Rotary Table: High Precision Type

Rotating angle Applicable Symbol Rotating angle 90 90 o Single vane 180 180 o Rotation adjustment range Single vane: Both ends +/5o each Electrical entry/Lead wire length Nil Grommet/Lead wire: 0.5 m L Grommet/Lead wire: 3 m Vane type Z Grommet/Lead wire: 5 m S Single vane C connector/Lead wire: 0.5 m CL connector/Lead wire: 3 m CN connector/Without lead wire * Applicable only with R73, R80

MXS Series Air Slide Table

10,20,30,40,50,75,100 10,20,30,40,50,75,100,125 10,20,30,40,50,75,100,125,150 10,20,30,40,50,75,100,125,150 Stroke adjuster/shock absorber option BS BT With shock absorber at extension end* With shock absorber at retraction end* *Shock absorber option is not available for MXS6 52 Air Slide Table MXS Series Construction/Parts list, Seal list 3 6 8 9 br bs bt bp 7 2 1 bl bk bq 4 bm bn bo 5 ck cp cm cn

Battery-less

10 2 x 5 14.5 0.2 0.2 24 +0.033 0 26H8 ( ) 114.2 3 3 127 133 240 (Motor cable entry: Basic type) 230 (Motor cable entry: Entry on the left side) Dimensions [mm] 5H8 ( ) depth 5.5 24 Model H1 H2 H3 LER50 16 5.5 15.5 LERH50 26 15.5 25.5 +0.018 0 2 x M10 x 1.5 x 20 2 30 163 Controllers JXCm Series For details, refer to page 182 and onwards.

Cylinder with Lock

CH CN d3 EN ER (Max.) EU G1 G2 G3 (Max.)

LEC-OM02904

1.1 . 2 1.2 . 3 1.3 . 4 1.4 . 5 1.5 . 6 1.6 . 9 1.7 . 10 1.7.1 . 10 1.8 . 11 1 1 1 1 1.1 LECSSLECSS-SSCNET SSCNET50m TM USBMR Configurator2 LECS-262144pulse/rev 1 2 1 1.2 (1) LECSSDC D C P 1 P 2 P ( ) N ( ) ( 1 ) MCCB MC U U L 1 ( 2 ) 2 V V L 2 M W W L 3 CHARGE TR ( 3 ) B1 RA L 11 B DC24V L 21 B2 CN2 LEC-MR-J3BAT MR-J3BAT USB D/A CN4 I/F ( ) CN1A CN1 B CN5 CN

Compact

dimensions T-slot B dimensions LXSH _ B .150 6 I 370 277 277 8 47 65 $efie$ [)( tleclnh Arlualors 0inol|$im$ Slido $ffi||l Iy0[ LxsHnsE E;IEI9' With brake Brake electrical circuit verro*,14\ I Y"tto*ld Without brake Nole) Conlact protecUon circuit i5 rcquired when connecting F-Ms Thread 10 Deep F/2 l)xc 25 t\rotor Photo micro sensor wire(3oomm) [ ] shows lhe localion al which ongtn pornr sw cn

ZP

H2 H2 L1 M1 M1 M1 D Pad side Pad side Pad side ZP2V-A01ZP2V-AN1ZP2V-A5ZP2V-A8ZP2V-AG1Vacuum generator side D Vacuum generator side M2 M2 L3 L2 H1 Vacuum generator side L2 L33 H1 M2 H1 (L4) (L4) No.0.8 No.0.8 (L4) No.0.8 H2 H2 L1 L1 L1 H2 M1 M1 M1 Pad side Pad side Pad side ZP2V-B01ZP2V-BN1ZP2V-BG1ZP2V-B5ZP2V-B61 The place at the vacuum generator side where the tool is applied. 2 The place

Series AP500

Vespel is a registered trademark of DuPont. 19 Intermediate flow (Tied-diaphragm) Two Stage Regulator for Ultra High Purity Series AP2700 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity to 150 slpm (NF3) to 900 slpm (H2) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Minimizes supply pressure effect by

KR

Bulkhead Connector: KGE Effective area (1) (mm 2) H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

Digital Flow Switch

Hysteresis [ H2] and [the current set value] are displayed in turn. Press the or button to change the value. Press the button to set. [F 2] Setting of OUT2 completed.

Title not found

eteFout and meterin types cn be visua y diflerentiated by the lock nd. The lock nut on lhe fieter-aul type is electroless n|ckel plated, while he meter-in type is btack z nc chromale plaled. Note 3) O[,4arking is electroless nickel plated, provLded as standard.

CLK1

LOCK Clamp cylinder with lock Cylinder with lock (Series CN) Clamped locking B A SOL.C SOL.B SOL.A W LOCK Able to maintain an unlocked state Assembly and maintenance simplified Port positions can be selected to accommodate mounting conditions Positions of ports, by-pass piping and auto switch rails can be changed. (Refer to ordering instructions on pages 1 and 7 for details.)

Digital Flow Switch

Hysteresis [ H2] and [the current set value] are displayed in turn. Press the or button to change the set value. Press the button to set. [F 2] Setting of OUT2 completed. Return to function selection mode. : The set value and hysteresis settings limit each other. : The display colour is defined by OUT1 and cannot be changed with any OUT2 settings. -41No.PF-OMO0005-F c.

Digital Flow Switch (Remote type monitor unit)

Input of set values P2dH P2AH n2AH P2AL n2AL Setting of P2L/n2L P2H/n2H Setting of tnL/tPL Setting of P_2/n_2 Setting of tn/tP n2dH P2dL n2dL tnH/tPH H_2 H_t H2 Ht (Page 37) (Page 39) (Page 37) (Page 39) (Page 38) 4. Completed [F 2] Setting of OUT2 is completed. -35No.PF-OMN0012-H 1.

Digital Flow Switch

Hysteresis [H2] is displayed on the main display. [The current set value] flashes on the sub display. Press the or button to change the value. Press the button to set. [F 2] Setting of OUT2 completed.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Light turns on when power is input POWER POWER POWER Transmission indicator Normal: Blinks, Abnormal: Blinks slowly SEND Transmission indicator Normal: Blinks, Abnormal: Turns off or on Transmission indicator Normal: Blinks, Abnormal: Turns off or on SEND SEND Simple wiring standard system S-LINK system Simple wiring H system Send unit: SD-120 S-LINK controller: SL-CU1 Send unit: SD-H2

Shock Absorbers and Rate Controls

0.7 5 2.0 3-55 4,600 1,475,000 3,000 ,500 0Elf,1.5flx3 0.i5 3.0 12.t40 5,900 1,775,000 3,000 7 l 8 650 2.6 0tltl2.0Mx2 t.r3 2.0 12.140 r2,000 2,400,000 7,800 u 1,500 7.5 1l0E[2.(}lf,x2 l . l 2.0 3.30 12,000 2,400,000 i,800 t7 35 4,000 t.5 0Efi2.01tx4 l. t3 4.0 12.t40 24,000 3,200,000 7,800 l6 36 1,500 8.8 0tttlt2.0lltx 6 l.t 3 5.0 12.t40 36,000 3,730,000 7,800 20 [4 t,500 I I.0 0tM3.0l{h2

ZP

H2 H2 L1 M1 M1 M1 D Pad side Pad side Pad side ZP2V-A01ZP2V-AN1ZP2V-A5ZP2V-A8ZP2V-AG1Vacuum generator side D Vacuum generator side M2 M2 L3 L2 H1 Vacuum generator side L2 L33 H1 M2 H1 (L4) (L4) No.0.8 No.0.8 (L4) No.0.8 H2 H2 L1 L1 L1 H2 M1 M1 M1 Pad side Pad side Pad side ZP2V-B01ZP2V-BN1ZP2V-BG1ZP2V-B5ZP2V-B61 The place at the vacuum generator side where the tool is applied. 2 The place

SZ3000

Transmission indicator (Light ON when normal, flickers when voltage is low) (Light ON when normal, flickers when voltage is low) SEND Normal: Blinks, Abnormal: Blinks slowly Transmission indicator Transmission indicator SEND SEND Normal: Blinks, Abnormal: Light OFF or ON Normal: Blinks, Abnormal: Light OFF or ON Uni-wire System Uni-wire H System S-LINK System Send unit: SD-120 Send unit: SD-H2

Table of Contents

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.