ001-L/002-L/004-L/008-L HRZ001-H/002-H/004-H/008-H 16 10 9 HRZ008-L HRZ008-H 14 Cooling capacity (kW) Cooling capacity (kW) 8 12 7 HRZ004-H 10 HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products 6 HRZ004-L 8 5 4 6 HRZ002-L 3 4 HRZ002-H 2 HRZ001-L 2 1 HRZ001-H 0 0 20 10 0 10

PFxx-OMU0002

3150 L/min 60 to 6300 L/min 120 to 12600 L/min Set point range Accumulated flow 0 to 999,999,999,990 L Instantaneous flow 2 L/min 5 L/min 10 L/min Flow Minimum resolution Accumulated flow 10 L 100 L Accumulated volume per pulse (Pulse width = 50 msec.)

HRS100/150

Cable size Crimped terminal on the rated current thermo-chiller side HRS100-Al-20-l HRS100-Wl-20-l 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 4 cores x 5.5 mm2 (4 cores x AWG10) (Including grounding cable R5.5-5) R5.5-5 30 A M5 HRS150-Al-20-l HRS150-Wl-20-l 40 A 4 cores x 8 mm2 (4 cores x AWG8) (Including grounding cable R8-5) R8-5 A HRS100-Al-40-l HRS100-Wl-40-l 3-phase 380 to

48

LEL25MT-100l-l LEL25MT-200l-l LEL25MT-300l-l LEL25MT-400l-l LEL25MT-500l-l LEL25MT-600l-l LEL25MT-700l-l LEL25MT-800l-l LEL25MT-900l-l LEL25MT-1000l-l LEL25LT-100l-l LEL25LT-200l-l LEL25LT-300l-l LEL25LT-400l-l LEL25LT-500l-l LEL25LT-600l-l LEL25LT-700l-l LEL25LT-800l-l LEL25LT-900l-l LEL25LT-1000l-l With motor cover 272.5 372.5 472.5 572.5 672.5 772.5 872.5 972.5 1072.5 1172.5 292.5 392.5

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Standard piping type Centralized piping type Operating direction Operating direction Side Front Side Front L R L R L L L R L R R R R R R R L L L L L R L L L Back New Back R R R Bottom Bottom Port variation Port variation R and L can be mounted in any desired position.

ASP

fitting Needle Valve/Flow Characteristics ASP330F ASP430F 400 200 3 6 Flow rate (l/min (ANR)) Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) 300 06 07,08,09 2 4 200 100 1 2 100 0 0 0 5 10 0 5 10 Number of needle rotations Number of needle rotations ASP530F ASP630F 1500 1000 14 Flow rate (l/min (ANR)) Inlet pressure : 0.5

Compact Cylinder with Lock Double Acting, Single Rod Series CLQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order CLQ B F D 30 40 30 40 M9BW CDLQ D F B With auto switch With auto switch (Built-in magnet) Made to Order Mounting style Refer to page 817

CLS M5 x 0.8 Rc NPT G 1/8 1/4 Unlocking port size Symbol Specifications CLQ 1/8 M5 x 0.8 XA 1/4 Change of rod end shape 157 245 402 629 982 1559 2513 3927 Holding force (N) (Maximum static load) XC35 With coil scraper (40 to 100 only) RLQ Equivalent to 0.5 MPa Note) Be sure to select cylinders referring page 812.

Digital Gap Checker ( compatible)

Hysteresis Hysteresis mode Variable from 0 7 Window comparator mode Withstand pressure 600 kPa Detection nozzle 1.5 8 Current flow 5 L/min 12 L/min 22 L/min Power supply Used as switch output device 24 VDC10% with 10% voltage ripple or less voltage Electric spec.

VZS

DOZ is not available. 2 9 Other Option Electrical entry 3 position closed center G: Grommet Lead wire length: 300 mm L: L plug connector With lead wire LN: L plug connector Without lead wire LO: L plug connector Without connector D: DIN terminal 3 3 position exhaust center 4 M: M plug connector With lead wire MN: M plug connector Without lead wire MO: M plug connector Without connector

1

How to Order Air Output Port: KBV, KBZ (P. 15-2-113) 1 04 KB 1 V Elbow Module: KBV Elbow Socket Module: KBV T Connection thread Applicable tubing O.D. 4 Model Model Model Tube size/ Connecting female thread size Body size KBV1-04 KBV1-06 KBV2-06 KBV1-M5 KBV1-M6 KBV2-M5 M5 x 0.8 M6 x 1 M5 x 0.8 M6 x 1 6 KBV2-08 KBV3-08 8 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 1 8 Rc Branch Elbow Module

KK/KK13

H L M L (mm) H Width across flats Body size Weight g Effective area mm L H Width across flats Min. bore M Applicable hose I.D.

Thermo-chiller

Total hardness [mg/L] 200 or less Ammonium ion (NH4+) [mg/L] 0.1 or less Calcium hardness (CaCO3) [mg/L] 150 or less Residual chlorine (Cl) [mg/L] 0.3 or less Ionic state silica (SiO2) [mg/L] 50 or less Free carbon (CO2) [mg/L] 4.0 or less Iron (Fe) [mg/L] 1.0 or less Reference item In the case of [Mcm], it will be 0.003 to 0.01.

CM2

auto switch DM2 C H L 40 F A J H7BW 150 Number of auto switches Bore size Rod boot 2 pcs. 1 pc. n pcs.

HRX-OM-Z002

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Reference Sulfide ion [mg/L] None should be detected None should be detected item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40